Diffusion Morning Report `10/27/09

Ted Berg tberg at stanford.edu
Tue Oct 27 06:16:13 PDT 2009

Good Morning All,
    Looking good this morning. Tylan Poly is down for scheduled pull and 
clean. FGA 2 has no power to the element and blew  the fuses. Tylan 
Nitride had MFS alarm. Thermco LTO testing. No other issues at this time.

  	Date: 	10/27/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	yellow 	modified pump recipe 	3.44/30 	  	 
Tylan 8-SiGe 	up 	  	7.05/30 	  	 
Tylan 9-Poly 	down 	Pull and Clean 	0/30 	  	 
Tylan 10-Nitride 	yellow 	mfs alarm 	7.24/30 	  	 
Tylan 11-LTO 	up 	  	9.29/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	down 	no power to element 	  	  	 
SiH4 for furnaces 	  	A on line 712 psi 	 changeover working well  	  	 

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