Diffusion Morning Report 05/01/09

Ted Berg tberg at stanford.edu
Fri May 1 06:16:26 PDT 2009


Good Morning All,
    Looking good this morning. Burn box clean this morning. LTO going 
down on Moday for pull and clean. Thermco 2 has possible uniformity 
issues. No other issues at this time.

  	  	  	  	  	 
  	Date: 	5/1/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	3.2/30 	  	 
Tylan 8-SiGe 	up 	  	13.39/30 	  	 
Tylan 9-Poly 	up 	  	20.59/30 	  	 
Tylan 10-Nitride 	up 	  	13.82/30 	  	 
Tylan 11-LTO 	up 	  	30.62/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	yellow 	Possible uniformity issues 	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco bpsg 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 548 psi 	 changeover working well  	  	 


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