From tberg at stanford.edu Tue Jan 5 06:45:44 2010 From: tberg at stanford.edu (Ted Berg) Date: Tue, 05 Jan 2010 06:45:44 -0800 Subject: Diffusion Morning Report 01/05/10 Message-ID: <4B435098.6080108@stanford.edu> Good Morning All, Looking OK this morning. Most stuff is back up Still waiting test results for several LPs . Thermco LPs down for burn box work. Ebeam still has computer issues. No othe major issues at this time. Date: 1/5/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down tube change 0/30 Tylan 8-SiGe up 7.45/30 Tylan 9-Poly up 4.84/30 Tylan 10-Nitride down Waiting test results 20.3/30 Tylan 11-LTO down Waiting test results 16.11/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 down Burn box Thermco Poly2 down Burn box Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 520 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 6 07:55:59 2010 From: tberg at stanford.edu (Ted Berg) Date: Wed, 06 Jan 2010 07:55:59 -0800 Subject: Diffusion Morning Report 01/06/10 Message-ID: <4B44B28F.2040207@stanford.edu> Good Morning All, Coming back up somewhat slowly. TEOS, Tylan nitride and Tylan LTO testing. Thermco LTO testing. Thermco Nitride uniformity issue. Ebeam still has computer issues. No other issues at this time. Date: 1/6/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow needs test 0/30 Tylan 8-SiGe up 7.45/30 Tylan 9-Poly up 12.91/30 Tylan 10-Nitride down Waiting test results 20.3/30 Tylan 11-LTO down Waiting test results 16.67/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 520 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 7 06:21:01 2010 From: tberg at stanford.edu (Ted Berg) Date: Thu, 07 Jan 2010 06:21:01 -0800 Subject: Diffusion Morning Report 1/07/10 Message-ID: <4B45EDCD.1080400@stanford.edu> Good Morning All, Well most of the tools are up at least to yellow. Some uniformity/dep rate issues with the furnaces. Ebeam still has computer issues. no other problems at this time. Date: 1/7/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .98/30 Tylan 8-SiGe up 7.45/30 Tylan 9-Poly up 12.91/30 Tylan 10-Nitride yellow uniformity issues ? 20.74/30 Tylan 11-LTO yellow high dep rate 17.27/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 520 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 8 06:17:32 2010 From: tberg at stanford.edu (Ted Berg) Date: Fri, 08 Jan 2010 06:17:32 -0800 Subject: Diffusion Morning Report 01/08/10 Message-ID: <4B473E7C.6010103@stanford.edu> Good Morning All, Looking good this morning Everythging is back up at least to yellow. Burn box clean this morning. Ebeam still has computer issues. No other problems at this time. Date: 1/8/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .98/30 Tylan 8-SiGe up 7.45/30 Tylan 9-Poly up 12.91/30 Tylan 10-Nitride up 21.49/30 Tylan 11-LTO yellow dep rate 20/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 520 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jan 11 06:33:00 2010 From: tberg at stanford.edu (Ted Berg) Date: Mon, 11 Jan 2010 06:33:00 -0800 Subject: Diffusion Morning Report 01/11/10 Message-ID: <4B4B369C.8050401@stanford.edu> Good MOrning All, Looking good this morning. Tylan LTO has a high dep rate. Thermco Nitride 1 has some non uniformity. Thermco LTO testing for Qual. Ebeam still has some computer issues. No other problems at this time. Date: 1/11/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .98/30 Tylan 8-SiGe up 7.45/30 Tylan 9-Poly up 12.96/30 Tylan 10-Nitride up 21.49/30 Tylan 11-LTO yellow dep rate high 20/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 520 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jan 12 06:17:08 2010 From: tberg at stanford.edu (Ted Berg) Date: Tue, 12 Jan 2010 06:17:08 -0800 Subject: Diffusion Morning Report 01/12/10 Message-ID: <4B4C8464.2020401@stanford.edu> Good Morning All, Looking good this morning. LTO slightly high dep rate. Thermco Nitride uniformity. Thermco LTO testing. Ebeam computer still has computer issues. No other problems at this time. Date: 1/12/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .98/30 Tylan 8-SiGe up 7.45/30 Tylan 9-Poly up 12.96/30 Tylan 10-Nitride up 22.49/30 Tylan 11-LTO yellow dep rate high 20/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 520 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 13 06:18:52 2010 From: tberg at stanford.edu (Ted Berg) Date: Wed, 13 Jan 2010 06:18:52 -0800 Subject: Diffusion Morning Report 01/13/09 Message-ID: <4B4DD64C.70809@stanford.edu> Good Morning All, Looking good this morning. LTO Dep rate a bit high. Thermco Nitride has uniformity issues.Thermco LTO testing for Qual. Ebeam has computer issues.4160 has alignment issues. No other problems at this time. Date: 1/13/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .98/30 Tylan 8-SiGe up 7.45/30 Tylan 9-Poly up 12.96/30 Tylan 10-Nitride up 22.49/30 Tylan 11-LTO yellow dep rate high 21.52/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 520 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 14 06:48:50 2010 From: tberg at stanford.edu (Ted Berg) Date: Thu, 14 Jan 2010 06:48:50 -0800 Subject: Diffusion Morning Report 01/14/10 Message-ID: <4B4F2ED2.60109@stanford.edu> Good Morning All, Looking good this morning. TYlan LTO has slightly high dep rate. Thermco Nitride has poor uniformity. Thermco LTO testing for qual. Tylan 5 had Hi O2 leak. Ebeam still has computer comm issues. No other issues at this time. Date: 1/14/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 yellow O2 leak Tylan 6-POCl3 up Tylan 7-TEOS2 up 1.44/30 Tylan 8-SiGe up 7.45/30 Tylan 9-Poly up 12.96/30 Tylan 10-Nitride up 22.49/30 Tylan 11-LTO yellow dep rate high 21.92/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 520 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 15 06:19:17 2010 From: tberg at stanford.edu (Ted Berg) Date: Fri, 15 Jan 2010 06:19:17 -0800 Subject: Diffusion Morning Report 01/15/09 Message-ID: <4B507965.80907@stanford.edu> Good Morning All, Looking good this morning. Tylan LTO has slightly high dep rate. Thermco Nitride has poor uniformity. THermco LTO testing. Ebeam has computer issues. Burn box clean this morning. No other issues. Date: 1/15/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 1.44/30 Tylan 8-SiGe up 7.45/30 Tylan 9-Poly up 5.96/30 Tylan 10-Nitride up 22.49/30 Tylan 11-LTO yellow dep rate high 21.92/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 520 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 20 07:04:16 2010 From: tberg at stanford.edu (Ted Berg) Date: Wed, 20 Jan 2010 07:04:16 -0800 Subject: Diffusion Morning Report 01/20/10 Message-ID: <4B571B70.9090909@stanford.edu> Good Morning All, Looking good this morning . Most of the tools are back up LPs are waiting testing. Ebeam is coming back up. No other issues at this time. Date: 1//2010 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 1.44/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly yellow needs test 6.16/30 Tylan 10-Nitride yellow needs test 22.55/30 Tylan 11-LTO up 24.06/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow needs test Thermco Poly2 yellow needs test Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam down power fail ZYGO up FGA2 up SiH4 for furnaces A on line 520 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 21 06:53:21 2010 From: tberg at stanford.edu (Ted Berg) Date: Thu, 21 Jan 2010 06:53:21 -0800 Subject: Diffusion Morning Report 01/21/10 Message-ID: <4B586A61.9070608@stanford.edu> Good Morning All, Looking good this morning. A couple of LPs still need tests Ebeam still having computer comm issues . No othe problems at this time. Date: 1/21/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .257/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 6.31/30 Tylan 10-Nitride up 23.02/30 Tylan 11-LTO up 24.56/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow needs test Thermco Poly2 yellow needs test Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow Computer comm issues ZYGO up FGA2 up SiH4 for furnaces A on line 466 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 22 06:32:22 2010 From: tberg at stanford.edu (Ted Berg) Date: Fri, 22 Jan 2010 06:32:22 -0800 Subject: Diffusion Morning Report 01/22/2010 Message-ID: <4B59B6F6.1000503@stanford.edu> Good Morning All, Looking good this morning. Several LPs still need tests after power fail. Burn box clean this morning. Thermco LTO testing.Ebeam Comm issue resolved. No other issues at this time Date: 1/22/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .257/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 4.81/30 Tylan 10-Nitride up 25.8/30 Tylan 11-LTO up 25.86/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow needs test Thermco Poly2 yellow needs test Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow ZYGO up FGA2 up SiH4 for furnaces A on line 455 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jan 25 06:22:38 2010 From: tberg at stanford.edu (Ted Berg) Date: Mon, 25 Jan 2010 06:22:38 -0800 Subject: Diffusion Morning Report 01/25/09 Message-ID: <4B5DA92E.5030203@stanford.edu> Good MOrning all, Looking good this morning. Still a few LP that need testing. Thermco LTO testing for qual. Ebeam comm issues resolved . No other problems at this time. Date: 1/25/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .257/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 6.61/30 Tylan 10-Nitride up 24.5/30 Tylan 11-LTO up 26.94/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow needs test Thermco Poly2 yellow needs test Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow ZYGO up FGA2 up SiH4 for furnaces A on line 430 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jan 26 06:08:45 2010 From: tberg at stanford.edu (Ted Berg) Date: Tue, 26 Jan 2010 06:08:45 -0800 Subject: Diffusion Morning Report 01/26/10 Message-ID: <4B5EF76D.6090403@stanford.edu> Good MOrning All, Looking good this morning. Several LPs still need tests. Thermco LTO testing? No other issues at this time. Date: 1/26/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .257/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 6.61/30 Tylan 10-Nitride up 25.54/30 Tylan 11-LTO up going down on Fri for pull and clean 28.59/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow needs test Thermco Poly2 yellow needs test Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 430 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 27 06:13:41 2010 From: tberg at stanford.edu (Ted Berg) Date: Wed, 27 Jan 2010 06:13:41 -0800 Subject: Diffusion Morning Report 01/27/10 Message-ID: <4B604A15.2020203@stanford.edu> Good Morning All, Looking good this morning. SEM 800 is having Vacuum issues. Some LPs still need testing and Thermco LTO is testing for Qual. No other issues at this time. Date: 1/27/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .257/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 6.61/30 Tylan 10-Nitride up 25.54/30 Tylan 11-LTO up going down on Fri for pull and clean 28.59/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow needs test Thermco Poly2 yellow needs test Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 412 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 28 06:31:11 2010 From: tberg at stanford.edu (Ted Berg) Date: Thu, 28 Jan 2010 06:31:11 -0800 Subject: Diffusion Morning Report 01/28/10 Message-ID: <4B619FAF.8010904@stanford.edu> Good Morning All, All gases are currently down after a problem in CISx. Hopefully issue will be resolved soon and gases restored. Looking into dep rate differences between Thermco Poly 1 and 2. Thermco LTO testing. Sem Hitachi has vacuum issues, FS here today. LTO going down tomorrow for pull and clean. No other issues at this time. Date: 1/28/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .257/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 7.36/30 Tylan 10-Nitride up 24.54/30 Tylan 11-LTO up going down on Fri for pull and clean 28.59/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow needs test Thermco Poly2 down checking SiH4 mfc Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 412 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 29 06:42:36 2010 From: tberg at stanford.edu (Ted Berg) Date: Fri, 29 Jan 2010 06:42:36 -0800 Subject: Diffusion Morning Report 01/29/10 Message-ID: <4B62F3DC.4010100@stanford.edu> Good Morning All, Looking good this morning. LTO is down for pull and clean. Several LPs still need tests. Thermco Poly 2 replacing SiH4 MFC. No other issues at this time. Date: 1/29/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .257/30 Tylan 8-SiGe yellow needs test 7.45/30 Tylan 9-Poly up 7.36/30 Tylan 10-Nitride up 24.54/30 Tylan 11-LTO down going down on Fri for pull and clean 0/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 down checking SiH4 mfc Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 412 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: