From tberg at stanford.edu Wed Jan 7 06:20:13 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 07 Jan 2009 06:20:13 -0800 Subject: Diffusion morning report 01/07/09 Message-ID: <4964BA1D.3050704@stanford.edu> Good Morning All, Looking good this morning Tylan Nitride down for no dep and all Thermco lps down for burn box issues, ebeam still has beam current issues, 4160 SEMhas possible monitor issues. No other problems at this time. > > Date: 1/7/08 THICKNESS-Change at > Tube Name/Number Status > Tylan 1 up > Tylan 2 up > Tylan 3 up > Tylan 4 up > Tylan 5-BBr3 up > Tylan 6-POCl3 up > Tylan 7-TEOS2 up 18.16/30 > Tylan 8-SiGe yellow Running 0/30 > Tylan 9-Poly up 20.97/30 > Tylan 10-Nitride down no dep 25.56/30 > Tylan 11-LTO up 11.1/30 > Tylan 12-FGA up > Thermco 1 up > Thermco 2 up > Thermco 3 future > Thermco4 future > Thermco Poly1 down burn box > Thermco Poly2 down burn box > Thermco Nitride1 down burn box > Thermco Nitride2 future > TEL Spa up > Burn Box up > Ebeam down beam current fluctuations > ZYGO up > FGA2 up > SiH4 for furnaces B on line 225 psi changeover working well > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 8 06:46:27 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 08 Jan 2009 06:46:27 -0800 Subject: Diffusion Morning Report 01/08/09 Message-ID: <496611C3.2010400@stanford.edu> Good Morning All, Looking good this morning. The only issue is Ebeam-working on Beam current issues. Date: 1/8/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow Running 0/30 Tylan 9-Poly up 20.97/30 Tylan 10-Nitride up 25.71/30 Tylan 11-LTO up 11.1/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down beam current fluctuations ZYGO up FGA2 up SiH4 for furnaces B on line 225 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 9 06:05:27 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 09 Jan 2009 06:05:27 -0800 Subject: Diffusion Morning Report 01/09/09 Message-ID: <496759A7.8010601@stanford.edu> Good Morning All, Looking good this morning. Thermco Nitride is testing. Ebeam still looking at beam stability issues. No other issues at this time. Date: 1/9/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow Running 0/30 Tylan 9-Poly up 20.97/30 Tylan 10-Nitride up 25.71/30 Tylan 11-LTO up 11.6/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow testing Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down beam current fluctuations ZYGO up FGA2 up SiH4 for furnaces B on line 225 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jan 12 06:30:55 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 12 Jan 2009 06:30:55 -0800 Subject: Diffusion Morning Report 01/12/09 Message-ID: <496B541F.7070204@stanford.edu> Good morning All, Looking good this morning. Ebeam beam fluctuations the only issue. Date: 1/12/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow Running 0/30 Tylan 9-Poly up 21.04/30 Tylan 10-Nitride up 25.71/30 Tylan 11-LTO up 11.6/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down beam current fluctuations ZYGO up FGA2 up SiH4 for furnaces B on line 225 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jan 13 06:13:01 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 13 Jan 2009 06:13:01 -0800 Subject: Diffusion Morning Report 01/13/09 Message-ID: <496CA16D.1010008@stanford.edu> Good Morning All, Looking good again this morning. Ebeam -changed tip and cryo regen. No other issues at this time. Date: 1/13/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow Running 0/30 Tylan 9-Poly up 21.04/30 Tylan 10-Nitride up 25.71/30 Tylan 11-LTO up 12.23/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down beam current fluctuations ZYGO up FGA2 up SiH4 for furnaces B on line 220 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 14 06:23:00 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 14 Jan 2009 06:23:00 -0800 Subject: Diffusion Morning Report 01/14/09 Message-ID: <496DF544.5080506@stanford.edu> Good Morning All, Looking good this morning. Tel has a gas pressure issue looking into it. Ebeam- changed tip and regened cryos. bringing back beam. No other issues at this time. Date: 1/14/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow Running 0/30 Tylan 9-Poly up 21.19/30 Tylan 10-Nitride up 25.71/30 Tylan 11-LTO up 12.23/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa yellow Gas pressure issue Burn Box up Ebeam down beam current fluctuations ZYGO up FGA2 up SiH4 for furnaces B on line 220 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 15 06:25:00 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 15 Jan 2009 06:25:00 -0800 Subject: Diffusion Morning Report 01/15/09 Message-ID: <496F473C.6010802@stanford.edu> Good Morning All, Looking good this morning. Once again the only thing down is Ebeam- bringing up after tip change. Date: 1/15/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow Running 0/30 Tylan 9-Poly up 21.19/30 Tylan 10-Nitride up 26.5/30 Tylan 11-LTO up 12.23/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down beam current fluctuations ZYGO up FGA2 up SiH4 for furnaces B on line 220 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 16 06:49:26 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 16 Jan 2009 06:49:26 -0800 Subject: Diffusion Morning Report 01/16/09 Message-ID: <49709E76.3000305@stanford.edu> Good Morning All, Looking good this morning. Looking for beam on Ebeam. Tylan burn box cleaned this morning Date: 1/16/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow Running 0/30 Tylan 9-Poly up 21.19/30 Tylan 10-Nitride up 26.5/30 Tylan 11-LTO up 12.23/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down beam current fluctuations ZYGO up FGA2 up SiH4 for furnaces B on line 220 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jan 20 07:28:12 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 20 Jan 2009 07:28:12 -0800 Subject: Diffusion Morning Report 01/20/09 Message-ID: <4975ED8C.6010500@stanford.edu> Good Morning All, Looking good this morning. Cleaned TEOS pump line and flowed O2. Changed lamps onbank 1. Possible loader issue on Tylan 5. Ebeam still looking for beam. No other issues at this time. Date: 1/20/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 yellow possible loader issue Tylan 6-POCl3 up Tylan 7-TEOS2 up Cleaned plugged pump line 18.16/30 Tylan 8-SiGe yellow Running 0/30 Tylan 9-Poly up 22.03/30 Tylan 10-Nitride up 26.5/30 Tylan 11-LTO up 15.53/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down beam current fluctuations ZYGO up FGA2 up SiH4 for furnaces B on line 220 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 21 06:13:30 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 21 Jan 2009 06:13:30 -0800 Subject: Diffusion Morning Report 01/21/09 Message-ID: <49772D8A.80904@stanford.edu> Good Morning All, Looking good this mormning. Ebeam beam still illusive. No other issues at this time. Date: 1/21/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow Running 0/30 Tylan 9-Poly up 22.03/30 Tylan 10-Nitride up 26.79/30 Tylan 11-LTO up 16.07/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down beam current fluctuations ZYGO up FGA2 up SiH4 for furnaces B on line 220 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 22 06:19:49 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 22 Jan 2009 06:19:49 -0800 Subject: Diffusion Morning Report 01/22/09 Message-ID: <49788085.2070404@stanford.edu> Good Morning All, Looking good this morning. Ebeam still looking for beam. No other issues at this time. Date: 1/22/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow Running 0/30 Tylan 9-Poly up 22.03/30 Tylan 10-Nitride up 26.79/30 Tylan 11-LTO up 16.07/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down beam current fluctuations ZYGO up FGA2 up SiH4 for furnaces B on line 200 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 23 06:21:08 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 23 Jan 2009 06:21:08 -0800 Subject: Diffusion Morning Report 01.23/09 Message-ID: <4979D254.2020501@stanford.edu> Good Morning All, Looking good this morning. Ebeam beam finding. Tylan 1 had I/O errors observing. Burn box clean this morning. No other issues at this time. Date: 1/23/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow I/O error observing Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow Running 0/30 Tylan 9-Poly up 22.03/30 Tylan 10-Nitride up 26.79/30 Tylan 11-LTO up 16.5/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down beam current fluctuations ZYGO up FGA2 up SiH4 for furnaces B on line 200 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jan 26 06:25:14 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 26 Jan 2009 06:25:14 -0800 Subject: Diffusion Morning Report 01/26/09 Message-ID: <497DC7CA.50702@stanford.edu> Good Morning All, Looking good this morning. Observing Tylan1. Ebeam-Field service will be here today. No other issues at this time. Date: 1/26/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow I/O error observing Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow Running 0/30 Tylan 9-Poly up 23.4/30 Tylan 10-Nitride up 26.79/30 Tylan 11-LTO up 16.5/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down fs coming today ZYGO up FGA2 up SiH4 for furnaces B on line 180 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jan 27 06:25:26 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 27 Jan 2009 06:25:26 -0800 Subject: Diffusion Morning Report 01/27/09 Message-ID: <497F1956.6000805@stanford.edu> Good Morning All, Looking good this morning. Tylan 1 still looks OK but observing. Ebeam column taken apart and re assembled. waiting for good vacuum. No other issues at this time. Date: 1/27/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow I/O error observing Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow Running 0/30 Tylan 9-Poly up 23.4/30 Tylan 10-Nitride up 26.94/30 Tylan 11-LTO up 16.55/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down fs rebuilding column ZYGO up FGA2 up SiH4 for furnaces B on line 165 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 28 06:14:25 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 28 Jan 2009 06:14:25 -0800 Subject: Diffusion morning Report 01/28/09 Message-ID: <49806841.5090207@stanford.edu> Good Morning All, Looking good this morning. Tyaln 1 still has issues. Ebeam- beam is found and looks relatively stable after column rebuild.No other problems at this time. Date: 1/28/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 Down I/O error observing Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow Running 0/30 Tylan 9-Poly up 23.45/30 Tylan 10-Nitride up 28.04/30 Tylan 11-LTO up 16.55/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down tweeking machine-found beam ZYGO up FGA2 up SiH4 for furnaces B on line 160 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 29 06:19:59 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 29 Jan 2009 06:19:59 -0800 Subject: Diffusion Morning Report 01/29/09 Message-ID: <4981BB0F.4030709@stanford.edu> Good Morning All, Looking good this morning. Tylan LTO has broken quartz. Tylan 1 has I/O issues.Tylan FGA not reaching 550. Ebeam tweeking beam and testing..No other issues at this time. Date: 1/29/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 down I/O error observing Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow Running 0/30 Tylan 9-Poly up 23.45/30 Tylan 10-Nitride up 29.4/30 Tylan 11-LTO yellow broken Quartz 17.08/30 Tylan 12-FGA yellow Doesn't reach 550 Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down tweeking machine-found beam ZYGO up FGA2 up SiH4 for furnaces B on line 160 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 30 06:16:36 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 30 Jan 2009 06:16:36 -0800 Subject: Diffusion Morning Report 01/30/09 Message-ID: <49830BC4.8000509@stanford.edu> Good Morning All, Looking good this morning Tylan 1 is maintaing its memory after PS adjustment -observing. Ebeam has a beam and several test wafers have been shot-looking hopeful. FGA temp issue may be a recipe issue. Burn box clean this morning. No other issues at thyis time. Date: 1/30/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 down I/O error observing Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow Running 0/30 Tylan 9-Poly up 23.45/30 Tylan 10-Nitride up 29.4/30 Tylan 11-LTO up 17.08/30 Tylan 12-FGA yellow Doesn't reach 550 Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down tweeking machine-found beam ZYGO up FGA2 up SiH4 for furnaces B on line 160 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: