Diffusion Morning Report 05/05/09

Ted Berg tberg at stanford.edu
Tue May 5 06:21:42 PDT 2009

Happy Cinco de Mayo All,
    Looking good this morning. LTO pull and clean is progressing well.  
Ebam Vax is locked up. Thermco Poly1 has a boat stall error. No other 
issues at this time.

  	Date: 	5/5/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	3.2/30 	  	 
Tylan 8-SiGe 	up 	  	13.86/30 	  	 
Tylan 9-Poly 	up 	  	20.59/30 	  	 
Tylan 10-Nitride 	up 	  	13.82/30 	  	 
Tylan 11-LTO 	down 	pull and clean in progress 	0/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	yellow 	boat stalled 	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco bpsg 	future 	 soon 	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	down 	vax locked up 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 548 psi 	 changeover working well  	  	 

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