Diffusion Morning Report 10/26/09

Ted Berg tberg at stanford.edu
Mon Oct 26 07:40:29 PDT 2009


Good Morning All,
    Looking OK this morning.Tylan 1 had possible scraping issues and N2 
leak. Teos pump recipe modified to give more time in pump down. Looking 
onto DCS issues. Ebeam computer issue.Thermco LTO testing.  No other 
issues at this time..

  	  	  	  	  	 
  	Date: 	10/26/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	yellow 	possible scraping issue 	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	yellow 	modified pump recipe 	3.44/30 	  	 
Tylan 8-SiGe 	up 	  	7.05/30 	  	 
Tylan 9-Poly 	up 	  	31.96/30 	  	 
Tylan 10-Nitride 	down  	DCS Cabinet issue 	7.23/30 	  	 
Tylan 11-LTO 	up 	  	9.29/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	down  	DCS Cabinet issue 	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	
	   	  	 
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 716 psi 	 changeover working well  	  	 


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