Diffusion Morning Report 10/15/09

Ted Berg tberg at stanford.edu
Thu Oct 15 07:30:31 PDT 2009

Good Morning All,
    Looking OK this morning. TEOS 2 is coating after tube change.Tylans 
1 and 2 had mfs 08 alarms. FGA had possible scraping. TEL Spa Waiting 
for stage cover. Thermco LTO testing?  No other issues at this time.

  	Date: 	10/15/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	yellow 	mfs 08 	  	  	 
Tylan 2 	down 	h2 flow issue mfs 08 	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	down 	re-assembled coating 	0/30 	  	 
Tylan 8-SiGe 	up 	  	6.7/30 	  	 
Tylan 9-Poly 	up 	  	1.86/30 	  	 
Tylan 10-Nitride 	up 	  	0/30 	  	 
Tylan 11-LTO 	up 	  	1.3/30 	  	 
Tylan 12-FGA 	yellow 	possible scraping 	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	down  	Heater replaced -waiting for cover 	  	  	 
Burn Box 	up 	
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 147 psi 	 changeover working well  	  	 

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