Diffusion Morning Report 10/20/09

Ted Berg tberg at stanford.edu
Tue Oct 20 06:18:48 PDT 2009


Good Morning All,
    Looking OK this morning. Tylan Nitride , Thermco Nitride as well as 
AMAT Epis DCS is shut down for DCS cabinet mod. TEOS hadO2 interlock 
issues but ran OK.Thermco LTO testing. No other issues at this time.

  	  	  	  	  	 
  	Date: 	10/20/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	yellow 	  	3.44/30 	  	 
Tylan 8-SiGe 	up 	  	6.7/30 	  	 
Tylan 9-Poly 	up 	  	16.62/30 	  	 
Tylan 10-Nitride 	down  	DCS Cabinet Mod 	5.4/30 	  	 
Tylan 11-LTO 	up 	  	5.62/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	down  	DCS Cabinet Mod 	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	down  	Heater replaced -waiting for cover 	  	  	 
Burn Box 	up 	
	   	  	 
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 77 psi 	 changeover working well  	  	 


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