Diffusion Morning Report 02/25/09

Ted Berg tberg at stanford.edu
Wed Feb 25 07:18:26 PST 2009

Good Morning All,
    Looking OK this morning. TEOS2 pump out for repair. Nitride leak 
checking Thermco bank2 replacing HD. SiGe mfs alarms at end of 
cycle.Tylan 1 O2 zero issue No other problems at this time.

  	Date: 	2/25/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	yellow 	O2 leak issue 	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	down 	 clean Completed Pump dead 	0/30 	  	 
Tylan 8-SiGe 	yellow 	mfs alarms 	2/25/1930 	  	 
Tylan 9-Poly 	up 	  	.13/30 	  	 
Tylan 10-Nitride 	yellow 	pumping  issues 	2.34/30 	  	 
Tylan 11-LTO 	up 	  	25.67/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	replacing HD 	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 700 psi 	 changeover working well  	  	 

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