Diffusion Morning Report 10/09/09

Ted Berg tberg at stanford.edu
Fri Oct 9 06:34:32 PDT 2009


Good Morning All,
    Looking good this morning. Tylan BPSG going down for pull and clean 
on Tuesday morning. Tylan 3 was slightly low on quals.Observing poly 
door. TEL spa waiting stage cover heater is ok now. Thermco LTO testing. 
No other issues at this time.

  	  	  	  	  	 
  	Date: 	10/9/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	yellow 	thin 	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	2.03/30 	  	 
Tylan 8-SiGe 	up 	  	6.7/30 	  	 
Tylan 9-Poly 	yellow 	observing 	.72/30 	  	 
Tylan 10-Nitride 	up 	  	9.94/30 	  	 
Tylan 11-LTO 	up 	  	31.16/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	down  	Heater replaced -testing 	  	  	 
Burn Box 	up 	
	   	  	 
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 210 psi 	 changeover working well  	  	 


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