Diffusion Morning Report

Ray Seymour rseymour at stanford.edu
Thu May 28 07:22:55 PDT 2009


Good Morning All,
 Looking good this morning/ . Thermco LTO testing. Tylan 2 has marginal 
uniformity. No other issues at this time.

  	  	  	  	  	 
  	Date: 	5/28/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	*up* 	* * 	* * 	* * 	 
Tylan 2 	*up* 	*poor uniformity* 	* * 	* * 	 
Tylan 3 	*up* 	* * 	* * 	* * 	 
Tylan 4 	*up* 	* * 	* * 	* * 	 
Tylan 5-BBr3 	*up* 	* * 	* * 	* * 	 
Tylan 6-POCl3 	*up* 	* * 	* * 	* * 	 
Tylan 7-TEOS2 	*down* 	*been tested waiting for results*
	*3.8/30* 	* * 	 
Tylan 8-SiGe 	*up* 	* * 	*17.94/30* 	* * 	 
Tylan 9-Poly 	*up* 	* * 	*22.06/30* 	* * 	 
Tylan 10-Nitride 	*up* 	* * 	*18.65/30* 	* * 	 
Tylan 11-LTO 	*up* 	* * 	*7.48/30* 	* * 	 
Tylan 12-FGA 	*up* 	* * 	* * 	* * 	 
Thermco 1 	*up* 	* * 	* * 	* * 	 
Thermco 2 	*up* 	* * 	* * 	* * 	 
Thermco 3 	*future* 	* * 	* * 	* * 	 
Thermco4 	*future* 	* * 	* * 	* * 	 
Thermco Poly1 	*up* 	* * 	* * 	* * 	 
Thermco Poly2 	*up* 	* * 	* * 	* * 	 
Thermco Nitride1 	*up* 	* * 	* * 	* * 	 
Thermco bpsg 	*future* 	*testing for qual* 	* * 	* * 	 
TEL Spa 	*up* 	* * 	* * 	* * 	 
Burn Box 	*up* 	*
* 	*  * 	* * 	 
Ebeam 	*up* 	* * 	* * 	* * 	 
ZYGO 	*up* 	* * 	* * 	* * 	 
FGA2 	*up* 	* * 	* * 	* * 	 
SiH4 for furnaces 	* * 	*A on line 465 psi* 	* changeover working 
well * 	* * 	 

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