Diffusion Morning Report 10/05/09

Ted Berg tberg at stanford.edu
Mon Oct 5 07:24:20 PDT 2009

Good Morning All,
    Looking good this morning. Poly has a galled loader rail we are 
replacing. The cantilever is NOT rubbing.FS will be here tomorrow for 
TEL. Thermco LTO testing. Germane for SiGe and Thermco Poly 2 is almost 
empty- long runs on the weekend.  No other issues at this time.

  	Date: 	10/5/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	2.03/30 	  	 
Tylan 8-SiGe 	up 	  	6.3/30 	  	 
Tylan 9-Poly 	yellow 	door close issues 	.32/30 	  	 
Tylan 10-Nitride 	up 	  	8.42/30 	  	 
Tylan 11-LTO 	up 	  	27.95/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	down  	heater destroyed-FS here on TUES 	  	  	 
Burn Box 	up 	
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 210 psi 	 changeover working well  	  	 

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