Diffusion Morning Report 12/01/10

Ted Berg tberg at stanford.edu
Wed Dec 1 06:11:28 PST 2010


Good Morning All,
     Looking good this morning. Epi DCS is in bypass mode. Tylan LTO had 
MFS alarms. Ebeam has no beam. No other issues at this time.

> 					
> 	Date: 	12/1/10 	THICKNESS-Change at 		Priority
> Tube Name/Number 	Status 				
> Tylan 1 	*up* 	** 	** 	** 	**
> Tylan 2 	*up* 	** 	** 	** 	**
> Tylan 3 	*up* 	** 	** 	** 	**
> Tylan 4 	*up* 	** 	** 	** 	**
> Tylan 5-BBr3 	*up* 	** 	** 	** 	**
> Tylan 6-POCl3 	*up* 	** 	** 	** 	**
> Tylan 7-TEOS2 	*up* 	** 	*.25/30* 	** 	**
> Tylan 8-SiGe 	*up* 	** 	*20.1/30* 	** 	**
> Tylan 9-Poly 	*up* 	** 	*27/30* 	** 	**
> Tylan 10-Nitride 	*up* 	** 	*19.79/30* 	** 	**
> Tylan 11-LTO 	*yellow* 	*mfs alarms* 	*10.18/30* 	** 	*1*
> Tylan 12-FGA 	*up* 	*
> * 	** 	** 	**
> Thermco 1 	*up* 	** 	** 	** 	**
> Thermco 2 	*up* 	** 	** 	** 	**
> Thermco 3 	*future* 	** 	** 	** 	**
> Thermco4 	*future* 	** 	** 	** 	**
> Thermco Poly1 	*up* 	** 	** 	** 	**
> Thermco Poly2 	*up* 	** 	** 	** 	**
> Thermco Nitride1 	*up* 	** 	** 	** 	**
> Thermco bpsg 	*yellow* 	*testing* 	** 	** 	*2*
> AMAT Epi 	*yellow* 	*DCS issue* 	** 	** 	**
> TEL Spa 	*up* 	** 	** 	** 	**
> Burn Box 	*up* 	** 	** 	** 	**
> Ebeam 	*down* 	*computer issues* 	** 	** 	*3*
> ZYGO 	*up* 	*
> * 	** 	** 	**
> FGA2 	up 				
> SiH4 for furnaces 		A on line 513 PSI 	changeover working well		
>

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