Diffusion Morning Report 01/14/10

Ted Berg tberg at stanford.edu
Thu Jan 14 06:48:50 PST 2010


Good Morning All,
    Looking good this morning. TYlan LTO has slightly high dep rate. 
Thermco Nitride has poor uniformity. Thermco LTO testing for qual. Tylan 
5 had Hi O2 leak. Ebeam still has computer comm issues. No other issues 
at this time.

  	  	  	  	  	 
  	Date: 	1/14/10 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	yellow 	O2 leak 	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	1.44/30 	  	 
Tylan 8-SiGe 	up 	  	7.45/30 	  	 
Tylan 9-Poly 	up 	  	12.96/30 	  	 
Tylan 10-Nitride 	up 	  	22.49/30 	  	 
Tylan 11-LTO 	yellow 	dep rate high 	21.92/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	  	  	  	 
Thermco Nitride1 	yellow 	uniformity issues ? 	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	yellow 	computer issues 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 520 psi 	 changeover working well  	  	 


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