From rseymour at stanford.edu Tue Sep 1 07:43:23 2009 From: rseymour at stanford.edu (Ray Seymour) Date: Tue, 01 Sep 2009 07:43:23 -0700 Subject: Diffusion Morning Report Message-ID: <4A9D330B.9030503@stanford.edu> Good Morning All, A few Tylan issues this morning. TEOS has pressure control issues. Tylan 4 has a contamination report. All else looks good. Date: 9/1/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 *up* * * * * * * Tylan 2 *up* * * * * * * Tylan 3 *up* * * * * * * Tylan 4 *problem* * * * * * * Tylan 5-BBr3 *up* * * * * * * Tylan 6-POCl3 *up* * * * * * * Tylan 7-TEOS2 *problem* * * *4.9/30* * * Tylan 8-SiGe *up* * * *4.54/30* * * Tylan 9-Poly *up* * * *17.04/30* * * Tylan 10-Nitride *up* * * *19.5/30* * * Tylan 11-LTO *up* * * *21.78/30* * * Tylan 12-FGA *up* * * * * * * Thermco 1 *up* * * * * * * Thermco 2 *up* * * * * * * Thermco 3 *future* * * * * * * Thermco4 *future* * * * * * * Thermco Poly1 *up* * * * * * * Thermco Poly2 *up* * * * * * * Thermco Nitride1 *up* * * * * * * Thermco bpsg *future* *testing for qual* * * * * TEL Spa *up* * * * * * * Burn Box *up* * * * * * * Ebeam *up* * * * * * * ZYGO *up* * * * * * * FGA2 *up* * * * * * * SiH4 for furnaces * * *B on line 481 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Sep 2 07:27:23 2009 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 02 Sep 2009 07:27:23 -0700 Subject: Diffusion Morning Report Message-ID: <4A9E80CB.4010006@stanford.edu> Good Morning All, There are no issues at this time. Date: 9/2/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 *up* * * * * * * Tylan 2 *up* * * * * * * Tylan 3 *up* * * * * * * Tylan 4 *up* * * * * * * Tylan 5-BBr3 *up* * * * * * * Tylan 6-POCl3 *up* * * * * * * Tylan 7-TEOS2 *up* * * *4.9/30* * * Tylan 8-SiGe *up* * * *4.54/30* * * Tylan 9-Poly *up* * * *17.04/30* * * Tylan 10-Nitride *up* * * *19.7/30* * * Tylan 11-LTO *up* * * *22.03/30* * * Tylan 12-FGA *up* * * * * * * Thermco 1 *up* * * * * * * Thermco 2 *up* * * * * * * Thermco 3 *future* * * * * * * Thermco4 *future* * * * * * * Thermco Poly1 *up* * * * * * * Thermco Poly2 *up* * * * * * * Thermco Nitride1 *up* * * * * * * Thermco bpsg *future* *testing for qual* * * * * TEL Spa *up* * * * * * * Burn Box *up* * * * * * * Ebeam *up* * * * * * * ZYGO *up* * * * * * * FGA2 *up* * * * * * * SiH4 for furnaces * * *B on line 479 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Thu Sep 3 07:54:55 2009 From: rseymour at stanford.edu (Ray Seymour) Date: Thu, 03 Sep 2009 07:54:55 -0700 Subject: Diffusion Morning Report Message-ID: <4A9FD8BF.1070901@stanford.edu> Good Morning All Tylan6-POCL3 down for a pull and clean. All else looking good this morning. Date: 9/3/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 *up* * * * * * * Tylan 2 *up* * * * * * * Tylan 3 *up* * * * * * * Tylan 4 *up* * * * * * * Tylan 5-BBr3 *up* * * * * * * Tylan 6-POCl3 *Down* * pull and clean * * * * * Tylan 7-TEOS2 *up* * * *12.3/30* * * Tylan 8-SiGe *up* * * *4.54/30* * * Tylan 9-Poly *up* * * *17.04/30* * * Tylan 10-Nitride *up* * * *20.7/30* * * Tylan 11-LTO *up* * * *22.63/30* * * Tylan 12-FGA *up* * * * * * * Thermco 1 *up* * * * * * * Thermco 2 *up* * * * * * * Thermco 3 *future* * * * * * * Thermco4 *future* * * * * * * Thermco Poly1 *up* * * * * * * Thermco Poly2 *up* * * * * * * Thermco Nitride1 *up* * * * * * * Thermco bpsg *future* *testing for qual* * * * * TEL Spa *up* * * * * * * Burn Box *up* * * * * * * Ebeam *up* * * * * * * ZYGO *up* * * * * * * FGA2 *up* * * * * * * SiH4 for furnaces * * *B on line 479 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Sep 4 07:47:42 2009 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 04 Sep 2009 07:47:42 -0700 Subject: Diffusion Morning Report Message-ID: <4AA1288E.8080200@stanford.edu> Good Morning All Tylan6-POCL3 down for a pull and clean. The LPCVD burnbox was cleaned this morning. Tylan3 has some major thickness issues. All else looking ok. Have a great holiday weekend. Date: 9/4/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 *up* * * * * * * Tylan 2 *up* * * * * * * Tylan 3 *up* * thickness issues * * * * * Tylan 4 *up* * * * * * * Tylan 5-BBr3 *up* * * * * * * Tylan 6-POCl3 *Down* * pull and clean * * * * * Tylan 7-TEOS2 *up* * * *12.3/30* * * Tylan 8-SiGe *up* * * *4.54/30* * * Tylan 9-Poly *up* * * *17.04/30* * * Tylan 10-Nitride *up* * * *25.7/30* * * Tylan 11-LTO *up* * * *22.88/30* * * Tylan 12-FGA *up* * * * * * * Thermco 1 *up* * * * * * * Thermco 2 *up* * * * * * * Thermco 3 *future* * * * * * * Thermco4 *future* * * * * * * Thermco Poly1 *up* * * * * * * Thermco Poly2 *up* * * * * * * Thermco Nitride1 *up* * * * * * * Thermco bpsg *future* *testing for qual* * * * * TEL Spa *up* * * * * * * Burn Box *up* *cleaned this morning * * * * * Ebeam *up* * * * * * * ZYGO *up* * * * * * * FGA2 *up* * * * * * * SiH4 for furnaces * * *B on line 479 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Sep 8 07:13:22 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 08 Sep 2009 07:13:22 -0700 Subject: Diffusion Morning Report 09/08/09 Message-ID: <4AA66682.1040507@stanford.edu> Good Morning All, Looking good this morning. LTO is down for pull and clean it is at 31+ microns. THermco Poly 2 doesn't heat up. TEL chamber heater not working. Ebeam low beam current. Thermco LTO testing. Date: 9/8/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 4.9/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly up 17.99/30 Tylan 10-Nitride up 25.7/30 Tylan 11-LTO down pull and clean 31.68/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 down no heat Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down no heat Burn Box up Ebeam down low beam current ZYGO up FGA2 up SiH4 for furnaces B on line 509 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Sep 9 06:42:12 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 09 Sep 2009 06:42:12 -0700 Subject: Diffusion Morning Report 09/09/09 Message-ID: <4AA7B0B4.7050000@stanford.edu> Good Morning All, Looking good this morning. POCl3 and LTO are in tube change. Thermco LTO is testing. TEL Spa has possible heater issues. Ebeam has slightly low beam current. No other issues at this time. Date: 9/9/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 down pull and clean Tylan 7-TEOS2 up 4.9/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly up 17.99/30 Tylan 10-Nitride up 25.7/30 Tylan 11-LTO down Re assembly after pull 0/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down no heat above 420 Burn Box up Ebeam yellow low beam current ZYGO up FGA2 up SiH4 for furnaces B on line 509 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Sep 10 08:12:58 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 10 Sep 2009 08:12:58 -0700 Subject: Diffusion Morning Report 09/10/09 Message-ID: <4AA9177A.4090604@stanford.edu> Good morning All, Looking good this morning Tylan LTO is testing after pull and clean. POCl3 is being re-assembled. TEL working with FS on Heater issue. Thermco LTO is testing for Qual. Ebeam has low beam current. No other issues at this time. Date: 9/10/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 down pull and clean-reassembly Tylan 7-TEOS2 up 4.9/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly up 17.99/30 Tylan 10-Nitride up 25.7/30 Tylan 11-LTO down testing after P & C 0/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down no heat above 420-consulting with FS Burn Box up Ebeam yellow low beam current ZYGO up FGA2 up SiH4 for furnaces B on line 509 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Sep 11 07:05:11 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 11 Sep 2009 07:05:11 -0700 Subject: Diffusion Morning Report 09/11/09 Message-ID: <4AAA5917.30102@stanford.edu> Good Morning All, Looking OK this morning. LTO up after pull and clean POcl3 is back together after pull and clean and needs test. TEOS had pressure issues. FS will be in to troubleshoot heater issues on SPA. Thermco LTO testing. Ebeam has slightly low beam current. Burn box cleaned this morning. No other issues at this second. Date: 9/1/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 yellow needs test Tylan 7-TEOS2 down pressure issues 4.9/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly up 17.99/30 Tylan 10-Nitride up 25.7/30 Tylan 11-LTO up .35/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down no heat above 420-consulting with FS Burn Box up Ebeam yellow low beam current ZYGO up FGA2 yellow Possible flow issues SiH4 for furnaces B on line 509 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Sep 14 06:45:45 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 14 Sep 2009 06:45:45 -0700 Subject: Diffusion MorningReport 09/14/09 Message-ID: <4AAE4909.8010108@stanford.edu> Good Morning All, looking OK this morning. FS will be here today to look at TEL heater issue. TEOS2 has a leak. Germane for Tylan/Thermco has dropped over 10 pound in the past 3 days. TEOS 2 has a leak. Ebeam has an ion gauge that is not on. THermco LTO testing for Qual. No other issues at this time. Date: 9/14/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 yellow was run after p&c Tylan 7-TEOS2 down pressure issues 4.9/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly up 17.99/30 Tylan 10-Nitride up 25.7/30 Tylan 11-LTO up .35/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down no heat above 420-FS here today Burn Box up Ebeam yellow low beam current ZYGO up FGA2 up SiH4 for furnaces B on line 410 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Sep 15 06:25:42 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 15 Sep 2009 06:25:42 -0700 Subject: Diffusion Morning Report 09/15/09 Message-ID: <4AAF95D6.2030305@stanford.edu> Good Morning All, Looking good this morning. TEL stage heater is destroyed-may be costly to replace. TEOS2 still has some leaks. Thermco LTO testing. POCl3 was run after Pull and clean-results? No other issues at this time. Date: 9/15/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 yellow was run after p&c Tylan 7-TEOS2 down pressure issues 4.9/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly up 17.99/30 Tylan 10-Nitride up 25.7/30 Tylan 11-LTO up 8.13/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down heater destroyed-working on replacement Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 398 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Sep 16 06:17:32 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 16 Sep 2009 06:17:32 -0700 Subject: Diffusion Morning Report 09/16/09 Message-ID: <4AB0E56C.8000208@stanford.edu> Good Morning All, Looking good this morning. TEOS2 still has a leak. TEL spa waiting parts. Thermco LTO testing. POCL3 may be OK need results? No other issues at this time. Date: 9/16/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 yellow was run after p&c Tylan 7-TEOS2 down pressure issues 2.03/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly up 19.67/30 Tylan 10-Nitride up 33.4/30 Tylan 11-LTO up 14.13/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down heater destroyed-working on replacement Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 384 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Sep 17 06:17:15 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 17 Sep 2009 06:17:15 -0700 Subject: Diffusion Morning Report 09/17/09 Message-ID: <4AB236DB.9020800@stanford.edu> Good Morning All, Looking good this morning. TEOS2 is back up. Thanks, Ray. Tylan Nitride is down for pull and clean. FS is working on Parts for TEL SPA. Thermco LTO is testing. No other issues at this time. Date: 9/17/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow observing 2.03/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly up 19.67/30 Tylan 10-Nitride up 0/30 Tylan 11-LTO up 17.86/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down heater destroyed-working on replacement Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 359 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Sep 18 06:17:27 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 18 Sep 2009 06:17:27 -0700 Subject: [Fwd: Diffusion Morning Report 09/18/09] Message-ID: <4AB38867.2070507@stanford.edu> -------- Original Message -------- Subject: Diffusion Morning Report 09/18/09 Date: Fri, 18 Sep 2009 06:16:06 -0700 From: Ted Berg To: morning Report at stanford.edu Good Morning All, Looking good this morning. Tylan Nitride is back together-leak checking. TEOS observing.TEL SPA waiting parts. Thermco LTO testing. No other issues at this time. Date: 9/18/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow observing 2.48/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly up 27.03/30 Tylan 10-Nitride down pull and clean 0/30 Tylan 11-LTO up 18.46/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down heater destroyed-working on replacement Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 296 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Sep 21 06:55:51 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 21 Sep 2009 06:55:51 -0700 Subject: Diffusion Morning Report 09/21/09 Message-ID: <4AB785E7.7040905@stanford.edu> Good Morning All, Looking good this morning. TEOS2 observing. TEL SPA waiting parts. Thermco LTO testing for qual. No other issues at this time. Date: 9/21/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow observing .49/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly up 27.88/30 Tylan 10-Nitride up .11/30 Tylan 11-LTO up 19.25/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down heater destroyed-working on replacement Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 262 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Sep 22 07:05:04 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 22 Sep 2009 07:05:04 -0700 Subject: Diffusion Morning Report 09/22/09 Message-ID: <4AB8D990.3090507@stanford.edu> Good Morning All, Looking good this morning. Waiting for parts on TEL Spa. Testing Thermco LTO. Observing TEOS. No other issues at this time. Date: 9/22/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow observing .49/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly up 27.88/30 Tylan 10-Nitride up 1.8/30 Tylan 11-LTO up 19.25/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down heater destroyed-working on replacement Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 262 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Sep 23 06:44:24 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 23 Sep 2009 06:44:24 -0700 Subject: Diffusion Morning Report 09/23/09 Message-ID: <4ABA2638.2090907@stanford.edu> Good Morning All, Looking good this morning. TEOS 2 under observation. Thermco LTO testing. Still waiting TEL parts. No other issues at this time. Date: 9/23/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow observing .49/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly up 27.88/30 Tylan 10-Nitride up 1.8/30 Tylan 11-LTO up 19.25/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down heater destroyed-working on replacement Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 262 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Sep 24 06:49:08 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 24 Sep 2009 06:49:08 -0700 Subject: Diffusion Morning Report 09/24/09 Message-ID: <4ABB78D4.20207@stanford.edu> Good Morning All, Looking good this morning. TEOS2 under observation. TEL waiting for parts. Thermco LTO testing. Mech pump for Hummer is out for rebuild. No other issues at this time. Date: 9/24/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow observing .49/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly up 27.88/30 Tylan 10-Nitride up 1.95/30 Tylan 11-LTO up 19.25/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down heater destroyed-working on replacement Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 262 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Sep 25 06:18:16 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 25 Sep 2009 06:18:16 -0700 Subject: Diffusion Morning Report 09/25/09 Message-ID: <4ABCC318.50307@stanford.edu> Good Morning All, Looking good this morning. TEOS2 observing. Nitride has a door close issue. Thermco LTO testing. SPA waiting parts. No other issues at this time. Date: 9/25/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow observing .49/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly up 28.6/30 Tylan 10-Nitride yellow Door close issue 2.11/30 Tylan 11-LTO up 19.25/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down heater destroyed-working on replacement Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 262 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Sep 28 06:33:00 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 28 Sep 2009 06:33:00 -0700 Subject: Diffusion Morning Report 09/28/09 Message-ID: <4AC0BB0C.3010401@stanford.edu> Good Morning All, Looking good this morning . Tylan Nitride has vent issues. TEL Spa waiting for parts. Thermco LTO testing. No other issues at this time. Date: 9/28/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.03/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly up 28.6/30 Tylan 10-Nitride yellow won.t vent 8.26/30 Tylan 11-LTO up 25.6/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down heater destroyed-working on replacement Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 245 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Sep 29 06:19:32 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 29 Sep 2009 06:19:32 -0700 Subject: Diffusion Morning Report 09/29/09 Message-ID: <4AC20964.90509@stanford.edu> Good Morning All, :Looking good this morning. Tylan Poly is haing door issues. Thermco LTO testing. TEL parts on order. No other issues at this time. Date: 9/29/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.03/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly down door close issue 28.87/30 Tylan 10-Nitride up 8.35/30 Tylan 11-LTO up 25.6/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down heater destroyed-working on replacement Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 245 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Sep 30 06:03:43 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 30 Sep 2009 06:03:43 -0700 Subject: Diffusion Morning Report 09/30/09 Message-ID: <4AC3572F.2040200@stanford.edu> Good morning All, Looking good this morning. TEL spa waiting parts. Thermco LTO testing for Qual.Tylan Poly going down tomorrow for pull and clean. No other issues at this time. Date: 9/30/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.03/30 Tylan 8-SiGe up 4.54/30 Tylan 9-Poly up 28.95/30 Tylan 10-Nitride up 8.35/30 Tylan 11-LTO up 26.3/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future testing for qual TEL Spa down heater destroyed-working on replacement Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 245 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: