Diffusion Morning Report 10/23/09

Ted Berg tberg at stanford.edu
Fri Oct 23 06:50:33 PDT 2009

Good Morning All,
    Looking Ok this morning. Tylan LTO has a leak. DCS cabinet mod is 
almost completed. Tylan 1 has a possible scraping issue.Germane for SiGe 
and Thermco Poly 2 has been changed and will be back on line this 
morning. Tylan Poly is close to pull and clean after numerous long runs. 
It will go down on Tuesday morning. Thermco LTO testing? Modified TEOS 
pump recipe. No other issues at this time.

  	Date: 	10/23/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	yellow 	possible scraping issue 	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	yellow 	modified pump recipe 	3.44/30 	  	 
Tylan 8-SiGe 	up 	  	6.7/30 	  	 
Tylan 9-Poly 	up 	  	29.62/30 	  	 
Tylan 10-Nitride 	down  	DCS Cabinet Mod 	5.4/30 	  	 
Tylan 11-LTO 	up 	  	8.63/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	down  	DCS Cabinet Mod 	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 47 psi 	 changeover working well  	  	 

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