Diffusion Morning Report 1/07/10

Ted Berg tberg at stanford.edu
Thu Jan 7 06:21:01 PST 2010


Good Morning All,
    Well most of the tools are up at least to yellow. Some 
uniformity/dep rate issues with the furnaces. Ebeam still has computer 
issues. no other problems at this time.

  	  	  	  	  	 
  	Date: 	1/7/10 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	.98/30 	  	 
Tylan 8-SiGe 	up 	  	7.45/30 	  	 
Tylan 9-Poly 	up 	  	12.91/30 	  	 
Tylan 10-Nitride 	yellow 	uniformity issues ? 	20.74/30 	  	 
Tylan 11-LTO 	yellow 	high dep rate 	17.27/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	  	  	  	 
Thermco Nitride1 	yellow 	uniformity issues ? 	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	yellow 	computer issues 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 520 psi 	 changeover working well  	  	 


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