Diffusion Morning Report 01/25/09

Ted Berg tberg at stanford.edu
Mon Jan 25 06:22:38 PST 2010

Good MOrning all,
    Looking good this morning. Still a few LP that need testing. Thermco 
LTO testing for qual. Ebeam comm issues resolved . No other problems at 
this time.

  	Date: 	1/25/10 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	.257/30 	  	 
Tylan 8-SiGe 	yellow 	needs test 	7.45/30 	  	 
Tylan 9-Poly 	up 	  	6.61/30 	  	 
Tylan 10-Nitride 	up 	  	24.5/30 	  	 
Tylan 11-LTO 	up 	  	26.94/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	yellow 	needs test 	  	  	 
Thermco Poly2 	yellow 	needs test 	  	  	 
Thermco Nitride1 	yellow 	uniformity issues ? 	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	yellow 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 430 psi 	 changeover working well  	  	 

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20100125/8f0f32ba/attachment.html>

More information about the diffusion mailing list