Diffusion Morning Report 05/29/09

Ted Berg tberg at stanford.edu
Fri May 29 06:13:46 PDT 2009


Good morning All,
    Looking good this morning. tylan 1 has no O2 flow. Ebeam has low 
beam current. THermco LTO is testing. No other issues at this time.

  	Date: 	5/29/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	down 	no O2 	  	  	 
Tylan 2 	up 	poor uniformity 	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	3.8/30 	  	 
Tylan 8-SiGe 	up 	  	17.94/30 	  	 
Tylan 9-Poly 	up 	  	23.03/30 	  	 
Tylan 10-Nitride 	up 	  	18.65/30 	  	 
Tylan 11-LTO 	up 	  	1.42/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	
	   	  	 
Ebeam 	yellow 	low beam current 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 470 psi 	 changeover working well  	  	 


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