Diffusion Morning Report 10/02/09

Ted Berg tberg at stanford.edu
Fri Oct 2 06:10:39 PDT 2009

Good Morning All,
    Looking good this morning. POLY is testing after pulll and clean. 
TEL will be here next week to work on SPA. Thermco LTO testing. Burn box 
clean this morning.  No other issues at this time.

  	Date: 	10/2/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	2.03/30 	  	 
Tylan 8-SiGe 	up 	  	5.9/30 	  	 
Tylan 9-Poly 	down  	testing after P & C 	.18/30 	  	 
Tylan 10-Nitride 	up 	  	8.35/30 	  	 
Tylan 11-LTO 	up 	  	26.6/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	down  	heater destroyed-FS here on TUES 	  	  	 
Burn Box 	up 	
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 230 psi 	 changeover working well  	  	 

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