From tberg at stanford.edu Mon Feb 1 06:39:31 2010 From: tberg at stanford.edu (Ted Berg) Date: Mon, 01 Feb 2010 06:39:31 -0800 Subject: Diffusion Morning Report 02/01/10 Message-ID: <4B66E7A3.6040606@stanford.edu> Good Morning All, Looking good this morning . LTO is in clean process. Thermco Poly 2 SiH4 mfc replaced. Several LPs need testing. No other issues at this time. Date: 2/1/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .257/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 7.46/30 Tylan 10-Nitride up 26.3/30 Tylan 11-LTO down down for pull and clean 0/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow SiH4 mfc replaced Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 403 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 2 06:11:52 2010 From: tberg at stanford.edu (Ted Berg) Date: Tue, 02 Feb 2010 06:11:52 -0800 Subject: Diffusion Morning Report 02/02/10 Message-ID: <4B6832A8.6070002@stanford.edu> Good Morning All, Looking good this morning. Still several LPs that need testing. AS200 should be back today hopefully. No other issues at this time. Date: 2/2/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .257/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 7.46/30 Tylan 10-Nitride up 26.4/30 Tylan 11-LTO yellow several runs run after p&c 1.1/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow SiH4 mfc replaced Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 403 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 3 06:09:36 2010 From: tberg at stanford.edu (Ted Berg) Date: Wed, 03 Feb 2010 06:09:36 -0800 Subject: Diffusion Morning Report 02/03/10 Message-ID: <4B6983A0.8080509@stanford.edu> Good Morning All, Looking good this morning. Thermco LTO testing for qual. Still acouple of LP need testing. No other issues at this time. Date: 2/3/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .757/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 8.61/30 Tylan 10-Nitride up 26.4/30 Tylan 11-LTO up 2.47/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 388 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 4 06:38:38 2010 From: tberg at stanford.edu (Ted Berg) Date: Thu, 04 Feb 2010 06:38:38 -0800 Subject: Diffusion Morning Report 02/04/10 Message-ID: <4B6ADBEE.4050508@stanford.edu> Good Morning All, Looking good this morning. Tylan 6 CB tripped checking it out. Several LP still need testing. No other issues at this time. Date: 2/4/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 down CB Tripped Tylan 7-TEOS2 up .757/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 8.61/30 Tylan 10-Nitride up 27.5/30 Tylan 11-LTO up 2.47/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 388 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Feb 5 06:24:46 2010 From: tberg at stanford.edu (Ted Berg) Date: Fri, 05 Feb 2010 06:24:46 -0800 Subject: Diffusion Morning Report 02/05/10 Message-ID: <4B6C2A2E.2010707@stanford.edu> Good Morning All, Looking good this morning. Tylan 5 is waiting for an SCR fan borrowed for Tylan 6. Tylan nitride had an MFS alarm and is going down for pull and clean on Tuesday. Several LPs still testing. Burn box clean this morning. No other issues at this time. Date: 2/5/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 down waiting for a fan Tylan 6-POCl3 up Tylan 7-TEOS2 up .757/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 8.61/30 Tylan 10-Nitride up going down on Tuesday for pull and clean 29.02/30 Tylan 11-LTO up 2.47/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 367 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Feb 8 06:25:50 2010 From: tberg at stanford.edu (Ted Berg) Date: Mon, 08 Feb 2010 06:25:50 -0800 Subject: Diffusion Morningh Report 02/08/10 Message-ID: <4B701EEE.1090000@stanford.edu> Good Morning All, Looking good this morning. BBR3 needs SCR fan. Tylan nitride going down tomorrow for pull and clean. LTO had low or no dep-looking into it.. Several LPs still need testing. No other issues at this time. Date: 2/8/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 down waiting for a fan Tylan 6-POCl3 up Tylan 7-TEOS2 up .757/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 8.61/30 Tylan 10-Nitride up going down on Tuesday for pull and clean 29.19/30 Tylan 11-LTO yellow low or no dep 8.76/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 347 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 9 06:45:03 2010 From: tberg at stanford.edu (Ted Berg) Date: Tue, 09 Feb 2010 06:45:03 -0800 Subject: Diffusion Morning Report Message-ID: <4B7174EF.8000207@stanford.edu> Good Morning All, Looking good this morning. Tylan nitride down for pull and clean. Several LPs need tests. No other issues at this time. Date: 2/9/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .757/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 8.61/30 Tylan 10-Nitride down Scheduled pull and clean 0/30 Tylan 11-LTO up 8.78/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 327 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 10 06:09:07 2010 From: tberg at stanford.edu (Ted Berg) Date: Wed, 10 Feb 2010 06:09:07 -0800 Subject: Diffusion Morning Report 02/10/10 Message-ID: <4B72BE03.3050000@stanford.edu> Good Morning All, Looking good this morning. Nitride pull and clean in progress. Tylan LTO has a broken TC sheath. Several LPs still need testing. No other issues at this time. Date: 2/10/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .757/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 8.61/30 Tylan 10-Nitride down Scheduled pull and clean 0/30 Tylan 11-LTO down Broken cantilever sheath 10.38/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 298 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 11 06:35:00 2010 From: tberg at stanford.edu (Ted Berg) Date: Thu, 11 Feb 2010 06:35:00 -0800 Subject: Diffusion Morning Report 02/11/10 Message-ID: <4B741594.4060301@stanford.edu> Good Morning All, looking good this morning Nitride is coming back up after pull and clean. Several LP need testing. No other issues at this time. Date: 2/11/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .757/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 9.56/30 Tylan 10-Nitride down Scheduled pull and clean 0/30 Tylan 11-LTO up 10.65/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 298 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 11 06:43:56 2010 From: tberg at stanford.edu (Ted Berg) Date: Thu, 11 Feb 2010 06:43:56 -0800 Subject: Diffusion Morning Report 02/11/10 Message-ID: <4B7417AC.3090104@stanford.edu> Good Morning All, looking good this morning Nitride is coming back up after pull and clean. Several LP need testing. No other issues at this time. Date: 2/11/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .757/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 9.56/30 Tylan 10-Nitride down Scheduled pull and clean 0/30 Tylan 11-LTO up 10.65/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 298 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Feb 12 06:59:59 2010 From: tberg at stanford.edu (Ted Berg) Date: Fri, 12 Feb 2010 06:59:59 -0800 Subject: Diffusion Morning Report 02/12/10 Message-ID: <4B756CEF.6070207@stanford.edu> Good Morning All, Looking good this morning. Tylan LTO had no dep-looking into it. Nitride is back up. Several LPs still need tests Burn box clean this morning. No other issues at this time. Date: 2/12/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .757/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 10.11/30 Tylan 10-Nitride up .13/30 Tylan 11-LTO down no dep 11.36/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 298 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Mon Feb 22 08:15:09 2010 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 22 Feb 2010 08:15:09 -0800 Subject: Diffusion Morning Report Message-ID: <4B82AD8D.3000808@stanford.edu> Good Morning All, Looking good this morning. Ted is out this morning. Once again several LP need testing. TEOS has pressure issues. FGA2 changed forming to the right side. Hitachi here for PM today. AS200 is out again for repair. No other issues at this time. * * * * * * * * * * Date: *2/19/10* *THICKNESS-Change at* * * * * Tube Name/Number Status * * * * * * * * Tylan 1 *up* * * * * * * * * Tylan 2 *up* * * * * * * * * Tylan 3 *up* * * * * * * * * Tylan 4 *up* * * * * * * * * Tylan 5-BBr3 *up* * * * * * * * * Tylan 6-POCl3 *up* * * * * * * * * Tylan 7-TEOS2 *up* * * *1.316/30* * * * * Tylan 8-SiGe *yellow* *needs test* *7.45/30* * * * * Tylan 9-Poly *up* * * *12.02/30* * * * * Tylan 10-Nitride *up* * * *2.77/30* * * * * Tylan 11-LTO *yellow* *uniformity issues ?* *20.42/30* * * * * Tylan 12-FGA *up* * * * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *up* * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *yellow* *uniformity issues ?* * * * * * * Thermco bpsg *future* *testing for qual* * * * * * * TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *up* * * * * * * * * ZYGO *up* * * * * * * * * FGA2 *up* * * * * * * * * SiH4 for furnaces * * *A on line 241 psi* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Mon Feb 22 08:17:07 2010 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 22 Feb 2010 08:17:07 -0800 Subject: Diffusion Morning Report with correct date Message-ID: <4B82AE03.7080100@stanford.edu> Good Morning All, Looking good this morning. Ted is out this morning. Once again several LP need testing. TEOS has pressure issues. FGA2 changed forming to the right side. Hitachi here for PM today. AS200 is out again for repair. No other issues at this time. * * * * * * * * * * Date: *2/22/10* *THICKNESS-Change at* * * * * Tube Name/Number Status * * * * * * * * Tylan 1 *up* * * * * * * * * Tylan 2 *up* * * * * * * * * Tylan 3 *up* * * * * * * * * Tylan 4 *up* * * * * * * * * Tylan 5-BBr3 *up* * * * * * * * * Tylan 6-POCl3 *up* * * * * * * * * Tylan 7-TEOS2 *up* * * *1.316/30* * * * * Tylan 8-SiGe *yellow* *needs test* *7.45/30* * * * * Tylan 9-Poly *up* * * *12.02/30* * * * * Tylan 10-Nitride *up* * * *2.77/30* * * * * Tylan 11-LTO *yellow* *uniformity issues ?* *20.42/30* * * * * Tylan 12-FGA *up* * * * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *up* * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *yellow* *uniformity issues ?* * * * * * * Thermco bpsg *future* *testing for qual* * * * * * * TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *up* * * * * * * * * ZYGO *up* * * * * * * * * FGA2 *up* * * * * * * * * SiH4 for furnaces * * *A on line 241 psi* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Tue Feb 23 06:57:28 2010 From: rseymour at stanford.edu (Ray Seymour) Date: Tue, 23 Feb 2010 06:57:28 -0800 Subject: Diffusion Morning Report Message-ID: <4B83ECD8.5060409@stanford.edu> Good Morning All, Looking good this morning. Ted is out this morning. SIGE was ran/tested yesterday. Thermcopoly1 has boat issues. TEOS has pressure issues. FGA2 changed forming to the right side. Hitachi here for PM today. AS200 is out again for repair. No other issues at this time. * * * * * * * * * * Date: *2/23/10* *THICKNESS-Change at* * * * * Tube Name/Number Status * * * * * * * * Tylan 1 *up* * * * * * * * * Tylan 2 *up* * * * * * * * * Tylan 3 *up* * * * * * * * * Tylan 4 *up* * * * * * * * * Tylan 5-BBr3 *up* * * * * * * * * Tylan 6-POCl3 *up* * * * * * * * * Tylan 7-TEOS2 *up* * * *1.316/30* * * * * Tylan 8-SiGe *yellow* *8.3/30* * * * * Tylan 9-Poly *up* * * *12.77/30* * * * * Tylan 10-Nitride *up* * * *2.90/30* * * * * Tylan 11-LTO *yellow* * * *20.77/30* * * * * Tylan 12-FGA *up* * * * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *down * * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *yellow* *uniformity issues ?* * * * * * * Thermco bpsg *future* *testing for qual* * * * * * * TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *up* * * * * * * * * ZYGO *up* * * * * * * * * FGA2 *up* * * * * * * * * SiH4 for furnaces * * *A on line 241 psi* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Feb 24 07:40:59 2010 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 24 Feb 2010 07:40:59 -0800 Subject: Diffusion Morning Report Message-ID: <4B85488B.2060000@stanford.edu> Good Morning All, Looking good this morning. Ted is out this morning. Thermcopoly1 has high base pressure. TEOS has pressure issues. AS200 is out again for repair. No other issues at this time. * * * * * * * * * * Date: *2/24/10* *THICKNESS-Change at* * * * * Tube Name/Number Status * * * * * * * * Tylan 1 *up* * * * * * * * * Tylan 2 *up* * * * * * * * * Tylan 3 *up* * * * * * * * * Tylan 4 *up* * * * * * * * * Tylan 5-BBr3 *up* * * * * * * * * Tylan 6-POCl3 *up* * * * * * * * * Tylan 7-TEOS2 *down * * high process pres* *1.316/30* * * * * Tylan 8-SiGe *up * *8.3/30* * * * * Tylan 9-Poly *up* * * *12.77/30* * * * * Tylan 10-Nitride *up* * * *2.90/30* * * * * Tylan 11-LTO *yellow* * * *22.38/30* * * * * Tylan 12-FGA *up* * * * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *down * * high base pressure* * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *yellow* *uniformity issues ?* * * * * * * Thermco bpsg *future* *testing for qual* * * * * * * TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *up* * * * * * * * * ZYGO *up* * * * * * * * * FGA2 *up* * * * * * * * * SiH4 for furnaces * * *A on line 241 psi* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... 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