Diffusion Morning Report 02/24/09

Ted Berg tberg at stanford.edu
Tue Feb 24 06:13:33 PST 2009

Good Morning All,
    Looking fair this morning lots of stuff down. Tylan Nitride has leak 
issues and we are changing NH3 so Thermco nitride is also down. TEOS2 
pump is out for repair. LTO failed leak test. Thermco bank 2 lost 
tables-ordered Mother board. Good News James found beam on ebeam and we 
are now tweeking it in.. No other issues at this time.

  	Date: 	2/24/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	down 	 clean Completed Pump dead 	0/30 	  	 
Tylan 8-SiGe 	yellow 	mfs alarms 	1.12/30 	  	 
Tylan 9-Poly 	up 	  	.13/30 	  	 
Tylan 10-Nitride 	yellow 	pumping  issues,NH3 change 	2.34/30 	  	 
Tylan 11-LTO 	down 	leak fail 	25.67/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	down 	lost tables 	  	  	 
Thermco Nitride1 	down 	NH3 change 	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	yellow 	found beam tweeking 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 700 psi 	 changeover working well  	  	 

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