Diffusion Morning Report 02/13/09

Ted Berg tberg at snf.stanford.edu
Fri Feb 13 07:39:11 PST 2009


Good Morning All,
    Looking good this morning. SiGe temp cal in progress. Ebeam looking 
for beam. No other issues at this time.

>   	  	  	  	  	 
>   	Date: 	2/13/09 	THICKNESS-Change at 	  	 
> Tube Name/Number 	Status 	  	  	  	 
> Tylan 1 	up 	  	  	  	 
> Tylan 2 	up 	  	  	  	 
> Tylan 3 	up 	  	  	  	 
> Tylan 4 	up 	  	  	  	 
> Tylan 5-BBr3 	up 	  	  	  	 
> Tylan 6-POCl3 	up 	  	  	  	 
> Tylan 7-TEOS2 	up 	  	27.9/30 	  	 
> Tylan 8-SiGe 	yellow 	temp cal 	1.12/30 	  	 
> Tylan 9-Poly 	up 	  	23.75/30 	  	 
> Tylan 10-Nitride 	up 	  	.22/30 	  	 
> Tylan 11-LTO 	up 	  	21.73/30 	  	 
> Tylan 12-FGA 	up 	  	  	  	 
> Thermco 1 	up 	  	  	  	 
> Thermco 2 	up 	  	  	  	 
> Thermco 3 	future 	  	  	  	 
> Thermco4 	future 	  	  	  	 
> Thermco Poly1 	up 	  	  	  	 
> Thermco Poly2 	up 	  	  	  	 
> Thermco Nitride1 	up 	  	  	  	 
> Thermco Nitride2 	future 	  	  	  	 
> TEL Spa 	up 	  	  	  	 
> Burn Box 	up 	cleaned this morning 	   	  	 
> Ebeam 	down 	tip changed looking for beam 	  	  	 
> ZYGO 	up 	  	  	  	 
> FGA2 	up 	  	  	  	 
> SiH4 for furnaces 	  	B on line 130 psi 	 changeover working well  	  	 
>

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