Diffusion Morning Report 01/12/10

Ted Berg tberg at stanford.edu
Tue Jan 12 06:17:08 PST 2010


Good Morning All,
    Looking good this morning. LTO slightly high dep rate. Thermco 
Nitride uniformity. Thermco LTO testing. Ebeam computer still has 
computer issues. No other problems at this time.

  	  	  	  	  	 
  	Date: 	1/12/10 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	.98/30 	  	 
Tylan 8-SiGe 	up 	  	7.45/30 	  	 
Tylan 9-Poly 	up 	  	12.96/30 	  	 
Tylan 10-Nitride 	up 	  	22.49/30 	  	 
Tylan 11-LTO 	yellow 	dep rate high 	20/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	  	  	  	 
Thermco Nitride1 	yellow 	uniformity issues ? 	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	yellow 	computer issues 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 520 psi 	 changeover working well  	  	 


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