From tberg at stanford.edu Wed Jul 1 06:39:11 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 01 Jul 2009 06:39:11 -0700 Subject: Diffusion Morning Report 07/01/09 Message-ID: <4A4B66FF.5000809@stanford.edu> Good Morning All, Looking good this morning. Tylan poly down for routine pull and clean. SiGe temp cal in progress. Tylan Nitride checked flows and temps looks OKTHermco Nitride pump out for repair. Thermco LTO testing for Qual. No other issues at this time. Date: 7/1/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down pressure issues 1.4/30 Tylan 8-SiGe down temp cal 3.0/30 Tylan 9-Poly up 33.65/30 Tylan 10-Nitride yellow Checked flows and temp looks OK .48/30 Tylan 11-LTO up 14.9/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 323 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jul 2 06:20:54 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 02 Jul 2009 06:20:54 -0700 Subject: Diffusion Morniong Report 07/02/09 Message-ID: <4A4CB436.4040309@stanford.edu> Good Morning All, Looking OK this morning. POly is going back together after pull and clean. SiGe temp cal ongoing. Thermco Nitride pump out for repair. Burn box clean this morning.Thermco LTO testing. Tylan Nitride ammonia cahnged should be OK. No other issues at this time. Date: 7/2/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 1.63/30 Tylan 8-SiGe down temp cal 3.0/30 Tylan 9-Poly down pull and clean 0/30 Tylan 10-Nitride yellow .48/30 Tylan 11-LTO up 17.57/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 323 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jul 6 06:52:09 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 06 Jul 2009 06:52:09 -0700 Subject: Diffusion Morning Report 07/06/09 Message-ID: <4A520189.4000200@stanford.edu> Good Morning All, Looking OK this Morning. LOts of LP issues. Sheath broken in LTO. Nitride didn't make pump.down. Poly may have door close issues. Thermco Nitride pump still out for repair. Thermco LTO testing for qual. and TYlan 3 has poor uniformity. No other issues at this time. Date: 7/6/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 yellow poor uniformity Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.27/30 Tylan 8-SiGe yellow 3.0/30 Tylan 9-Poly up door may need adjust .92/30 Tylan 10-Nitride yellow door may need adjust 1.11/30 Tylan 11-LTO down broken Cantilever shesths 17.62/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 323 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jul 7 06:23:20 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 07 Jul 2009 06:23:20 -0700 Subject: Diffusion Morning Report 07/07/09 Message-ID: <4A534C48.6050708@stanford.edu> Good Morning All, Looking OK this morning. Tylan LTO has a broken injector. Tylan 3 has a broken Cantilever sheath. Thermco Nitride pump out for repair. Tel wafers moving too fast? Thermco LTO testing for qual. No other issues at this time. Date: 7/7/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 down broken Cantilever sheath Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.27/30 Tylan 8-SiGe yellow 3.0/30 Tylan 9-Poly up .92/30 Tylan 10-Nitride up 1.3/30 Tylan 11-LTO down broken injector 17.68/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 305 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jul 8 07:08:57 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 08 Jul 2009 07:08:57 -0700 Subject: Diffusion Morning Report 07/08/09 Message-ID: <4A54A879.4030408@stanford.edu> Good Morning All, Looking good this morning.. Tylan LTo pump was off-reset looks ok but observing. Thermco Poly 2-replaced TC sheath and reset pumps-looks good.Tylan 3 is down for tube alignment. Thermco nitride pump out for repair. Thermco LTO testing for qual. SiGe temp cal again. No other issues at this time. Date: 7/8/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 down tube alignment Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.27/30 Tylan 8-SiGe down temp cal 3.0/30 Tylan 9-Poly up 1.32/30 Tylan 10-Nitride up 1.3/30 Tylan 11-LTO yellow reset pump looks ok 18.74/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up broken tc sheath-replaced Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 305 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jul 9 06:45:48 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 09 Jul 2009 06:45:48 -0700 Subject: Diffusion Morning Report 07/09/09 Message-ID: <4A55F48C.4050300@stanford.edu> Good Morning All, Looking good this morning. Tylan 3 adjusted and TLC clean needs test. SiGe is down for pull and clean then temp cal. LTO had high pressure on a run but the next one was OK?? Thermco Nitride pump out for repair no ETA. Thermco LTO testing. No other issues at this time. Date: 7/9/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 down tube alignment completed needs test Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.27/30 Tylan 8-SiGe down pull and clean 0/30 Tylan 9-Poly up 1.32/30 Tylan 10-Nitride up 1.3/30 Tylan 11-LTO yellow pressure issue on a run 20.19/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 305 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jul 10 06:15:50 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 10 Jul 2009 06:15:50 -0700 Subject: diffusion morning report 07/10/09 Message-ID: <4A573F06.8010007@stanford.edu> Good Morning All, Looking good this morning. Tylan 3 is up. Great job Ray and Nancy! SiGe is in pull and clean. Ebeam has low beam current. Thermco poly 2 has some particles. Thermco Nitride pump is out for repair. Thermco LTO is testing for qual. Burn box clean this morning. No other issues at this time. Date: 7/10/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up quals great Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.27/30 Tylan 8-SiGe down pull and clean 0/30 Tylan 9-Poly up 1.32/30 Tylan 10-Nitride up 1.3/30 Tylan 11-LTO up 20.69/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow particles Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow low beam current ZYGO up FGA2 up SiH4 for furnaces A on line 293 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jul 13 06:53:00 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 13 Jul 2009 06:53:00 -0700 Subject: Diffusion Morning Report 07/13/09 Message-ID: <4A5B3C3C.1090602@stanford.edu> Good Morning All, Looking good this morning. Tylan Nitride has a broken TC sheath. Tylan SiGe tube change completed temp cal in progress. Thermco Nitride pump out for repair. Thermco LTO testing. Thermco Poly 2 has possible particle problems. No other issues at this time. Date: 7/13/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.27/30 Tylan 8-SiGe down pull and clean done temp cal 0/30 Tylan 9-Poly up 1.92/30 Tylan 10-Nitride down Broken TC sheath 1.62/30 Tylan 11-LTO up 21.4/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow particles ? Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow low beam current ZYGO up FGA2 up SiH4 for furnaces A on line 293 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jul 14 06:48:40 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 14 Jul 2009 06:48:40 -0700 Subject: Diffusion Morning Report 07/14/09 Message-ID: <4A5C8CB8.806@stanford.edu> Good Morning All, Looking good this morning . Tylan Nitride is back together and needs a test after repair. SIge needs coat and test after pull and clean. Thermco nitride pump out for repair. Thermco LTO testing. No other major issues at this time. Date: 7/14/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.76/30 Tylan 8-SiGe down temp cal-needs coat and test 0/30 Tylan 9-Poly up 1.92/30 Tylan 10-Nitride up TC sheath replaced needs test 1.62/30 Tylan 11-LTO up 22.6/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow particles ? Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 283 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Jul 15 06:44:56 2009 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 15 Jul 2009 06:44:56 -0700 Subject: Diffusion Morning Report Message-ID: <4A5DDD58.6090104@stanford.edu> Good Morning All, Looking good this morning . SIGE test after pull and clean. Thermco nitride pump out for repair. Thermco LTO testing. No other major issues at this time. Date: 7/15/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 *up* * * * * * * Tylan 2 *up* * * * * * * Tylan 3 *up* * * * * * * Tylan 4 *up* * * * * * * Tylan 5-BBr3 *up* * * * * * * Tylan 6-POCl3 *up* * * * * * * Tylan 7-TEOS2 *up* * * *2.93/30* * * Tylan 8-SiGe *down* * temp cal-needs coat and test* *0/30* * * Tylan 9-Poly *up* * * *1.92/30* * * Tylan 10-Nitride *up* *1.62/30* * * Tylan 11-LTO *up* *25.1/30* * * Tylan 12-FGA *up* * * * * * * Thermco 1 *up* * * * * * * Thermco 2 *up* * * * * * * Thermco 3 *future* * * * * * * Thermco4 *future* * * * * * * Thermco Poly1 *up* * * * * * * Thermco Poly2 *yellow* *particles ?* * * * * Thermco Nitride1 *down* *dead pump* * * * * Thermco bpsg *future* *testing for qual* * * * * TEL Spa *up* * * * * * * Burn Box *up* * * * * * * Ebeam *up* * * * * * * ZYGO *up* * * * * * * FGA2 *up* * * * * * * SiH4 for furnaces * * *A on line 276 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jul 16 06:18:41 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 16 Jul 2009 06:18:41 -0700 Subject: Diffusion Morning Report 07/16/09 Message-ID: <4A5F28B1.6020307@stanford.edu> Good Morning All, Looking good this morning. Tylan Nitride and SiGe need tests after repairs.Thermco Poly 2 has possible particle problems. Thermco Nitride pump should be back this week. Thermco LTO testing for qual. SEM hitachi unable to turn on High voltage. No other issues at this time. Date: 7/16/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.93/30 Tylan 8-SiGe down temp cal completed-needs test 0/30 Tylan 9-Poly up 2.84/30 Tylan 10-Nitride yellow needs test 1.62/30 Tylan 11-LTO up 25.14/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow particles ? Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 250 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jul 17 06:10:18 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 17 Jul 2009 06:10:18 -0700 Subject: Diffusion Morning Report 07/17/09 Message-ID: <4A60783A.8090800@stanford.edu> Good Morning All, Looking good this morning. SiGe was run yesterday but no data. Thermco nitride pump should be back today. THermco LTO testing for qual. No other issues at this time. Date: 7/17/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.93/30 Tylan 8-SiGe down temp cal completed-needs test 0/30 Tylan 9-Poly up 2.84/30 Tylan 10-Nitride up 1.62/30 Tylan 11-LTO up 25.14/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow particles ? Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 230 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jul 20 06:29:02 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 20 Jul 2009 06:29:02 -0700 Subject: Diffusion Morning Report 07/20/09 Message-ID: <4A64711E.4080809@stanford.edu> Good Morning All, Looking good this morning. Tylan LTO has a door close issue It is past thickness limit and is goiung down for clean on WED. Tylan SiGe has some haze. Thermco Nitride pump should be back today.TEOS2 Dep rate fluctuations? Tylan 1 communication error. No other issues at this time. Date: 7/20/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 down communication error Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow dep rate 2.93/30 Tylan 8-SiGe yellow haze 1.51/30 Tylan 9-Poly up 2.84/30 Tylan 10-Nitride up 1.76/30 Tylan 11-LTO yellow door issue 32.65/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 179 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jul 21 06:45:30 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 21 Jul 2009 06:45:30 -0700 Subject: Diffusion Morning Report 07/21/09 Message-ID: <4A65C67A.8020805@stanford.edu> Good Morning A, Looking OK this morning. LTO is over thickness limit and will go down tomorrow for pull and clean. Tylan Nitride-gas ring out for repair.Thermco nitride pump should be back today. TEOS and Sige have possible process iussues. Thermco LTO testing for Qual. Tylan 1 observing -comm issues. Date: 7/21/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow communication error-observation Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow dep rate 3.35/30 Tylan 8-SiGe yellow haze 1.51/30 Tylan 9-Poly up 3.14/30 Tylan 10-Nitride down Gas ring repair 1.76/30 Tylan 11-LTO yellow door issue 33.89/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 169 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jul 22 06:47:22 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 22 Jul 2009 06:47:22 -0700 Subject: Diffusion Morning Report07/22/09 Message-ID: <4A67186A.9000506@stanford.edu> Good Morning All, Looking good this morning. LTO is down for scheduled pull and clean. Tylan Nitride gas ring is out for repair. Thermco Nitride pump is back and will be installed soon. TEOS2 has possible variing dep rate. SiGe has possible haze.Thermco LTO testing for Qual. No other issues at this time. Date: 7/22/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow dep rate 3.35/30 Tylan 8-SiGe yellow haze 2.02/30 Tylan 9-Poly up 3.3/30 Tylan 10-Nitride down Gas ring repair 1.76/30 Tylan 11-LTO down pull and clean 0/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down pump is back will install Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 155 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jul 23 06:24:21 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 23 Jul 2009 06:24:21 -0700 Subject: Diffusion Morning Report 07/23/09 Message-ID: <4A686485.4080209@stanford.edu> Good Morningh All, Looking OK this morning. Tylan LTO is back together andleak checking. Thermco Nitride pump is back and being installed. Tylan Nitride gas ring should be back today.TEOS2 is running with no comments. SiGe has possible haze. Thermco LTO is testing for Qual. Ebeam has low beam current. No other issues at this time. Date: 7/23/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow dep rate 3.35/30 Tylan 8-SiGe yellow haze 2.02/30 Tylan 9-Poly up 3.3/30 Tylan 10-Nitride down Gas ring repair 1.76/30 Tylan 11-LTO down pull and clean 0/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down pump is back- installing Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 153 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jul 24 06:31:40 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 24 Jul 2009 06:31:40 -0700 Subject: Diffusion Morning Report 07/24/09 Message-ID: <4A69B7BC.6030102@stanford.edu> Good Morning All, Looking good this morning. Tylan LTO and Nitride back together quickly-Thanks Ray. Thermco Nitride pump is back and being installed. SiGe has possible haze.THermco LTO is testing for Qual. no other major issues at this time. Date: 7/24/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow dep rate 3.35/30 Tylan 8-SiGe yellow haze 2.02/30 Tylan 9-Poly up 5.84/30 Tylan 10-Nitride yellow needs test after gas ring replacement 2.54/30 Tylan 11-LTO yellow tested after pull and clean 1.16/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down pump is back- installing Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 153 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jul 27 07:04:37 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 27 Jul 2009 07:04:37 -0700 Subject: Diffusion Morning Report 07/27/09 Message-ID: <4A6DB3F5.6000004@stanford.edu> Good Morning All, Looking good this morning. Some possible dep rate and Haze issues with TEOS2 and SiGe. Thermco LTO testing for Qual. No other issues at this time. Date: 7/27/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow dep rate ? 3.35/30 Tylan 8-SiGe yellow haze ? 2.26/30 Tylan 9-Poly up 13.94/30 Tylan 10-Nitride up 2.64/30 Tylan 11-LTO up 11.7/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 49 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jul 28 06:20:02 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 28 Jul 2009 06:20:02 -0700 Subject: Diffusion Morning Report 07/28/09 Message-ID: <4A6EFB02.1060508@stanford.edu> Good Morning All, Looking good this morning. TEOS2 has possible dep rate issues and SiGe has possible dep issues.Thermco LTO testing for Qual. No other major issues at this time. Date: 7/28/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow dep rate ? 3.39/30 Tylan 8-SiGe yellow haze ? 2.5/30 Tylan 9-Poly up 13.94/30 Tylan 10-Nitride up 2.86/30 Tylan 11-LTO up 12.02/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 705 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jul 29 06:30:12 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 29 Jul 2009 06:30:12 -0700 Subject: Diffusion Morning Report 07/29/09 Message-ID: <4A704EE4.5080805@stanford.edu> Good Morning All, Looking good this morning. Possible dep ratissues with TEOS2 and SiGe. Thermco LTO testing. No other issues at this time. Date: 7/29/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow dep rate ? 3.39/30 Tylan 8-SiGe yellow haze ? 2.5/30 Tylan 9-Poly up 14.24/30 Tylan 10-Nitride up 2.86/30 Tylan 11-LTO up 16.07/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 705 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jul 30 06:13:36 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 30 Jul 2009 06:13:36 -0700 Subject: Diffusion Morning Report 07/30/09 Message-ID: <4A719C80.8060504@stanford.edu> Good Morning All, Looking good this morning .TEOS2 and Sige have possible process issues. Thermco LTO testing. No other issues at this time. Date: 7/30/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow dep rate ? 3.39/30 Tylan 8-SiGe yellow haze ? 2.5/30 Tylan 9-Poly up 14.86/30 Tylan 10-Nitride up 2.88/30 Tylan 11-LTO up 18.44/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 705 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jul 31 06:34:31 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 31 Jul 2009 06:34:31 -0700 Subject: Diffusion Morning Report 07/31/09 Message-ID: <4A72F2E7.7030803@stanford.edu> Good Morning All, Looking OK this morning. SiGe shut down for high leak rate. FGA shut down for a broken tube. Thermco Nitride has possible particles. Thermco LTO is testing for Qual. Burn box clean this morning. No other issues at this time. Date: 7/31/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow dep rate ? 3.39/30 Tylan 8-SiGe down Leak rate 2.5/30 Tylan 9-Poly up 15.59/30 Tylan 10-Nitride up 7.8/30 Tylan 11-LTO up 19.44/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow Particles Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 down Broken tube SiH4 for furnaces B on line 687 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: