Diffusion Morning Report

Ted Berg tberg at stanford.edu
Tue Dec 14 08:19:34 PST 2010


Good Morning All,
     Looking good this morning. Tylan poly is back together and has been 
coated. Needs test. Tylan 1 and 2 are both having MFS issues-Ray is 
addressing them. Ebeam still has issues.
Thermco nitride needs a new TC. Epi is running. Tylan LTO had MFS 
alarms. No other problems at this time.

					
	Date: 	12/14/10 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*down* 	*MFS 460 issues* 	** 	** 	*1*
Tylan 2 	*down* 	*mfs issues* 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*.25/30* 	** 	**
Tylan 8-SiGe 	*up* 	** 	*20.1/30* 	** 	**
Tylan 9-Poly 	*down* 	*running coat will need test* 	*0/30* 	** 	*2*
Tylan 10-Nitride 	*up* 	** 	*20.49/30* 	** 	**
Tylan 11-LTO 	*yellow* 	*mfs alarms* 	*16.07/30* 	** 	*3*
Tylan 12-FGA 	*up* 	*
* 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	** 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*down* 	*waiting TC* 	** 	** 	**
Thermco bpsg 	*yellow* 	*testing* 	** 	** 	**
AMAT Epi 	*yellow* 	*watch pressure* 	** 	** 	*4*
TEL Spa 	*up* 	*
* 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*computer issues* 	** 	** 	**
ZYGO 	*up* 	*
* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*A on line 513 PSI* 	*changeover working 
well* 	** 	**


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