From tberg at stanford.edu Thu Oct 1 06:26:33 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 01 Oct 2009 06:26:33 -0700 Subject: Diffusion Morning Report 10/01/09 Message-ID: <4AC4AE09.5040000@stanford.edu> Good Morning All, Looking good this morning. Tylan Poly down for pull and clean, Tel spa waiting for parts. Thermco LTO testing for qual. No other issues at this time. Date: 9/30/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.03/30 Tylan 8-SiGe up 5.9/30 Tylan 9-Poly down pull and clean 0/30 Tylan 10-Nitride up 8.35/30 Tylan 11-LTO up 26.6/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down heater destroyed-working on replacement Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 245 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 2 06:10:39 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 02 Oct 2009 06:10:39 -0700 Subject: Diffusion Morning Report 10/02/09 Message-ID: <4AC5FBCF.50302@stanford.edu> Good Morning All, Looking good this morning. POLY is testing after pulll and clean. TEL will be here next week to work on SPA. Thermco LTO testing. Burn box clean this morning. No other issues at this time. Date: 10/2/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.03/30 Tylan 8-SiGe up 5.9/30 Tylan 9-Poly down testing after P & C .18/30 Tylan 10-Nitride up 8.35/30 Tylan 11-LTO up 26.6/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down heater destroyed-FS here on TUES Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 230 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 5 07:24:20 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 05 Oct 2009 07:24:20 -0700 Subject: Diffusion Morning Report 10/05/09 Message-ID: <4ACA0194.2050800@stanford.edu> Good Morning All, Looking good this morning. Poly has a galled loader rail we are replacing. The cantilever is NOT rubbing.FS will be here tomorrow for TEL. Thermco LTO testing. Germane for SiGe and Thermco Poly 2 is almost empty- long runs on the weekend. No other issues at this time. Date: 10/5/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.03/30 Tylan 8-SiGe up 6.3/30 Tylan 9-Poly yellow door close issues .32/30 Tylan 10-Nitride up 8.42/30 Tylan 11-LTO up 27.95/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down heater destroyed-FS here on TUES Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 210 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 6 06:13:29 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 06 Oct 2009 06:13:29 -0700 Subject: Diffusion Morning Report 10/06/09 Message-ID: <4ACB4279.3080309@stanford.edu> Good Morning All, Looking good this morning. TEL Fs will be here today to work on SPA heater. TEOS2 had pressure issues. Tylan poly had boat loader issues.No other issues at this time. Date: 10/6/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow pressure issues 2.03/30 Tylan 8-SiGe up 6.7/30 Tylan 9-Poly yellow boat loader issues .57/30 Tylan 10-Nitride up 8.42/30 Tylan 11-LTO up 28.06/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down heater destroyed-FS here on today Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 210 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 7 06:32:37 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 07 Oct 2009 06:32:37 -0700 Subject: Diffusion Morning Report 10/07/09 Message-ID: <4ACC9875.1030203@stanford.edu> Good Morning All, Looking good this morning. TEL FS is here and replacing heater. Thermco LTO testing for Qual. No other issues at this time. Date: 10/7/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.03/30 Tylan 8-SiGe up 6.7/30 Tylan 9-Poly up .57/30 Tylan 10-Nitride up 8.42/30 Tylan 11-LTO up 28.16/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down FS replacing heater assy Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 210 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 8 06:18:37 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 08 Oct 2009 06:18:37 -0700 Subject: Diffusion Morning Report 10/08/09 Message-ID: <4ACDE6AD.7060509@stanford.edu> Good Morning All, Looking good this morning. Tylan Poly having Boat loader issues in Auto. TEL heater is replaced and is testing. Thermco LTO is testing? No other issues at this time. Date: 10/8/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.03/30 Tylan 8-SiGe up 6.7/30 Tylan 9-Poly yellow boat loader issues .72/30 Tylan 10-Nitride up 8.42/30 Tylan 11-LTO up 28.16/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down Heater replaced -testing Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 210 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 9 06:34:32 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 09 Oct 2009 06:34:32 -0700 Subject: Diffusion Morning Report 10/09/09 Message-ID: <4ACF3BE8.3050303@stanford.edu> Good Morning All, Looking good this morning. Tylan BPSG going down for pull and clean on Tuesday morning. Tylan 3 was slightly low on quals.Observing poly door. TEL spa waiting stage cover heater is ok now. Thermco LTO testing. No other issues at this time. Date: 10/9/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 yellow thin Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.03/30 Tylan 8-SiGe up 6.7/30 Tylan 9-Poly yellow observing .72/30 Tylan 10-Nitride up 9.94/30 Tylan 11-LTO up 31.16/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down Heater replaced -testing Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 210 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 12 06:46:28 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 12 Oct 2009 06:46:28 -0700 Subject: Diffusion Morning Report 10/12/09 Message-ID: <4AD33334.9060407@stanford.edu> Good morning All, Looking OK this morning. Tylan Nitride has a leak. TEL Spa waiting stage cover. Tylan FGA has possible scraping. Thermco LTO testing for Qual Tylan 3 needs test after work. No other issues at this time. Date: 10/12/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 yellow thin Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.12/30 Tylan 8-SiGe up 6.7/30 Tylan 9-Poly up .72/30 Tylan 10-Nitride down pumping issues 9.94/30 Tylan 11-LTO up 31.3/30 Tylan 12-FGA yellow possible scraping Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down Heater replaced needs stage quartz Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 179 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 13 06:36:43 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 13 Oct 2009 06:36:43 -0700 Subject: Diffusion Morning Report 10/13/09 Message-ID: <4AD4826B.9030507@stanford.edu> Good Morning All, Looking ok this morning. Tylan Nitride is coating after tube change. Tylan LTO is down for pull and clean. TEOS2 is down for cooked o-rings. TYlan 3 needs test after work. FGA has possible scraping issue.Thermco LTO testing? No other issues at this time. Date: 10/13/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 yellow thin-needs test after work Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down pumping issue-cooked orings 2.82/30 Tylan 8-SiGe up 6.7/30 Tylan 9-Poly up 1.82/30 Tylan 10-Nitride down coating now will need test 0/30 Tylan 11-LTO down pull and clean 0/30 Tylan 12-FGA yellow possible scraping Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down Heater replaced -testing Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 179 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 15 07:30:31 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 15 Oct 2009 07:30:31 -0700 Subject: Diffusion Morning Report 10/15/09 Message-ID: <4AD73207.7070906@stanford.edu> Good Morning All, Looking OK this morning. TEOS 2 is coating after tube change.Tylans 1 and 2 had mfs 08 alarms. FGA had possible scraping. TEL Spa Waiting for stage cover. Thermco LTO testing? No other issues at this time. Date: 10/15/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow mfs 08 Tylan 2 down h2 flow issue mfs 08 Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down re-assembled coating 0/30 Tylan 8-SiGe up 6.7/30 Tylan 9-Poly up 1.86/30 Tylan 10-Nitride up 0/30 Tylan 11-LTO up 1.3/30 Tylan 12-FGA yellow possible scraping Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down Heater replaced -waiting for cover Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 147 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 16 07:43:00 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 16 Oct 2009 07:43:00 -0700 Subject: Diffusion Morning Report 10/16/09 Message-ID: <4AD88674.8090501@stanford.edu> Good Morning All, Looking good this morning. Pretty much everything is up TEOS2 needs a test. Burn box cleaned this morning. Thermco LTO testing? TEL waiting for quartz parts. No other issues at this time. Date: 10/16/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow re-assembled coated needs test 2.82/30 Tylan 8-SiGe up 6.7/30 Tylan 9-Poly up 15.97/30 Tylan 10-Nitride up 1.35/30 Tylan 11-LTO up 1.4/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down Heater replaced -waiting for cover Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 147 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 19 06:57:36 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 19 Oct 2009 06:57:36 -0700 Subject: Diffusion Morning Report 10/19/09 Message-ID: <4ADC7050.3090403@stanford.edu> Good Morning All, Looking OK this morning. TEOS2 container is Empty. TEL spa waiting for parts. Thermco LTO testing? No other issues at this time. Date: 10/19/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down teos empty 2.82/30 Tylan 8-SiGe up 6.7/30 Tylan 9-Poly up 15.97/30 Tylan 10-Nitride up 16.62/30 Tylan 11-LTO up 1.4/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down Heater replaced -waiting for cover Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 147 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 20 06:18:48 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 20 Oct 2009 06:18:48 -0700 Subject: Diffusion Morning Report 10/20/09 Message-ID: <4ADDB8B8.9060703@stanford.edu> Good Morning All, Looking OK this morning. Tylan Nitride , Thermco Nitride as well as AMAT Epis DCS is shut down for DCS cabinet mod. TEOS hadO2 interlock issues but ran OK.Thermco LTO testing. No other issues at this time. Date: 10/20/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow 3.44/30 Tylan 8-SiGe up 6.7/30 Tylan 9-Poly up 16.62/30 Tylan 10-Nitride down DCS Cabinet Mod 5.4/30 Tylan 11-LTO up 5.62/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down DCS Cabinet Mod Thermco bpsg future testing for qual TEL Spa down Heater replaced -waiting for cover Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 77 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 21 06:53:48 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 21 Oct 2009 06:53:48 -0700 Subject: Diffusion Morning Report 10/21/09 Message-ID: <4ADF126C.8010009@stanford.edu> Good Morning All, Looking good this morning. DCS mod is going well. TEL Fs should be here today to install heater cover. TEOS has possible leak issues. Thermco LTO testing for qual? No other issues at this time. > > Date: 10/21/09 THICKNESS-Change at > Tube Name/Number Status > Tylan 1 up > Tylan 2 up > Tylan 3 up > Tylan 4 up > Tylan 5-BBr3 up > Tylan 6-POCl3 up > Tylan 7-TEOS2 yellow possible leak 3.44/30 > Tylan 8-SiGe up 6.7/30 > Tylan 9-Poly up 22.62/30 > Tylan 10-Nitride down DCS Cabinet Mod 5.4/30 > Tylan 11-LTO up 6.23/30 > Tylan 12-FGA up > Thermco 1 up > Thermco 2 up > Thermco 3 future > Thermco4 future > Thermco Poly1 up > Thermco Poly2 up > Thermco Nitride1 down DCS Cabinet Mod > Thermco bpsg future testing for qual > TEL Spa down Heater replaced -waiting for cover > Burn Box up > > Ebeam up > ZYGO up > FGA2 up > SiH4 for furnaces B on line 47 psi changeover working well > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 22 07:39:11 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 22 Oct 2009 07:39:11 -0700 Subject: Diffusion Morning Report 10/22/09 Message-ID: <4AE06E8F.2010307@stanford.edu> Good Morning All, Looking good this morning. TEL Spa is back up. Looking into TEOS leak issues. DCS cabinet mod is going well. Thermco LTO testing for Qual? No othr issues at this time. Date: 10/22/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow possible leak-looking into recipes 3.44/30 Tylan 8-SiGe up 6.7/30 Tylan 9-Poly up 22.62/30 Tylan 10-Nitride down DCS Cabinet Mod 5.4/30 Tylan 11-LTO up 8.63/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down DCS Cabinet Mod Thermco bpsg future testing for qual TEL Spa up Heater replaced -checked out ok Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 47 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 23 06:50:33 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 23 Oct 2009 06:50:33 -0700 Subject: Diffusion Morning Report 10/23/09 Message-ID: <4AE1B4A9.20805@stanford.edu> Good Morning All, Looking Ok this morning. Tylan LTO has a leak. DCS cabinet mod is almost completed. Tylan 1 has a possible scraping issue.Germane for SiGe and Thermco Poly 2 has been changed and will be back on line this morning. Tylan Poly is close to pull and clean after numerous long runs. It will go down on Tuesday morning. Thermco LTO testing? Modified TEOS pump recipe. No other issues at this time. Date: 10/23/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow possible scraping issue Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 3.44/30 Tylan 8-SiGe up 6.7/30 Tylan 9-Poly up 29.62/30 Tylan 10-Nitride down DCS Cabinet Mod 5.4/30 Tylan 11-LTO up 8.63/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down DCS Cabinet Mod Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 47 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 26 07:40:29 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 26 Oct 2009 07:40:29 -0700 Subject: Diffusion Morning Report 10/26/09 Message-ID: <4AE5B4DD.209@stanford.edu> Good Morning All, Looking OK this morning.Tylan 1 had possible scraping issues and N2 leak. Teos pump recipe modified to give more time in pump down. Looking onto DCS issues. Ebeam computer issue.Thermco LTO testing. No other issues at this time.. Date: 10/26/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow possible scraping issue Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 3.44/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 31.96/30 Tylan 10-Nitride down DCS Cabinet issue 7.23/30 Tylan 11-LTO up 9.29/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 down DCS Cabinet issue Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 716 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 27 06:16:13 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 27 Oct 2009 06:16:13 -0700 Subject: Diffusion Morning Report `10/27/09 Message-ID: <4AE6F29D.5050700@stanford.edu> Good Morning All, Looking good this morning. Tylan Poly is down for scheduled pull and clean. FGA 2 has no power to the element and blew the fuses. Tylan Nitride had MFS alarm. Thermco LTO testing. No other issues at this time. Date: 10/27/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 3.44/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly down Pull and Clean 0/30 Tylan 10-Nitride yellow mfs alarm 7.24/30 Tylan 11-LTO up 9.29/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 down no power to element SiH4 for furnaces A on line 712 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 28 06:14:23 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 28 Oct 2009 06:14:23 -0700 Subject: Diffusion Morning Report 10/28/09 Message-ID: <4AE843AF.1090907@stanford.edu> Good Morning All, Looking Good this Morning. Poly is re-assembled and coating. Nitride had MFS alarms several days ago but no reports since. Thermco LTO testing? No other issues at this time. Date: 10/28/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 3.44/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly down Coat in progress-will need test 0/30 Tylan 10-Nitride yellow mfs alarm 7.24/30 Tylan 11-LTO up 9.29/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 709si changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 29 06:09:47 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 29 Oct 2009 06:09:47 -0700 Subject: Diffusion Morning Report 10/29/09 Message-ID: <4AE9941B.4090605@stanford.edu> Good Morning All, Looking good this Morning. Nitride has door close issues. TEL has some kind of liquid leak. Thermco LTO testing for qual. No other issues at this time. Date: 10/29/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 3.44/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up .2/30 Tylan 10-Nitride yellow door close issue 7.334/30 Tylan 11-LTO up 9.29/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down liquid leak Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 677 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 30 06:26:01 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 30 Oct 2009 06:26:01 -0700 Subject: Diffusion Morning Report 10/30/09 Message-ID: <4AEAE969.1050405@stanford.edu> Good Morning All, Looking Good this morning. Burn box clean this morning. TEOS 2 recipe modified for bette pumping. Ebeam has computer issues. No other issues at this time. Date: 10/30/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 3.44/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up .2/30 Tylan 10-Nitride up 7.334/30 Tylan 11-LTO up 12.81/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 677 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: