Diffusion Morning Report 10/21/09

Ted Berg tberg at stanford.edu
Wed Oct 21 06:53:48 PDT 2009


Good Morning All,
    Looking good this morning. DCS mod is going well. TEL Fs should be 
here today to install heater cover. TEOS has possible leak issues. 
Thermco LTO testing for qual? No other issues at this time.

>   	  	  	  	  	 
>   	Date: 	10/21/09 	THICKNESS-Change at 	  	 
> Tube Name/Number 	Status 	  	  	  	 
> Tylan 1 	up 	  	  	  	 
> Tylan 2 	up 	  	  	  	 
> Tylan 3 	up 	  	  	  	 
> Tylan 4 	up 	  	  	  	 
> Tylan 5-BBr3 	up 	  	  	  	 
> Tylan 6-POCl3 	up 	  	  	  	 
> Tylan 7-TEOS2 	yellow 	possible leak 	3.44/30 	  	 
> Tylan 8-SiGe 	up 	  	6.7/30 	  	 
> Tylan 9-Poly 	up 	  	22.62/30 	  	 
> Tylan 10-Nitride 	down  	DCS Cabinet Mod 	5.4/30 	  	 
> Tylan 11-LTO 	up 	  	6.23/30 	  	 
> Tylan 12-FGA 	up 	  	  	  	 
> Thermco 1 	up 	  	  	  	 
> Thermco 2 	up 	  	  	  	 
> Thermco 3 	future 	  	  	  	 
> Thermco4 	future 	  	  	  	 
> Thermco Poly1 	up 	  	  	  	 
> Thermco Poly2 	up 	  	  	  	 
> Thermco Nitride1 	down  	DCS Cabinet Mod 	  	  	 
> Thermco bpsg 	future 	testing for qual 	  	  	 
> TEL Spa 	down  	Heater replaced -waiting for cover 	  	  	 
> Burn Box 	up 	
> 	   	  	 
> Ebeam 	up 	  	  	  	 
> ZYGO 	up 	  	  	  	 
> FGA2 	up 	  	  	  	 
> SiH4 for furnaces 	  	B on line 47 psi 	 changeover working well  	  	 
>

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