From tberg at stanford.edu Fri May 1 06:16:26 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 01 May 2009 06:16:26 -0700 Subject: Diffusion Morning Report 05/01/09 Message-ID: <49FAF62A.7000108@stanford.edu> Good Morning All, Looking good this morning. Burn box clean this morning. LTO going down on Moday for pull and clean. Thermco 2 has possible uniformity issues. No other issues at this time. Date: 5/1/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 3.2/30 Tylan 8-SiGe up 13.39/30 Tylan 9-Poly up 20.59/30 Tylan 10-Nitride up 13.82/30 Tylan 11-LTO up 30.62/30 Tylan 12-FGA up Thermco 1 up Thermco 2 yellow Possible uniformity issues Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 548 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon May 4 06:36:30 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 04 May 2009 06:36:30 -0700 Subject: Diffusion Morning Report 05/04/09 Message-ID: <49FEEF5E.4000007@stanford.edu> Good Morning All, Looking good this morning. LTO is down for scheduled pull and clean. No other issues at this time. Date: 5/4/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 3.2/30 Tylan 8-SiGe up 13.86/30 Tylan 9-Poly up 20.59/30 Tylan 10-Nitride up 13.82/30 Tylan 11-LTO down pull and clean 0/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 548 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue May 5 06:21:42 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 05 May 2009 06:21:42 -0700 Subject: Diffusion Morning Report 05/05/09 Message-ID: <4A003D66.3020707@stanford.edu> Happy Cinco de Mayo All, Looking good this morning. LTO pull and clean is progressing well. Ebam Vax is locked up. Thermco Poly1 has a boat stall error. No other issues at this time. Date: 5/5/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 3.2/30 Tylan 8-SiGe up 13.86/30 Tylan 9-Poly up 20.59/30 Tylan 10-Nitride up 13.82/30 Tylan 11-LTO down pull and clean in progress 0/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow boat stalled Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future soon TEL Spa up Burn Box up Ebeam down vax locked up ZYGO up FGA2 up SiH4 for furnaces A on line 548 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri May 8 06:32:05 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 08 May 2009 06:32:05 -0700 Subject: Diffusion Morning report 05/08/09 Message-ID: <4A043455.2090100@stanford.edu> Good Morning All, Looking good this morning. Tylan 3 has H2 zero issues.Burn box clean this morning. Ebeam has possible mark issues. No other problems at this time. Date: 5/8/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 yellow h2 error Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 3.2/30 Tylan 8-SiGe up 13.86/30 Tylan 9-Poly up 20.59/30 Tylan 10-Nitride up 13.82/30 Tylan 11-LTO up 1.6/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up posible mark issue ZYGO up FGA2 up SiH4 for furnaces A on line 548 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon May 11 06:54:34 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 11 May 2009 06:54:34 -0700 Subject: Diffusion Morning Report 05/11/09 Message-ID: <4A082E1A.2060808@stanford.edu> Good Morning All, Looking OK this morning. TEOS2 has a loader issue. TEL has microwave error.TYlan 3 is down for parts. Ebeam has possible mark issue. No other issues at this time. Date: 5/11/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up poor uniformity Tylan 3 down h2 error waiting parts Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down loader issue 3.8/30 Tylan 8-SiGe up 15.38/30 Tylan 9-Poly up 20.59/30 Tylan 10-Nitride up 13.92/30 Tylan 11-LTO up 2.4/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa yellow microwave erro0r Burn Box up Ebeam yellow posible mark issue ZYGO up FGA2 up SiH4 for furnaces A on line 548 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue May 12 06:43:39 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 12 May 2009 06:43:39 -0700 Subject: diffusion Morning Report 05/12/09 Message-ID: <4A097D0B.4040105@stanford.edu> Good Morning All, Looking good this morning. User reported 300 degrees on LTO looked a bit low although 350 is right on. Tylan 3 waiting for parts. Tylan 2 uniformity not great. Thermco LTO testing.No other problems at this time. Date: 5/12/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up poor uniformity Tylan 3 down h2 error waiting parts Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 3.8/30 Tylan 8-SiGe up 15.54/30 Tylan 9-Poly up 20.59/30 Tylan 10-Nitride up 13.92/30 Tylan 11-LTO yellow 300 degrees is abit off 2.4/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa yellow Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 548 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed May 13 06:29:06 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 13 May 2009 06:29:06 -0700 Subject: Diffusion Morning Report 05/13/09 Message-ID: <4A0ACB22.2080202@stanford.edu> Good morning All, Looking good this morning. Ray has replaced the control vlave for H2 on Tylan 3 and it needs testing. Tylan LTO temp is a bit off at 300 but good at 350. Thermco LTO testing. No other issues at this time. Date: 5/13/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up poor uniformity Tylan 3 down needs test after repair Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 3.8/30 Tylan 8-SiGe up 15.54/30 Tylan 9-Poly up 20.77/30 Tylan 10-Nitride up 15.54/30 Tylan 11-LTO yellow 300 degrees is abit off 2.4/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa yellow Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 548 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu May 14 06:10:36 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 14 May 2009 06:10:36 -0700 Subject: Diffusion Morning Report 05/14/09 Message-ID: <4A0C184C.4070507@stanford.edu> Good Morning All, Looking OK this morning. TEOS 2 down for a leak. Tylan 2 and 3 need tests after repairs. Tylan LTO temp is a bit off at 300 but OK at higher temps. Thermco LTO testing. No other issues at this time. Date: 5/14/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up poor uniformity Tylan 3 down needs test after repair Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down looking for leaks 3.8/30 Tylan 8-SiGe up 15.54/30 Tylan 9-Poly up 20.93/30 Tylan 10-Nitride up 15.54/30 Tylan 11-LTO yellow 300 degrees is abit off 4.5/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa yellow Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 548 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri May 15 06:24:22 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 15 May 2009 06:24:22 -0700 Subject: Diffusion Morning REport 05/15/09 Message-ID: <4A0D6D06.8030505@stanford.edu> Good morning all, Looking OK this morning. TEOS2 is down looking for a leak.Tylan 2 has poor uniformity and Tylan3 has bad uniformity. Tylan LTO temp is a bit off at 300 degrees. Thermco LTO testing. No other issues at this time. Date: 5/15/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up poor uniformity Tylan 3 down bad test after repair Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down looking for leaks 3.8/30 Tylan 8-SiGe up 15.54/30 Tylan 9-Poly up 20.93/30 Tylan 10-Nitride up 15.54/30 Tylan 11-LTO yellow 300 degrees is abit off 4.5/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa yellow Burn Box up Ebeam up ZYGO up FGA2 yellow Broken pull rod SiH4 for furnaces A on line 541 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon May 18 07:12:14 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 18 May 2009 07:12:14 -0700 Subject: Diffusion Morning Report 05/18/09 Message-ID: <4A116CBE.5090705@stanford.edu> Good Morning All, Looking OK this morning. Tylan1 had MFS alarms and no oxide-found Manual valve off. Tylan 3 had alarms during TLC clean.TEOS 2 has a leak again. Tylan LTO some temps are a bit off. B2H6 for diffusion is back and will be connected soon.Thermco LTO testing. No other issues at this time. Date: 5/18/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow MFS alarms Tylan 2 up poor uniformity Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down leak 3.8/30 Tylan 8-SiGe up 15.82/30 Tylan 9-Poly up 21.34/30 Tylan 10-Nitride up 15.54/30 Tylan 11-LTO yellow some temps off abit 5.2/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa yellow Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 525 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue May 19 07:08:39 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 19 May 2009 07:08:39 -0700 Subject: Diffusion Morning Report 05/19/09 Message-ID: <4A12BD67.9080309@stanford.edu> Good Morning All, Looking good this morning.. TEOS2 is down waiting for a tube. We will be doing a temp cal on LTO beginning tomorrow. Monitoring Lo O2 alarms on Tylan 1 Thermco LTO testing. No other issues at this time. Date: 5/18/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow MFS alarms Tylan 2 up poor uniformity Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down waiting for tube 3.8/30 Tylan 8-SiGe up 15.82/30 Tylan 9-Poly up 23.03/30 Tylan 10-Nitride up 18.04/30 Tylan 11-LTO yellow temp cal tomorrow 5.9/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa yellow Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 525 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed May 20 06:37:34 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 20 May 2009 06:37:34 -0700 Subject: Diffusion Morning Report 05/20/09 Message-ID: <4A14079E.7070400@stanford.edu> Good Morning All, Looking OK this morning. TEOS2 looking for leak. Tylan LTO has a broken sheath and is going down for temp cal. Tylans 1 and 3 observing after repairs-looking good for now. TEL has MW cooling errors. Thermco LTO testing. No other issues at this time. Date: 5/20/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow MFS alarms Tylan 2 up poor uniformity Tylan 3 yellow Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down looking for leak 3.8/30 Tylan 8-SiGe up 15.82/30 Tylan 9-Poly up 22.03/30 Tylan 10-Nitride up 18.04/30 Tylan 11-LTO down temp cal and broken sheath 6.1/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa yellow MW cooling error Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 525 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu May 21 06:19:19 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 21 May 2009 06:19:19 -0700 Subject: Diffusion Morning Report 05/21/09 Message-ID: <4A1554D7.4020309@stanford.edu> Good Morning All, Looking OK this morning. Working on TEmp cal forTylan LTO. Tylan SiGe has possible poor uniformity. TEOS 2 looking for small leak and waiting for baffles. TEL has cooling water flow issues. Thermco LTO testing. No other issues at this time. Date: 5/21/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up poor uniformity Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down looking for leak 3.8/30 Tylan 8-SiGe yellow poor uniformity 16.21/30 Tylan 9-Poly up 22.03/30 Tylan 10-Nitride up 18.58/30 Tylan 11-LTO down temp cal 6.14/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa yellow MW cooling error Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 505 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri May 22 06:19:05 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 22 May 2009 06:19:05 -0700 Subject: Diffusion Morning Report 05/22/09 Message-ID: <4A16A649.20904@stanford.edu> Good Morning All, Looking good this morning, TEOS 2 reported no dep.Tylan 2 and SiGe possible poor uniformity. Thermco LTO testing/ Date: 5/22/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up poor uniformity Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow no dep 3.8/30 Tylan 8-SiGe yellow poor uniformity ? 16.21/30 Tylan 9-Poly up 22.06/30 Tylan 10-Nitride up 18.58/30 Tylan 11-LTO up 6.14/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 505 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue May 26 06:16:39 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 26 May 2009 06:16:39 -0700 Subject: Diffusion Morning Report 05/26/09 Message-ID: <4A1BEBB7.7010900@stanford.edu> Good Morning All, Looking OK this morning. LTO loader cable is broken, TEOS 2 has a leak. Thermco Poly1 has a loader issue. Ebeam has a loader issue. 4160 SEM has issues. No other problems at this time. Date: 5/26/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up poor uniformity Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down leak 3.8/30 Tylan 8-SiGe up 17.55/30 Tylan 9-Poly up 23.03/30 Tylan 10-Nitride up 18.65/30 Tylan 11-LTO down broken cable 6.98/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 down boat issue Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow load error ZYGO up FGA2 up SiH4 for furnaces A on line 470 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed May 27 06:17:32 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 27 May 2009 06:17:32 -0700 Subject: Diffusion Morning Report 05/27/09 Message-ID: <4A1D3D6C.7010302@stanford.edu> Good Morning All, Looking good this morning/ TEOS2 is going back together. Thermco LTO testing. Tylan 2 has marginal uniformity. No other issues at this time. Date: 5/27/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up poor uniformity Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down leak 3.8/30 Tylan 8-SiGe up 17.55/30 Tylan 9-Poly up 23.03/30 Tylan 10-Nitride up 18.65/30 Tylan 11-LTO up 7.48/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 470 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Thu May 28 07:22:55 2009 From: rseymour at stanford.edu (Ray Seymour) Date: Thu, 28 May 2009 07:22:55 -0700 Subject: Diffusion Morning Report Message-ID: <4A1E9E3F.5090704@stanford.edu> Good Morning All, Looking good this morning/ . Thermco LTO testing. Tylan 2 has marginal uniformity. No other issues at this time. Date: 5/28/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 *up* * * * * * * Tylan 2 *up* *poor uniformity* * * * * Tylan 3 *up* * * * * * * Tylan 4 *up* * * * * * * Tylan 5-BBr3 *up* * * * * * * Tylan 6-POCl3 *up* * * * * * * Tylan 7-TEOS2 *down* *been tested waiting for results* *3.8/30* * * Tylan 8-SiGe *up* * * *17.94/30* * * Tylan 9-Poly *up* * * *22.06/30* * * Tylan 10-Nitride *up* * * *18.65/30* * * Tylan 11-LTO *up* * * *7.48/30* * * Tylan 12-FGA *up* * * * * * * Thermco 1 *up* * * * * * * Thermco 2 *up* * * * * * * Thermco 3 *future* * * * * * * Thermco4 *future* * * * * * * Thermco Poly1 *up* * * * * * * Thermco Poly2 *up* * * * * * * Thermco Nitride1 *up* * * * * * * Thermco bpsg *future* *testing for qual* * * * * TEL Spa *up* * * * * * * Burn Box *up* * * * * * * Ebeam *up* * * * * * * ZYGO *up* * * * * * * FGA2 *up* * * * * * * SiH4 for furnaces * * *A on line 465 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri May 29 06:13:46 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 29 May 2009 06:13:46 -0700 Subject: Diffusion Morning Report 05/29/09 Message-ID: <4A1FDF8A.9090300@stanford.edu> Good morning All, Looking good this morning. tylan 1 has no O2 flow. Ebeam has low beam current. THermco LTO is testing. No other issues at this time. Date: 5/29/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 down no O2 Tylan 2 up poor uniformity Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 3.8/30 Tylan 8-SiGe up 17.94/30 Tylan 9-Poly up 23.03/30 Tylan 10-Nitride up 18.65/30 Tylan 11-LTO up 1.42/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow low beam current ZYGO up FGA2 up SiH4 for furnaces A on line 470 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: