From tberg at stanford.edu Mon Jun 1 06:37:19 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 01 Jun 2009 06:37:19 -0700 Subject: Diffusion morning Report 06/01/09 Message-ID: <4A23D98F.4060703@stanford.edu> Good Morning All Looking good this morning. TEOS 2 needs cannister Change. SiGe not pumping. Tylan 1 needs a test after repair. Tylan 2 poor uniformity. Thermco LTO testing. No other issues at this time. Date: 6/1/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 down Needs test after repair Tylan 2 up poor uniformity Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down canniser change 3.8/30 Tylan 8-SiGe down not pumping 18.28/30 Tylan 9-Poly up 23.03/30 Tylan 10-Nitride up 18.65/30 Tylan 11-LTO up 4.55/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 451 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jun 2 06:17:46 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 02 Jun 2009 06:17:46 -0700 Subject: Diffusion Morning Report 06/02/09 Message-ID: <4A25267A.4090005@stanford.edu> Good Morning All, Looking good this morning. SiGe pump is out for repair. Tylan 1 needs a test. Tylan 3 had temp issues at 450 C. TEOS2 had cannister change yesterday. Thermco LTO is testing. No other issues at this time. Date: 6/2/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 down Needs test after repair Tylan 2 up poor uniformity Tylan 3 yellow issues at low temps Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 1.5/30 Tylan 8-SiGe down pump out for repair 18.28/30 Tylan 9-Poly up 23.03/30 Tylan 10-Nitride up 18.65/30 Tylan 11-LTO up 4.55/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 451 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jun 3 06:19:15 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 03 Jun 2009 06:19:15 -0700 Subject: Diffusion Morning Report 06/03/09 Message-ID: <4A267853.4060509@stanford.edu> Good Morning All, Looking good this morning. Waiting test results for Tylan Oxides. Tylan Nitride has possible pumping issues. SiGe pump out for repair. Thermco LTO testing. No other issues at this time. Date: 6/3/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 down Needs test after repair Tylan 2 up poor uniformity Tylan 3 yellow issues at low temps Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 1.5/30 Tylan 8-SiGe down pump out for repair 18.28/30 Tylan 9-Poly up 23.03/30 Tylan 10-Nitride yellow Can't run pump program 18.65/30 Tylan 11-LTO up 4.81/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 451 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jun 4 06:10:08 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 04 Jun 2009 06:10:08 -0700 Subject: Diffusion Morning Report 06/04/09 Message-ID: <4A27C7B0.7010906@stanford.edu> Good Morning All, Looking OK this morning. SiGe Pump is out for repair. TEOS2 has flow issues, Tylan 3 temp cal, Tylan 4 has a cracked sheath. Thermco LTO testing. No other issues at this time. Date: 6/3/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up poor uniformity-door adjusted Tylan 3 yellow temp cal Tylan 4 down cracked sheath Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down teos flow issues 1.5/30 Tylan 8-SiGe down pump out for repair 18.28/30 Tylan 9-Poly up 23.03/30 Tylan 10-Nitride up 18.93/30 Tylan 11-LTO up 4.81/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 451 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jun 5 06:12:13 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 05 Jun 2009 06:12:13 -0700 Subject: Diffusion Morning Report 06/05/09 Message-ID: <4A2919AD.1000000@stanford.edu> Good Morning All, Looking OK this morning. SiGe pump will hopefully be back on Monday. TEOS 2 is having pressure/flow issues. Tylan oxides 3 and 4 are testing Thermco LTO is testing. Burn box clean this morning. No other issues at this time. Date: 6/5/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 yellow temp cal Tylan 4 down needs test Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down teos flow issues 1.5/30 Tylan 8-SiGe down pump out for repair 18.28/30 Tylan 9-Poly up 23.03/30 Tylan 10-Nitride up 18.93/30 Tylan 11-LTO up 5.32/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 451 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jun 8 06:49:30 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 08 Jun 2009 06:49:30 -0700 Subject: Diffusion Morning Report 06/08/09 Message-ID: <4A2D16EA.1010302@stanford.edu> Good Morning All, Looking OK this morning. Tylan nitride has a bad pump. SiGe pump is supposed to be back today. TEOS2 needs a test. No other issues at this time. > > Date: 6/8/09 THICKNESS-Change at > Tube Name/Number Status > Tylan 1 up > Tylan 2 up > Tylan 3 up > Tylan 4 up > Tylan 5-BBr3 up > Tylan 6-POCl3 up > Tylan 7-TEOS2 yellow needs test 1.5/30 > Tylan 8-SiGe down pump out for repair 18.28/30 > Tylan 9-Poly up 23.03/30 > Tylan 10-Nitride down Bad pump 20.93/30 > Tylan 11-LTO up 5.72/30 > Tylan 12-FGA up > Thermco 1 up > Thermco 2 up > Thermco 3 future > Thermco4 future > Thermco Poly1 up > Thermco Poly2 up > Thermco Nitride1 up > Thermco bpsg future testing for qual > TEL Spa up > Burn Box up > > Ebeam up > ZYGO up > FGA2 up > SiH4 for furnaces A on line 441 psi changeover working well > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jun 9 06:09:13 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 09 Jun 2009 06:09:13 -0700 Subject: Diffusion Morning Report 06/09/09 Message-ID: <4A2E5EF9.8040700@stanford.edu> Good Morning All, Looking good this morning. POCl3 is empty and on order. Nitride had a pump change and now the tube. TEOS2 testing Thermco LTO testing. SiGe pump should be back today. No other issues at this time. Date: 6/9/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 down no POcl3-ordered Tylan 7-TEOS2 yellow needs test 1.5/30 Tylan 8-SiGe down pump out for repair 18.28/30 Tylan 9-Poly up 23.03/30 Tylan 10-Nitride down Pump replaced-tube change 20.93/30 Tylan 11-LTO up 6.22/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 441 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jun 10 06:04:34 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 10 Jun 2009 06:04:34 -0700 Subject: Diffusion Morning Report 06/10/09 Message-ID: <4A2FAF62.7040903@stanford.edu> Good Morning All, Looking good this morning SiGe pump is back and will be installed this morning. Nitride is going back together. POCl3 shipped yesterday. TEOS2 waiting test results. Thermco LTO testing. No other issues at this time. Date: 6/10/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 down no POcl3-shipped yesterday Tylan 7-TEOS2 yellow needs test 1.5/30 Tylan 8-SiGe down pump install today 18.28/30 Tylan 9-Poly up 23.03/30 Tylan 10-Nitride down Pump replaced-tube change 0/30 Tylan 11-LTO up 7.1/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 441 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Thu Jun 11 07:14:12 2009 From: rseymour at stanford.edu (Ray Seymour) Date: Thu, 11 Jun 2009 07:14:12 -0700 Subject: Diffusion Morning report Message-ID: <4A311134.7030601@stanford.edu> Good Morning All, Looking good this morning. POCl3 is empty and on order. Thermco LTO testing. Nitride opened at 800. SiGe needs a test. Date: 6/10/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 *up* * * * * * * Tylan 2 *up* * * * * * * Tylan 3 *up* * * * * * * Tylan 4 *up* * * * * * * Tylan 5-BBr3 *up* * * * * * * Tylan 6-POCl3 *down* * POCL3-ordered* * * * * Tylan 7-TEOS2 *UP* * * *1.5/30* * * Tylan 8-SiGe *UP* * * *18.28/30* * * Tylan 9-Poly *up* * * *23.11/30* * * Tylan 10-Nitride *down* *Temp issue * *.14/30* * * Tylan 11-LTO *up* * * *7.47+/30* * * Tylan 12-FGA *up* * * * * * * Thermco 1 *up* * * * * * * Thermco 2 *up* * * * * * * Thermco 3 *future* * * * * * * Thermco4 *future* * * * * * * Thermco Poly1 *up* * * * * * * Thermco Poly2 *up* * * * * * * Thermco Nitride1 *up* * * * * * * Thermco bpsg *future* *testing for qual* * * * * TEL Spa *up* * * * * * * Burn Box *up* * * * * * * Ebeam *up* * * * * * * ZYGO *up* * * * * * * FGA2 *up* * * * * * * SiH4 for furnaces * * *A on line 441 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Jun 12 09:35:10 2009 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 12 Jun 2009 09:35:10 -0700 Subject: Diffusion Morning report Message-ID: <4A3283BE.4000504@stanford.edu> Good Morning All, Looking good this morning. POCl3 is empty and on order. Thermco LTO testing. SiGe needs a test, and had H2 interlock error. Date: 6/12/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 *up* * * * * * * Tylan 2 *up* * * * * * * Tylan 3 *up* * * * * * * Tylan 4 *up* * * * * * * Tylan 5-BBr3 *up* * * * * * * Tylan 6-POCl3 *down* * POCL3-ordered* * * * * Tylan 7-TEOS2 *UP* * * *1.5/30* * * Tylan 8-SiGe *UP* * * *18.28/30* * * Tylan 9-Poly *up* * * *23.11/30* * * Tylan 10-Nitride *up* * * *.15/30* * * Tylan 11-LTO *up* * * *7.47/30* * * Tylan 12-FGA *up* * * * * * * Thermco 1 *up* * * * * * * Thermco 2 *up* * * * * * * Thermco 3 *future* * * * * * * Thermco4 *future* * * * * * * Thermco Poly1 *up* * * * * * * Thermco Poly2 *up* * * * * * * Thermco Nitride1 *up* * * * * * * Thermco bpsg *future* *testing for qual* * * * * TEL Spa *up* * * * * * * Burn Box *up* *Cleaned this monring * * * * * Ebeam *up* * * * * * * ZYGO *up* * * * * * * FGA2 *up* * * * * * * SiH4 for furnaces * * *A on line 419 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Mon Jun 15 07:21:44 2009 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 15 Jun 2009 07:21:44 -0700 Subject: Diffusion Morning report Message-ID: <4A3658F8.2030903@stanford.edu> Good Morning All, POCl3 is empty and on order. Thermco LTO testing. TEOS2 and BPSG failing leak check. Nitride had some spots on a few wafers. All else looking good this morning. Date: 6/15/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 *up* * * * * * * Tylan 2 *up* * * * * * * Tylan 3 *up* * * * * * * Tylan 4 *up* * * * * * * Tylan 5-BBr3 *up* * * * * * * Tylan 6-POCl3 *down* * POCL3-ordered* * * * * Tylan 7-TEOS2 *UP* * * *1.5/30* * * Tylan 8-SiGe *UP* * * *18.28/30* * * Tylan 9-Poly *up* * * *23.11/30* * * Tylan 10-Nitride *up* *Sopts on some wafers * *.19/30* * * Tylan 11-LTO *up* * * *8.57/30* * * Tylan 12-FGA *up* * * * * * * Thermco 1 *up* * * * * * * Thermco 2 *up* * * * * * * Thermco 3 *future* * * * * * * Thermco4 *future* * * * * * * Thermco Poly1 *up* * * * * * * Thermco Poly2 *up* * * * * * * Thermco Nitride1 *up* * * * * * * Thermco bpsg *future* *testing for qual* * * * * TEL Spa *up* * * * * * * Burn Box *up* * * * * * * Ebeam *up* * * * * * * ZYGO *up* * * * * * * FGA2 *up* * * * * * * SiH4 for furnaces * * *A on line 416 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Tue Jun 16 07:23:39 2009 From: rseymour at stanford.edu (Ray Seymour) Date: Tue, 16 Jun 2009 07:23:39 -0700 Subject: Diffusion Morning report Message-ID: <4A37AAEB.4050109@stanford.edu> Good Morning All, Looking good this morning. POCl3 is empty and on order. Thermco LTO testing. SiGe and TEOS need a test. Tylannitride particles on second boat. All else good.. Date: 6/16/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 *up* * * * * * * Tylan 2 *up* * * * * * * Tylan 3 *up* * * * * * * Tylan 4 *up* * * * * * * Tylan 5-BBr3 *up* * * * * * * Tylan 6-POCl3 *down* * POCL3-ordered* * * * * Tylan 7-TEOS2 *problem* *Needs test * *1.5/30* * * Tylan 8-SiGe *problem* *Needs test * *18.28/30* * * Tylan 10-Nitride *up* * * *.35/30* * * Tylan 11-LTO *up* * * *7.55/30* * * Tylan 12-FGA *up* * * * * * * Thermco 1 *up* * * * * * * Thermco 2 *up* * * * * * * Thermco 3 *future* * * * * * * Thermco4 *future* * * * * * * Thermco Poly1 *up* * * * * * * Thermco Poly2 *up* * * * * * * Thermco Nitride1 *up* * * * * * * Thermco bpsg *future* *testing for qual* * * * * TEL Spa *up* * * * * * * Burn Box *up* * * * * * * Ebeam *up* * * * * * * ZYGO *up* * * * * * * FGA2 *up* * * * * * * SiH4 for furnaces * * *A on line 416 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Jun 17 07:09:18 2009 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 17 Jun 2009 07:09:18 -0700 Subject: Diffusion Morning report Message-ID: <4A38F90E.4030706@stanford.edu> Good Morning All, Looking good this morning. Thermco LTO testing. SiGe and TEOS need a test. Tylannitride particles on second boat. All else good.. Date: 6/17/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 *up* * * * * * * Tylan 2 *up* * * * * * * Tylan 3 *up* * * * * * * Tylan 4 *up* * * * * * * Tylan 5-BBr3 *up* * * * * * * Tylan 6-POCl3 *down* * POCL3-ordered* * * * * Tylan 7-TEOS2 *problem* *Needs test * *1.5/30* * * Tylan 8-SiGe *problem* *Needs test * *18.28/30* * * Tylan 10-Nitride *up* * * *.35/30* * * Tylan 11-LTO *up* * * *9.86/30* * * Tylan 12-FGA *up* * * * * * * Thermco 1 *up* * * * * * * Thermco 2 *up* * * * * * * Thermco 3 *future* * * * * * * Thermco4 *future* * * * * * * Thermco Poly1 *up* * * * * * * Thermco Poly2 *up* * * * * * * Thermco Nitride1 *up* * * * * * * Thermco bpsg *future* *testing for qual* * * * * TEL Spa *up* * * * * * * Burn Box *up* * * * * * * Ebeam *up* * * * * * * ZYGO *up* * * * * * * FGA2 *up* * * * * * * SiH4 for furnaces * * *A on line 401 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Thu Jun 18 07:35:05 2009 From: rseymour at stanford.edu (Ray Seymour) Date: Thu, 18 Jun 2009 07:35:05 -0700 Subject: Diffusion Morning Report Message-ID: <4A3A5099.3070806@stanford.edu> Good Morning All, Looking good this morning. POCl3 is empty and on order. Thermco LTO testing. SiGe has temp issues and flaking. All else is good. Date: 6/18/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 *up* * * * * * * Tylan 2 *up* * * * * * * Tylan 3 *up* * * * * * * Tylan 4 *up* * * * * * * Tylan 5-BBr3 *up* * * * * * * Tylan 6-POCl3 *down* * POCL3-ordered* * * * * Tylan 7-TEOS2 *problem* *needs test * *1.5/30* * * Tylan 8-SiGe *down * *temp issues and flaking * *18.62/30* * * Tylan 9-Poly *up* * * *24.73/30* * * Tylan 10-Nitride *up* * * *.35/30* * * Tylan 11-LTO *up* * * *11.5/30* * * Tylan 12-FGA *up* * * * * * * Thermco 1 *up* * * * * * * Thermco 2 *up* * * * * * * Thermco 3 *future* * * * * * * Thermco4 *future* * * * * * * Thermco Poly1 *up* * * * * * * Thermco Poly2 *up* * * * * * * Thermco Nitride1 *up* * * * * * * Thermco bpsg *future* *testing for qual* * * * * TEL Spa *up* * * * * * * Burn Box *up* * * * * * * Ebeam *up* * * * * * * ZYGO *up* * * * * * * FGA2 *up* * * * * * * SiH4 for furnaces * * *A on line 394 psi* * changeover working well * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Jun 19 08:02:10 2009 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 19 Jun 2009 08:02:10 -0700 Subject: Diffusion Morning Report Message-ID: <4A3BA872.90609@stanford.edu> Good Morning All, Looking good this morning. Thermco LTO testing. SiGe temp cal in progress. All else is good. Date: 6/19/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 *up* * * * * * * Tylan 2 *up* * * * * * * Tylan 3 *up* * * * * * * Tylan 4 *up* * * * * * * Tylan 5-BBr3 *up* * * * * * * Tylan 6-POCl3 *up* * needs test after POCL3 replaced * * * * * Tylan 7-TEOS2 *problem* *needs test * *1.5/30* * * Tylan 8-SiGe *down * *temp cal in progress * *18.62/30* * * Tylan 9-Poly *up* * * *26.23/30* * * Tylan 10-Nitride *up* * * *.36/30* * * Tylan 11-LTO *up* * * *11.81/30* * * Tylan 12-FGA *up* * * * * * * Thermco 1 *up* * * * * * * Thermco 2 *up* * * * * * * Thermco 3 *future* * * * * * * Thermco4 *future* * * * * * * Thermco Poly1 *up* * * * * * * Thermco Poly2 *up* * * * * * * Thermco Nitride1 *up* * * * * * * Thermco bpsg *future* *testing for qual* * * * * TEL Spa *up* * * * * * * Burn Box *up* *Cleaned this morning * * * * * Ebeam *up* * * * * * * ZYGO *up* * * * * * * FGA2 *up* * * * * * * SiH4 for furnaces * * *A on line 392 psi* * changeover working well * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jun 22 08:19:53 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 22 Jun 2009 08:19:53 -0700 Subject: Diffusion Morning Report 06/22/09 Message-ID: <4A3FA119.2020000@stanford.edu> Good Morning All, Looking fair this morning lots of little issues. POCl3 and TEOS need tests. SiGe temp cal and GeH4 change. We lost the Thermco nitride pump.Tylan Lto is flaking(which is what it does. FGA2 has a dirty boat. 4160 has a jammed aperature strip-fs will be in today or tomorrow. No other issues at this time. Date: 6/22/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 down needs test Tylan 7-TEOS2 yellow needs test 1.5/30 Tylan 8-SiGe down GeH4 change 3.0/30 Tylan 9-Poly up 23.28/30 Tylan 10-Nitride yellow mfs alarms .41/30 Tylan 11-LTO yellow flaking 12.86/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow GeH4 change Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 yellow dirty boat SiH4 for furnaces A on line 441 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jun 23 07:33:12 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 23 Jun 2009 07:33:12 -0700 Subject: Diffusion Morning Report 06/23/09 Message-ID: <4A40E7A8.9010600@stanford.edu> Good Morning All, Looking OK this morning. GeH4 was changed yesterday as well as forming gas. POcl3 still needs a test. Tylan Nitride had MFS alarms. Thermco Nitride has a dead pump. LTO has some flaking. Thermco LTO is testing..Ebeam down for normal cryo regen. No other issues at this time. Date: 6/23/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 down needs test Tylan 7-TEOS2 up 1.5/30 Tylan 8-SiGe down GeH4 change 3.0/30 Tylan 9-Poly up 24.28/30 Tylan 10-Nitride yellow mfs alarms .48/30 Tylan 11-LTO yellow flaking 12.86/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow GeH4 change Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 441 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jun 24 06:13:07 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 24 Jun 2009 06:13:07 -0700 Subject: Diffusion Morning Report 06/24/09 Message-ID: <4A422663.3020106@stanford.edu> Good Morning All, Looking OK this morning. Temp cal continuing on SiGe. PoCl3 needs test. Nitride had MFS alarms, Lto has flaking, Thermco Nitride has a dead pump-out for repair. Thermco LTO testing. Ebeam did regen on cryos. No other issues at this time. Date: 6/24/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 down needs test Tylan 7-TEOS2 up .786/30 Tylan 8-SiGe down temp cal 3.0/30 Tylan 9-Poly up 28.47/30 Tylan 10-Nitride yellow mfs alarms .48/30 Tylan 11-LTO yellow flaking 12.86/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 369 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jun 25 06:34:13 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 25 Jun 2009 06:34:13 -0700 Subject: Diffusion Morning Report 06/25/09 Message-ID: <4A437CD5.2020700@stanford.edu> Good Morning All, Looking OK this morning Temp cal on SiGe ongoing.Tylan nitride has intermittant MFS alarms. Tylan LTO has some flaking. Thermco Nitride pump out for repair. Thermco LTO is testing. FGA 2 reports no forming gas looking into it. No other issues at this time. Date: 6/25/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .786/30 Tylan 8-SiGe down temp cal 3.0/30 Tylan 9-Poly up 28.47/30 Tylan 10-Nitride yellow mfs alarms .48/30 Tylan 11-LTO yellow flaking 14.9/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 369 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jun 26 06:16:16 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 26 Jun 2009 06:16:16 -0700 Subject: Diffusion Morning Report 06/26/09 Message-ID: <4A44CA20.4040708@stanford.edu> Good Morning All, Looking good this morning. Tylan SiGe temp cal. Tylan nitride had MFS alarms. Tylan LTO has some flaking. Thermco Nitride pump is out for repair.. Thermco LTO is testing for qual. Weekly burn box clean. No other issues at this time. Date: 6/26/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .786/30 Tylan 8-SiGe down temp cal 3.0/30 Tylan 9-Poly up 28.47/30 Tylan 10-Nitride yellow mfs alarms .48/30 Tylan 11-LTO yellow flaking 14.9/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 369 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jun 29 07:02:19 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 29 Jun 2009 07:02:19 -0700 Subject: Diffusion Morning Report 06/29/09 Message-ID: <4A48C96B.9070902@stanford.edu> Good Morning All, Looking good this morning. LPCVD burn box is back up(thanks John and Cesar). Tylan SiGe is in temp cal. TEOS is having pressure issues. Thermco Nitride out for repair. Thermco LTO is testing for Qual. No other issues at this time. Date: 6/29/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down pressure issues 1.46/30 Tylan 8-SiGe down temp cal 3.0/30 Tylan 9-Poly up 28.47/30 Tylan 10-Nitride up .48/30 Tylan 11-LTO up 14.9/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 327 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jun 30 06:19:15 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 30 Jun 2009 06:19:15 -0700 Subject: Diffusion Morning Report 06/30/09 Message-ID: <4A4A10D3.1030103@stanford.edu> Good Morning All, Looking good this morning. TEL FS was here to look over the tool and resolved a couple of small issues. TEOS2 trap was cleaned yesterday. SiGe temp cal still in progress. Thermco Nitride pump out for repair. Thermco LTO testing for Qual. No other issues at this time. Date: 6/30/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down pressure issues 1.46/30 Tylan 8-SiGe down temp cal 3.0/30 Tylan 9-Poly up 28.47/30 Tylan 10-Nitride up .48/30 Tylan 11-LTO up 14.9/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down dead pump Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 323 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: