From tberg at stanford.edu Wed Dec 1 06:11:28 2010 From: tberg at stanford.edu (Ted Berg) Date: Wed, 01 Dec 2010 06:11:28 -0800 Subject: Diffusion Morning Report 12/01/10 Message-ID: <4CF65790.4000307@stanford.edu> Good Morning All, Looking good this morning. Epi DCS is in bypass mode. Tylan LTO had MFS alarms. Ebeam has no beam. No other issues at this time. > > Date: 12/1/10 THICKNESS-Change at Priority > Tube Name/Number Status > Tylan 1 *up* ** ** ** ** > Tylan 2 *up* ** ** ** ** > Tylan 3 *up* ** ** ** ** > Tylan 4 *up* ** ** ** ** > Tylan 5-BBr3 *up* ** ** ** ** > Tylan 6-POCl3 *up* ** ** ** ** > Tylan 7-TEOS2 *up* ** *.25/30* ** ** > Tylan 8-SiGe *up* ** *20.1/30* ** ** > Tylan 9-Poly *up* ** *27/30* ** ** > Tylan 10-Nitride *up* ** *19.79/30* ** ** > Tylan 11-LTO *yellow* *mfs alarms* *10.18/30* ** *1* > Tylan 12-FGA *up* * > * ** ** ** > Thermco 1 *up* ** ** ** ** > Thermco 2 *up* ** ** ** ** > Thermco 3 *future* ** ** ** ** > Thermco4 *future* ** ** ** ** > Thermco Poly1 *up* ** ** ** ** > Thermco Poly2 *up* ** ** ** ** > Thermco Nitride1 *up* ** ** ** ** > Thermco bpsg *yellow* *testing* ** ** *2* > AMAT Epi *yellow* *DCS issue* ** ** ** > TEL Spa *up* ** ** ** ** > Burn Box *up* ** ** ** ** > Ebeam *down* *computer issues* ** ** *3* > ZYGO *up* * > * ** ** ** > FGA2 up > SiH4 for furnaces A on line 513 PSI changeover working well > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Dec 2 05:58:38 2010 From: tberg at stanford.edu (Ted Berg) Date: Thu, 02 Dec 2010 05:58:38 -0800 Subject: Diffusion Morning Report 12/02/10 Message-ID: <4CF7A60E.9090300@stanford.edu> Good Morning All, Looking good this morning. Epim is down for broken wafers inside the chamber. Tylan LTO had MFS alarms. Ebeam -no beam. No other issues at this time. Date: 12/2/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *up* ** *20.1/30* ** ** Tylan 9-Poly *up* ** *27/30* ** ** Tylan 10-Nitride *up* ** *19.88/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *10.18/30* ** *2* Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *testing* ** ** ** AMAT Epi *down* *broken wafers inside chamber* ** ** ** TEL Spa *up* * * ** ** *1* Burn Box *up* ** ** ** ** Ebeam *down* *computer issues* ** ** *3* ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 513 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Dec 3 06:16:33 2010 From: tberg at stanford.edu (Ted Berg) Date: Fri, 03 Dec 2010 06:16:33 -0800 Subject: Diffusion Morning Report 12/03/10 Message-ID: <4CF8FBC1.4010607@stanford.edu> Good Morning All, Looking OK this morning. Epi is still down trying to recover from broken-lost wafers. Tylans 1 an2 had MFS alarms as did LTO. Ebeam has no beam. No other issues at this time. Date: 12/3/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *mfs alarms* ** ** *2* Tylan 2 *yellow* *mfs alarms* ** ** *3* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *up* ** *20.1/30* ** ** Tylan 9-Poly *up* ** *27/30* ** ** Tylan 10-Nitride *up* ** *19.88/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *12.45/30* ** *4* Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *testing* ** ** ** AMAT Epi *down* *broken wafers inside chamber* ** ** *1* TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *computer issues* ** ** *5* ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 513 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Dec 6 06:17:43 2010 From: tberg at stanford.edu (Ted Berg) Date: Mon, 06 Dec 2010 06:17:43 -0800 Subject: diffusion Morning Report 12/06/10 Message-ID: <4CFCF087.8040709@stanford.edu> Good Morning All, Looking good yhis morning. Epi is back together and testing. Thermco Poly 2 had N2 flow issues. Tylan 1 has display on 460 issues and Tylan LTO had MFS Alarms. Ebeam no beam. No other issues at this time. Date: 12/6/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *mfs 460 display is gone but flows are OK* ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *up* ** *20.1/30* ** ** Tylan 9-Poly *up* ** *27/30* ** ** Tylan 10-Nitride *up* ** *19.99/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *12.78/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *yellow* *no N2 Hi flow* ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *testing* ** ** ** AMAT Epi *yellow* *testing after wafer removal* ** ** ** TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *computer issues* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 513 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Dec 7 06:04:53 2010 From: tberg at stanford.edu (Ted Berg) Date: Tue, 07 Dec 2010 06:04:53 -0800 Subject: Diffusion Morning Report 12/07/10 Message-ID: <4CFE3F05.3070507@stanford.edu> Good Morning All, Looking good this morning. Epi is running/testing after wafer removal. Tylan 1 has no display on MFS460 but is running correctly. tylan LTO had MFS alarms. Ebeam still has issues. No other problems at this time. Date: 12/7/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *mfs 460 display is gone but flows are OK* ** ** *3* Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *up* ** *20.1/30* ** ** Tylan 9-Poly *up* ** *27/30* ** ** Tylan 10-Nitride *up* ** *19.99/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *12.78/30* ** *2* Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *testing* ** ** ** AMAT Epi *yellow* *testing after wafer removal* ** ** *1* TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *computer issues* ** ** *4* ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 513 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Dec 8 06:09:47 2010 From: tberg at stanford.edu (Ted Berg) Date: Wed, 08 Dec 2010 06:09:47 -0800 Subject: Diffusion Mornin g Report 12/08/10 Message-ID: <4CFF91AB.8080308@stanford.edu> Good Morning All, Looking good this morning . Thermco Poly tube is broken. Tylan 2 had MFS alarms as did tylan LTO. Tylan 1 has bad display on mfs 460 but its working ok.Epi is running. No other issues at this time. Date: 12/8/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *mfs 460 display is gone but flows are OK* ** ** *3* Tylan 2 *yellow* *MFS alarms* ** ** *2* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *up* ** *20.1/30* ** ** Tylan 9-Poly *up* ** *27/30* ** ** Tylan 10-Nitride *up* ** *19.99/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *12.99/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *down* *Broken tube* ** ** *1* Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *testing* ** ** ** AMAT Epi *yellow* *running* ** ** ** TEL Spa *up* * * Burn Box *up* ** ** ** ** Ebeam *down* *computer issues* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 513 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Dec 9 06:18:55 2010 From: tberg at stanford.edu (Ted Berg) Date: Thu, 09 Dec 2010 06:18:55 -0800 Subject: Diffusion Morning Report 12/09/10 Message-ID: <4D00E54F.5080204@stanford.edu> Good Morning All, Looking good this morning. Thermco Poly1 is going back together. Tylan 2 had MFS alarms as did LTO. Tylan 1 MFS display is bad but it is functional. Ebeam still having issues. No other problems at this time. Date: 12/8/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *mfs 460 display is gone but flows are OK* ** ** *3* Tylan 2 *yellow* *MFS alarms* ** ** *2* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *up* ** *20.1/30* ** ** Tylan 9-Poly *up* ** *27/30* ** ** Tylan 10-Nitride *up* ** *19.99/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *13.12/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *down* *Broken tube* ** ** *1* Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *testing* ** ** ** AMAT Epi *yellow* *running* ** ** ** TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *computer issues* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 513 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Dec 10 06:17:59 2010 From: tberg at stanford.edu (Ted Berg) Date: Fri, 10 Dec 2010 06:17:59 -0800 Subject: Diffusion Morning Report 12/10/10 Message-ID: <4D023697.9080207@stanford.edu> Good Morning All, Looking good this morning. Thermco Poly 1 is back together and coated, needs a test. Epi is down for over pressure issues. Tylan LTO had mfs issues. Tylan 1 mfs display is bad but working OK. Ebeam still has issues. No other problems at this time. Date: 12/10/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *mfs 460 display is gone but flows are OK* ** ** *4* Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *up* ** *20.1/30* ** ** Tylan 9-Poly *up* ** *27.15/30* ** ** Tylan 10-Nitride *up* ** *19.99/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *13.97/30* ** *3* Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *down* *needs test after rebuild* ** ** *1* Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *waiting TC* ** ** ** Thermco bpsg *yellow* *testing* ** ** ** AMAT Epi *down* *over pressure* ** ** *2* TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *computer issues* ** ** *5* ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 513 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Dec 13 07:52:00 2010 From: tberg at stanford.edu (Ted Berg) Date: Mon, 13 Dec 2010 07:52:00 -0800 Subject: Diffusion Morning Report 12/13/10 Message-ID: <4D064120.3070206@stanford.edu> Good Morning All, Looking good this morning. Tylan Poly is down for pull and clean. Tylan 1 had MFS issues. Tylan LTO has MFS alarms . Thermco Nitride is waiting a TC. Ebeam has issues. No other problems at this time. Date: 12/13/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *MFS 460 issues* ** ** *2* Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *up* ** *20.1/30* ** ** Tylan 9-Poly *down* *pull and clean* *0/30* ** *1* Tylan 10-Nitride *up* ** *19.99/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *13.97/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *waiting TC* ** ** *5* Thermco bpsg *yellow* *testing* ** ** ** AMAT Epi *yellow* *watch pressure* ** ** *3* TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *computer issues* ** ** *4* ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 513 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Dec 14 08:19:34 2010 From: tberg at stanford.edu (Ted Berg) Date: Tue, 14 Dec 2010 08:19:34 -0800 Subject: Diffusion Morning Report Message-ID: <4D079916.4020403@stanford.edu> Good Morning All, Looking good this morning. Tylan poly is back together and has been coated. Needs test. Tylan 1 and 2 are both having MFS issues-Ray is addressing them. Ebeam still has issues. Thermco nitride needs a new TC. Epi is running. Tylan LTO had MFS alarms. No other problems at this time. Date: 12/14/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *MFS 460 issues* ** ** *1* Tylan 2 *down* *mfs issues* ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *up* ** *20.1/30* ** ** Tylan 9-Poly *down* *running coat will need test* *0/30* ** *2* Tylan 10-Nitride *up* ** *20.49/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *16.07/30* ** *3* Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *waiting TC* ** ** ** Thermco bpsg *yellow* *testing* ** ** ** AMAT Epi *yellow* *watch pressure* ** ** *4* TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *computer issues* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 513 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Dec 15 06:19:05 2010 From: tberg at stanford.edu (Ted Berg) Date: Wed, 15 Dec 2010 06:19:05 -0800 Subject: Diffusion Morning Report 12/15/10 Message-ID: <4D08CE59.60601@stanford.edu> Good Morning All, Looking good this morning . Tylans 1 and 2 still having MFS problems. Tylan LTO had MFS alarms. TC for Thermco Nitride is ordered. Epi is running. No other issues at this time. Date: 12/15/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *MFS 460 issues* ** ** *1* Tylan 2 *down* *mfs issues* ** ** *2* Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *up* ** *20.1/30* ** ** Tylan 9-Poly *up* ** *.11/30* ** ** Tylan 10-Nitride *up* ** *20.49/30* ** ** Tylan 11-LTO *yellow* *mfs alarms* *16.07/30* ** *4* Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *waiting TC-ordered* ** ** ** Thermco bpsg *yellow* *testing* ** ** ** AMAT Epi *yellow* *watch pressure* ** ** *3* TEL Spa *up* * * ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *computer issues* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 513 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... 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