Diffusion Morning Report

Ray Seymour rseymour at stanford.edu
Tue Jun 29 06:28:59 PDT 2010


Morning all,
Ted is out today. Looking good this morning. Thermco LTO testing.  No 
other issues at this time.

  	  	  	  	  	 
  	Date: 	6/29/10 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*up* 	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*up* 	*
* 	* * 	* * 	* *
Tylan 6-POCl3 	*up* 	* * 	* * 	* * 	* *
Tylan 7-TEOS2 	*up* 	* * 	*5.17/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*16.4/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*21.98/30* 	* * 	* *
Tylan 10-Nitride 	*up* 	* * 	*13.1/30* 	* * 	* *
Tylan 11-LTO 	*up* 	* * 	*19.15/30* 	* * 	* *
Tylan 12-FGA 	*up* 	* * 	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*up* 	* * 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*yellow* 	*qual* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	*  * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	*replaced* 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*A on line 606 PSI* 	* changeover working 
well * 	* * 	* *

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