Diffusion Morning Report 02/05/07

Ted Berg tberg at stanford.edu
Thu Feb 5 06:28:27 PST 2009


Good Morning All,
    Looking OK this morning. Ebeam is down again no Ext current. TEOS 2 
ampule is empty. Tylan1 is hanging in there. SiGe has possible temp 
control issues Nitride had MFS alarms last step and door close issues. 
No other issues at this time.
  	  	  	  	  	 
  	Date: 	2/5/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	yellow 	I/O error observing 	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	down 	teos empty 	18.16/30 	  	 
Tylan 8-SiGe 	yellow 	  	0/30 	  	 
Tylan 9-Poly 	up 	  	23.45/30 	  	 
Tylan 10-Nitride 	up 	  	.15/30 	  	 
Tylan 11-LTO 	up 	  	20.63/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	down 	no ext current 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 150 psi 	 changeover working well  	  	 


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