Diffusion Morning Report 10/19/09

Ted Berg tberg at stanford.edu
Mon Oct 19 06:57:36 PDT 2009


Good Morning All,
    Looking  OK this morning. TEOS2 container is Empty. TEL spa waiting 
for parts. Thermco LTO testing?  No other issues at this time.

  	  	  	  	  	 
  	Date: 	10/19/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	down  	teos empty 	2.82/30 	  	 
Tylan 8-SiGe 	up 	  	6.7/30 	  	 
Tylan 9-Poly 	up 	  	15.97/30 	  	 
Tylan 10-Nitride 	up 	  	16.62/30 	  	 
Tylan 11-LTO 	up 	  	1.4/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	down  	Heater replaced -waiting for cover 	  	  	 
Burn Box 	up 	
	   	  	 
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 147 psi 	 changeover working well  	  	 


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