From tberg at stanford.edu Mon Nov 2 07:17:45 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 02 Nov 2009 07:17:45 -0800 Subject: Diffusion Morning Report 11/02/09 Message-ID: <4AEEF819.9040606@stanford.edu> Good Morning All, Looking good this morning. Ebeam has computer issues. Tylan 1 has N2 leak. Removed trapped wafer from TEL. Thermco LTO testing? No other issuesat this time. Date: 11/2/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow n2 leak Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 3.44/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up .2/30 Tylan 10-Nitride up 7.83/30 Tylan 11-LTO up 15.28/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up removed stuck wafer Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 677 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Nov 3 07:38:03 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 03 Nov 2009 07:38:03 -0800 Subject: Diffusion Morning Report 11/03/09 Message-ID: <4AF04E5B.1070606@stanford.edu> Good Morning All, Looking good this morning . Tylan 1 has N2 flow issues. Ebeam has computer issues. Thermco LTO testing. No other issues at this time. Date: 11/3/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 down n2 flow issues Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 3.44/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up .2/30 Tylan 10-Nitride up 7.83/30 Tylan 11-LTO up 16.3/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 677 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Nov 4 06:13:52 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 04 Nov 2009 06:13:52 -0800 Subject: Diffusion Morning Report 11/04/09 Message-ID: <4AF18C20.7020505@stanford.edu> Good Morning All, Looking good this morning. Tylan 1 part should be here this morning. Ebeam has computer issues. Thermco LTO testing for qual. No other issues at this time. Date: 11/4/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 down n2 flow issues Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 3.44/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up .2/30 Tylan 10-Nitride up 7.83/30 Tylan 11-LTO up 16.43/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 677 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Nov 5 06:37:30 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 05 Nov 2009 06:37:30 -0800 Subject: Diffusion Morning Report 11/05/09 Message-ID: <4AF2E32A.5040009@stanford.edu> Good Morning All, Looking good this morning. Ebeam continues to have computer issues. Thermco Lto testing. No other issues at this time. Date: 11/5/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 3.44/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 5.51/30 Tylan 10-Nitride up 7.99/30 Tylan 11-LTO up 18.33/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 677 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Nov 6 06:12:34 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 06 Nov 2009 06:12:34 -0800 Subject: Diffusion Morning Report 11/06/09 Message-ID: <4AF42ED2.3000205@stanford.edu> Good Morning All, Looking good this morning. Ebeam has computer issues. Thermco LTO testing. Burn box cleaned this morning.No other issues at this time. Date: 11/6/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 3.44/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 1.1/30 Tylan 10-Nitride up 7.99/30 Tylan 11-LTO up 18.33/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam down computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 677 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Nov 9 06:51:40 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 09 Nov 2009 06:51:40 -0800 Subject: Diffusion Morning Report 11/09/09 Message-ID: <4AF82C7C.4020900@stanford.edu> Good Morning All, Looking good this morning.LTO had low dep rate for some reason. Ebeam is having computer issues.Thermco LTO testing for Qual. No other issues at this time... Date: 11/9/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 3.44/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 5.67/30 Tylan 10-Nitride up 11.29/30 Tylan 11-LTO yellow low dep rate 19.83/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam down computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 677 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Nov 10 06:23:24 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 10 Nov 2009 06:23:24 -0800 Subject: Diffusion Morning Report 11/10/09 Message-ID: <4AF9775C.5060801@stanford.edu> Good Morning All, Looking good this morning. LTO has a broken injector. Ebeam still having computer issues. Thermco LTO testing for qual. No other issues at this time. Date: 11/10/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 4.14/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 5.67/30 Tylan 10-Nitride up 11.4/30 Tylan 11-LTO down broken injector 19.97/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam down computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 654 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Nov 11 06:31:44 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 11 Nov 2009 06:31:44 -0800 Subject: Diffusion Morning Report 11/11/09 Message-ID: <4AFACAD0.1060405@stanford.edu> Good Morning All, Looking good this morning. Tylan LTO uniformity is not great. FGA2 elephant is out for repair.. Ebeam is having computer issues. THermco LTO testing. No other issues at this time. Date: 11/11/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 4.14/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 5.67/30 Tylan 10-Nitride up 11.43/30 Tylan 11-LTO yellow uniformity not great 15.54/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam down computer issues ZYGO up FGA2 yellow broken elephant SiH4 for furnaces A on line 654 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Nov 12 06:32:18 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 12 Nov 2009 06:32:18 -0800 Subject: Diffusion Morning Report 11/12/09 Message-ID: <4AFC1C72.6050305@stanford.edu> Good Morning All, Looking good this morning. FGA elephant is out being repaired. Thermco LTO testing. Ebeams computer still having issues. No other problems at this time. Date: 11/12/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 4.14/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 5.87/30 Tylan 10-Nitride up 11.43/30 Tylan 11-LTO up 15.6/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam down computer issues ZYGO up FGA2 yellow broken elephant SiH4 for furnaces A on line 654 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Nov 13 06:17:57 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 13 Nov 2009 06:17:57 -0800 Subject: Diffusion Morning Report 11/13/09 Message-ID: <4AFD6A95.1010609@stanford.edu> Good Morning All, Looking good this morning.. Burn box clean this morning.Ebeam still has computer issues. Thermco LTO testing for Qual. No other issues at this time. Date: 11/13/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 4.14/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 6.47/30 Tylan 10-Nitride up 13.0/30 Tylan 11-LTO up 20.6/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up elephant repaired SiH4 for furnaces A on line 654 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Nov 16 07:35:15 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 16 Nov 2009 07:35:15 -0800 Subject: Diffusion Morning Report 11/16/09 Message-ID: <4B017133.5080200@stanford.edu> Good Morning All, Looking good this morning. Tylan 1 had an I/O error. Reset and we are observing. Tylan Nitride wont vent. Ebeam has computer issues. Thermco LTO testing for Qual. No other issues at this time. Date: 11/16/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow observation Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 4.14/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 6.47/30 Tylan 10-Nitride down Gate valve not sealing 13.05/30 Tylan 11-LTO up 24.75/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up elephant repaired SiH4 for furnaces A on line 654 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Nov 17 06:39:47 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 17 Nov 2009 06:39:47 -0800 Subject: Diffusion Morning Report 11/17/09 Message-ID: <4B02B5B3.3040606@stanford.edu> Good Morning All, Looking good this morning Tylan 1 still observing. Ebeam ongoing computer issues. Thermco LTO testing. Tylan LTO possible temp issues. No other problems at this time. Date: 11/17/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow observation Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 4.14/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 7.01/30 Tylan 10-Nitride up 13.08/30 Tylan 11-LTO yellow Temp issues? 25.32/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 654 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Nov 18 07:13:28 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 18 Nov 2009 07:13:28 -0800 Subject: Diffusion Morning Report 11/18/09 Message-ID: <4B040F18.1040800@stanford.edu> Good Morning All, Looking OK this morning. Thermco Nitride has possible uniformity issues-does it have the lifter spacer?Tylan1 observing i/o error. Tylan LTO observing Temp issues. Thermco LTO testing. No other issues at this time. Date: 11/18/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow observation Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 4.14/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 7.01/30 Tylan 10-Nitride up 13.1/30 Tylan 11-LTO yellow Temp issues? Observing 25.32/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 634 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Nov 19 06:28:56 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 19 Nov 2009 06:28:56 -0800 Subject: Diffusion Morning Report 11/19/09 Message-ID: <4B055628.2040508@stanford.edu> Good Morning All, Looking good this morning, TEL Spa is down for MW overtemp faults-consulting FS and factory. LTO is over thickness going down on Monday for pull and clean. Thermco Nitride testing uniformity.Tylan 1 i/o errors observing.. Ebeam still has computer issues. Thermco LTO testing for qual. No other issues at this time. Date: 11/19/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow observation Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 4.18/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 7.01/30 Tylan 10-Nitride up 13.2/30 Tylan 11-LTO up Going down for pull on Monday!! 30.9/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa down MW overheat issues Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 634 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Nov 20 06:28:08 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 20 Nov 2009 06:28:08 -0800 Subject: Diffusion Morning Report 11/20/09 Message-ID: <4B06A778.3000507@stanford.edu> Good Morning All, Looking OK this morning. The elephant on FGA2 is broken again 2x in one week!! Tylan BPSG is going down for pull on Monday!!Thermco nitride possible uniformity issues. TEL Spa MW over heat issues. Ebeam computer issues. Thermco lto testing for qual. No other issues at this time. Date: 11/20/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 4.18/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 2.42/30 Tylan 10-Nitride up 13.2/30 Tylan 11-LTO up Going down for pull on Monday!! 31.34/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa down MW overheat issues Burn Box up Ebeam yellow computer issues ZYGO up FGA2 yellow broken elephant again 2x in a week SiH4 for furnaces A on line 634 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Nov 23 06:53:43 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 23 Nov 2009 06:53:43 -0800 Subject: Diffusion Morning Report 11/23/09 Message-ID: <4B0AA1F7.3060807@stanford.edu> Good Morning All, looking OK this morning. Tylan LTO down for Pull and clean. TEL spa having MW over temp issues. Tylan nitride had door close issue. Thermco LTO has uniformity issues-process is checking it out. Ebeam still having computer issues. FGA2 has a broken elephant. Thermco LTO testing for qual. No other major issues at this time. Date: 11/23/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow mfs alarm Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 4.27/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 2.42/30 Tylan 10-Nitride yellow door close issue 14.31/30 Tylan 11-LTO down pull and clean 0/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa down MW overheat issues Burn Box up Ebeam yellow computer issues ZYGO up FGA2 yellow broken elephant again 2x in a week SiH4 for furnaces A on line 590 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Nov 24 06:18:48 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 24 Nov 2009 06:18:48 -0800 Subject: Diffusion Morning Report 11/24/09 Message-ID: <4B0BEB48.4060608@stanford.edu> Good Morning All, Looking OK this Morning. Tylan LTO needs test after pull and clean. Tylan 1 and tylan nitride observation.Thermco Nitride uniformity issues?Tel Spa MW over temp issues-FS looking into it. Ebeam Computer issues. Thermco LTO testing for qual. No other problems at this time. Date: 11/24/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow mfs alarm Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 4.28/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 2.42/30 Tylan 10-Nitride yellow door close issue 14.31/30 Tylan 11-LTO down needs test after pull and clean 0/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa down MW overheat issues Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 590 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: