Diffusion Morning Report 02/26/09

Ted Berg tberg at stanford.edu
Thu Feb 26 06:27:01 PST 2009

Good Morning All,
    Looking good this morning. Nitride is having pump problems again. 
TEOS2 pump is back and we will be installing it today. GeH4 is almost 
empty.It dropped 10 pounds since yesterday. Thermco Poly 1 had boat 
stall issues. No other problems at this time.

  	Date: 	2/26/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	down 	Pump back installing 	0/30 	  	 
Tylan 8-SiGe 	yellow 	mfs alarms 	3.8/30 	  	 
Tylan 9-Poly 	up 	  	.29/30 	  	 
Tylan 10-Nitride 	down 	pumping  issues 	2.34/30 	  	 
Tylan 11-LTO 	up 	  	25.67/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	Boat stall 	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 700 psi 	 changeover working well  	  	 

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