Diffusion Morning Report 02/06/09

Ted Berg tberg at stanford.edu
Fri Feb 6 06:15:46 PST 2009


Good morning All,
    Looking good this morning. Ebeam-tip replaced baking and recovering 
Vac.  Burn box cleaned this morning. No other issues at this time.


  	  	  	  	  	 
  	Date: 	2/6/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	I/O error not occuring 	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	teos canister replaced 	18.16/30 	  	 
Tylan 8-SiGe 	yellow 	  	1.12/30 	  	 
Tylan 9-Poly 	up 	  	23.45/30 	  	 
Tylan 10-Nitride 	up 	  	.15/30 	  	 
Tylan 11-LTO 	up 	  	21.233/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	down 	tip changed 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 140 psi 	 changeover working well  	  	 


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