Diffusion Morning Report 10/13/09

Ted Berg tberg at stanford.edu
Tue Oct 13 06:36:43 PDT 2009


Good Morning All,
    Looking ok this morning. Tylan Nitride is coating after tube change. 
Tylan LTO is down for pull and clean. TEOS2 is down for cooked o-rings. 
TYlan 3 needs test after work. FGA has possible scraping issue.Thermco 
LTO testing? No other issues at this time.

  	  	  	  	  	 
  	Date: 	10/13/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	yellow 	thin-needs test after work
	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	down 	pumping issue-cooked orings 	2.82/30 	  	 
Tylan 8-SiGe 	up 	  	6.7/30 	  	 
Tylan 9-Poly 	up 	  	1.82/30 	  	 
Tylan 10-Nitride 	down  	coating now will need test 	0/30 	  	 
Tylan 11-LTO 	down  	pull and clean 	0/30 	  	 
Tylan 12-FGA 	yellow 	possible scraping 	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	down  	Heater replaced -testing 	  	  	 
Burn Box 	up 	
	   	  	 
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 179 psi 	 changeover working well  	  	 


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