Diffusion Morning Report 01/27/10

Ted Berg tberg at stanford.edu
Wed Jan 27 06:13:41 PST 2010

Good Morning All,
    Looking good this morning. SEM 800 is having Vacuum issues. Some LPs 
still need testing and Thermco LTO is testing for Qual. No other issues 
at this time.

  	Date: 	1/27/10 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	.257/30 	  	 
Tylan 8-SiGe 	yellow 	needs test 	7.45/30 	  	 
Tylan 9-Poly 	up 	  	6.61/30 	  	 
Tylan 10-Nitride 	up 	  	25.54/30 	  	 
Tylan 11-LTO 	up 	going down on Fri for pull and clean 	28.59/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	yellow 	needs test 	  	  	 
Thermco Poly2 	yellow 	needs test 	  	  	 
Thermco Nitride1 	yellow 	uniformity issues ? 	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 412 psi 	 changeover working well  	  	 

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