From tberg at stanford.edu Mon Mar 2 06:43:06 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 02 Mar 2009 06:43:06 -0800 Subject: Diffusion Morning Report 03/02/09 Message-ID: <49ABF07A.7090203@stanford.edu> Good MOrning All, Looking good this morning. TEOS2, Tylan Nitride, and Tylan SiGe all need tests. Tylan 1 has loader issues. LTO going down tomorrow for pull and clean. No other issues at this time. Date: 3/2/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 down boat loader issues Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow needs test 0/30 Tylan 8-SiGe yellow GEH4 change needs test 4.24/30 Tylan 9-Poly up .61/30 Tylan 10-Nitride yellow needs test 2.34/30 Tylan 11-LTO up 30.43/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 690 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Mar 3 06:29:50 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 03 Mar 2009 06:29:50 -0800 Subject: Diffusion Morning report 03/03/09 Message-ID: <49AD3EDE.1090308@stanford.edu> Good Morning All, Looking good this morning. LTO is down for scheduled pull and clean. TEL has chiller issues. No other issues at this time. Date: 3/3/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .47/30 Tylan 8-SiGe yellow GEH4 change needs test 4.63/30 Tylan 9-Poly up .61/30 Tylan 10-Nitride up 1.8/30 Tylan 11-LTO down Pull and clean 0/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa down Chiller issues Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 690 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Mar 5 07:42:51 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 05 Mar 2009 07:42:51 -0800 Subject: Diffusion Morning Report 03/05/09 Message-ID: <49AFF2FB.5010908@stanford.edu> Good Morning All, Looking good this morning. No major problems. Trying to figure out how to clean 12" wafers for TEL Thanks Alissa for inputs Date: 3/5/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .47/30 Tylan 8-SiGe yellow users running 4.63/30 Tylan 9-Poly up 1.0/30 Tylan 10-Nitride up 1.8/30 Tylan 11-LTO up .76/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa yellow wafers need clean Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 656 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Mar 6 06:34:52 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 06 Mar 2009 06:34:52 -0800 Subject: Diffusion Morning Report 03/06/09 Message-ID: <49B1348C.4090901@stanford.edu> Good Morning All, Looking good this morning. Found a vendor to clean300 mm wafers for TEL. Thermco Poly 1 results not satisfactory. No other major issues at this time. Burn box clean this morning. Date: 3/6/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .47/30 Tylan 8-SiGe yellow users running 4.63/30 Tylan 9-Poly up 1.0/30 Tylan 10-Nitride up 1.8/30 Tylan 11-LTO up .76/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa yellow wafers need clean Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 656 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Mar 9 06:21:54 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 09 Mar 2009 06:21:54 -0700 Subject: Diffusion Morning Report 03/09/09 Message-ID: <49B517F2.3000806@stanford.edu> Good Morning All, Looking good this morning. TEOS 2 pump out for repair. TEL Spa wafers need cleaning.Tylan poly has possible display issues. No other major issues at this time. Date: 3/9/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down pump out for repair .47/30 Tylan 8-SiGe yellow users running 4.63/30 Tylan 9-Poly up 1.0/30 Tylan 10-Nitride up 1.8/30 Tylan 11-LTO up .94/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa yellow wafers need clean Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 648 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Mar 10 06:08:17 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 10 Mar 2009 06:08:17 -0700 Subject: Diffusion Morning Report 03/10/09 Message-ID: <49B66641.10903@stanford.edu> Good Morning All, Looking good this morning. TEOS pump is out for repair, Tylan Poly has I/o Errors. TEL Spa wafers still need clean. No other issues at this time. Date: 3/10/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down pump out for repair .47/30 Tylan 8-SiGe yellow users running 4.63/30 Tylan 9-Poly down i/o error 1.0/30 Tylan 10-Nitride up 2.53/30 Tylan 11-LTO up .94/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa yellow wafers need clean Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 625 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Mar 11 06:36:17 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 11 Mar 2009 06:36:17 -0700 Subject: Diffusion Morning Report 03?11/09 Message-ID: <49B7BE51.5090501@stanford.edu> Good Morning All, Looking good this morning. TEOS2 pump is out for repair hopefully back tomorrow.Tel wafer clean on hold for now. Process investigating Thermco Poly1 doping issues. No other issues at this time. Date: 3/11/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down pump out for repair .47/30 Tylan 8-SiGe yellow users running 4.63/30 Tylan 9-Poly up 1.01/30 Tylan 10-Nitride up 2.53/30 Tylan 11-LTO up .94/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa yellow wafers need clean Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 625 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Mar 12 06:44:27 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 12 Mar 2009 06:44:27 -0700 Subject: Diffusion Morning Report 03/12/09 Message-ID: <49B911BB.1000408@stanford.edu> Good Morning All, Looking good this morning. Hopefully the TEOS2 pump will return today. Tylan Nitride has weird display intermittantly. We have decided to wait on cleaning the TEL carrier wafers. WGR traing for maintenance this morning. No other issues at this time. Date: 3/12/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down pump out for repair .47/30 Tylan 8-SiGe up 4.63/30 Tylan 9-Poly up 2.58/30 Tylan 10-Nitride yellow Weird display 2.65/30 Tylan 11-LTO up .94/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa yellow wafers need clean on hold Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 625 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Mar 13 06:49:02 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 13 Mar 2009 06:49:02 -0700 Subject: Diffusion Morning Report 03/13/09 Message-ID: <49BA644E.9070303@stanford.edu> Good Morning all, Looking good this morning TEOS pump should be back today. Nitride still has weird readings. SiGe not pumped down. No other problems at this time. Date: 3/13/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down pump out for repair .47/30 Tylan 8-SiGe up 4.63/30 Tylan 9-Poly up 2.58/30 Tylan 10-Nitride yellow Weird display 3.65/30 Tylan 11-LTO up .94/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa yellow Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 625 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Mar 16 07:05:28 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 16 Mar 2009 07:05:28 -0700 Subject: Diffusion Morning Report 03/16/09 Message-ID: <49BE5CA8.70805@stanford.edu> Good Morning All, Looking good this morning. TEOS2 pump is back and base and leak rate look good-needs a test..Noother major issues at this time. Date: 3/13/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow needs test .47/30 Tylan 8-SiGe up 4.63/30 Tylan 9-Poly up 2.58/30 Tylan 10-Nitride up 4.79/30 Tylan 11-LTO up 1.6/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 625 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Mar 17 06:12:00 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 17 Mar 2009 06:12:00 -0700 Subject: Diffusion Morning Report 03/17/09 Message-ID: <49BFA1A0.9000903@stanford.edu> Good Morning All, Hppy St Patrick's day. Looking OK this morning TEOS 2 and TYlan Nitride have leaks 4160 has a switch issue no other problems at this time. Date: 3/17/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down leak .47/30 Tylan 8-SiGe up 4.63/30 Tylan 9-Poly up 2.67/30 Tylan 10-Nitride down leak 4.79/30 Tylan 11-LTO up 1.6/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 625 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Mar 18 06:10:35 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 18 Mar 2009 06:10:35 -0700 Subject: Diffusion Morning Report 03/18/09 Message-ID: <49C0F2CB.1060001@stanford.edu> Good MOrning All, Looking good this morning. Resolved the leaks on Tylan Nitride and TEOS yesterday. Both need tests.No other issues at this time. Date: 3/18/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow needs test .47/30 Tylan 8-SiGe up 4.63/30 Tylan 9-Poly up 2.67/30 Tylan 10-Nitride down needs test 4.79/30 Tylan 11-LTO up 1.87/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 625 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Mar 19 06:52:10 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 19 Mar 2009 06:52:10 -0700 Subject: Diffusion Morning report 03/19/09 Message-ID: <49C24E0A.7030203@stanford.edu> Good Morning All, Looking good this morning. TEOS 2 is back up nitride is yellow dep rate a bit low. No other major issues at this time. Date: 3/19/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .47/30 Tylan 8-SiGe up 4.63/30 Tylan 9-Poly up 2.67/30 Tylan 10-Nitride yellow dep rate a bit low 4.79/30 Tylan 11-LTO up 1.87/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 625 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Mar 23 08:11:14 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 23 Mar 2009 08:11:14 -0700 Subject: Diffusion Morning Report 03/23/09 Message-ID: <49C7A692.9060808@stanford.edu> Good Morning All, Looking good this morning. LTO and SiGe reported low or no dep. Checked out flows and temps look OK need tests. Nitride dep a bit low?? lots of runs.no other problems at this time. Date: 3/23/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .98/30 Tylan 8-SiGe yellow Needs test after checkout 7.24/30 Tylan 9-Poly up 2.83/30 Tylan 10-Nitride yellow dep rate a bit low 9.12/30 Tylan 11-LTO yellow Needs test after checkout 5.78/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 625 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Mar 24 06:12:45 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 24 Mar 2009 06:12:45 -0700 Subject: Diffusion Morning Report 03/24/09 Message-ID: <49C8DC4D.1070709@stanford.edu> Good Morning All, Looking good this morning. SiGe has been running after checkout, seems Ok. LTO back up no issues found. Nitride is running a bit thin. User reported smoke?/vapor from BBr3 furnace . No other issues at this time. Date: 3/24/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 yellow vapor coming out? Tylan 6-POCl3 down loader issues Tylan 7-TEOS2 up .98/30 Tylan 8-SiGe yellow Needs test after checkout 7.63/30 Tylan 9-Poly up 3.19/30 Tylan 10-Nitride yellow dep rate a bit low 9.49/30 Tylan 11-LTO up 7.59/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 617 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Mar 25 06:49:26 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 25 Mar 2009 06:49:26 -0700 Subject: Diffusion Morning Report 03/25/09 Message-ID: <49CA3666.4030300@stanford.edu> Good Morning All, Looking good this morning. Tylan 6 looking at loader. BBr3 observing. Sige running Nitride a bit low dep rate. No other issues at this time. Date: 3/25/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 yellow vapor coming out? Tylan 6-POCl3 down loader issues Tylan 7-TEOS2 up 1.58/30 Tylan 8-SiGe yellow Needs test after checkout 7.63/30 Tylan 9-Poly up 3.34/30 Tylan 10-Nitride yellow dep rate a bit low 9.49/30 Tylan 11-LTO up 8.26/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 617 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Mar 26 06:10:08 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 26 Mar 2009 06:10:08 -0700 Subject: Diffusion Morning Report 03/26/09 Message-ID: <49CB7EB0.6080603@stanford.edu> Good Morning All, Looking good this morning. Nitride is a bit low in dep. SiGe is running with no apparent problems. BBr3 watching for smoke/vapors? No other issues at this time. Date: 3/26/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 yellow vapor coming out? Tylan 6-POCl3 up Tylan 7-TEOS2 up 1.58/30 Tylan 8-SiGe yellow Needs test after checkout 7.63/30 Tylan 9-Poly up 3.97/30 Tylan 10-Nitride yellow dep rate a bit low 10.32/30 Tylan 11-LTO up 8.26/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 617 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Mar 27 06:18:12 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 27 Mar 2009 06:18:12 -0700 Subject: Diffusion Morning Report 03/27/09 Message-ID: <49CCD214.6020204@stanford.edu> Good Morning All, Looking good this morning. Tylan BBr under observation. No other issues at this time. Burn box cleaned this morning. Date: 3/27/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 yellow vapor coming out? Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.18/30 Tylan 8-SiGe up 7.63/30 Tylan 9-Poly up 4.3/30 Tylan 10-Nitride up 9.49/30 Tylan 11-LTO up 11.52/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 617 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Mar 30 07:04:21 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 30 Mar 2009 07:04:21 -0700 Subject: Diffusion Morning Report 03/30/09 Message-ID: <49D0D165.9040105@stanford.edu> Good Morning All, Looking good this morning.. Tylan 6 baffle fell off in tube. Burn box pressure is high. No other major issues at this time. Date: 3/30/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 yellow vapor coming out? Tylan 6-POCl3 down baffle is off in tube Tylan 7-TEOS2 up 2.18/30 Tylan 8-SiGe up 8.46/30 Tylan 9-Poly up 8.30/30 Tylan 10-Nitride up 10.51/30 Tylan 11-LTO up 13.64/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 617 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Mar 31 07:22:14 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 31 Mar 2009 07:22:14 -0700 Subject: Diffusion Morning Report 03/31/09 Message-ID: <49D22716.2010105@stanford.edu> Good Morning All, Looking good this morning. Ebeam seems to have no beam after all of James's work. No other issues at this time. Date: 3/31/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.18/30 Tylan 8-SiGe up 8.46/30 Tylan 9-Poly up 8.30/30 Tylan 10-Nitride up 10.51/30 Tylan 11-LTO up 13.64/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down no beam ZYGO up FGA2 up SiH4 for furnaces A on line 606 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: