From rseymour at stanford.edu  Mon Mar  1 07:09:34 2010
From: rseymour at stanford.edu (Ray Seymour)
Date: Mon, 01 Mar 2010 07:09:34 -0800
Subject: Diffusion Morning Report
Message-ID: <4B8BD8AE.1080800@stanford.edu>

Good Morning All,
Looking good this morning. Ted is out this morning. Thermcopoly1 has 
high base pressure. Tylannitride has a door closure issue.No other 
issues at this time.


	

* *

	

* *

	

* *

	

* *

	

* *

 

	

Date:

	

*3/1/10*

	

*THICKNESS-Change at*

	

* *

	

* *

Tube Name/Number

	

Status

	

* *

	

* *

	

* *

	

* *

Tylan 1

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 2

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 3

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 4

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 5-BBr3

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 6-POCl3

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 7-TEOS2

	

*up
*

	

* *

	

*1.316/30*

	

* *

	

* *

Tylan 8-SiGe

	

*up
*

	
	

*8.34/30*

	

* *

	

* *

Tylan 9-Poly

	

*up*

	

* *

	

*14.84/30*

	

* *

	

* *

Tylan 10-Nitride

	

*up*

	

* *

	

*3.8/30*

	

* *

	

* *

Tylan 11-LTO

	

*yellow*

	

*
*

	

*23.96/30*

	

* *

	

* *

Tylan 12-FGA

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco 1

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco 2

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco 3

	

*future*

	

* *

	

* *

	

* *

	

* *

Thermco4

	

*future*

	

* *

	

* *

	

* *

	

* *

Thermco Poly1

	

*down
*

	

* high base pressure*

	

* *

	

* *

	

* *

Thermco Poly2

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco Nitride1

	

*yellow*

	

*uniformity issues ?*

	

* *

	

* *

	

* *

Thermco bpsg

	

*future*

	

*testing for qual*

	

* *

	

* *

	

* *

TEL Spa

	

*up*

	

* *

	

* *

	

* *

	

* *

Burn Box

	

*up*

	

* *

	

*  *

	

* *

	

* *

Ebeam

	

*up*

	

* *

	

* *

	

* *

	

* *

ZYGO

	

*up*

	

* *

	

* *

	

* *

	

* *

FGA2

	

*up*

	

* *

	

* *

	

* *

	

* *

SiH4 for furnaces

	

* *

	

*A on line 199 psi*

	

* changeover working well *

	

* *

	

* *

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From rseymour at stanford.edu  Tue Mar  2 07:11:33 2010
From: rseymour at stanford.edu (Ray Seymour)
Date: Tue, 02 Mar 2010 07:11:33 -0800
Subject: Diffusion Morning Report
Message-ID: <4B8D2AA5.4060205@stanford.edu>

Good Morning All,
Looking good this morning. Ted is out this morning. Thermcopoly1 has 
high base pressure. No other issues at this time.


	

* *

	

* *

	

* *

	

* *

	

* *

 

	

Date:

	

*3/2/10*

	

*THICKNESS-Change at*

	

* *

	

* *

Tube Name/Number

	

Status

	

* *

	

* *

	

* *

	

* *

Tylan 1

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 2

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 3

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 4

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 5-BBr3

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 6-POCl3

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 7-TEOS2

	

*up
*

	

* *

	

*1.316/30*

	

* *

	

* *

Tylan 8-SiGe

	

*up
*

	
	

*8.74/30*

	

* *

	

* *

Tylan 9-Poly

	

*up*

	

* *

	

*13.98/30*

	

* *

	

* *

Tylan 10-Nitride

	

*up*

	

* *

	

*3.8/30*

	

* *

	

* *

Tylan 11-LTO

	

*yellow*

	

*
*

	

*24.36/30*

	

* *

	

* *

Tylan 12-FGA

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco 1

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco 2

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco 3

	

*future*

	

* *

	

* *

	

* *

	

* *

Thermco4

	

*future*

	

* *

	

* *

	

* *

	

* *

Thermco Poly1

	

*down
*

	

* high base pressure*

	

* *

	

* *

	

* *

Thermco Poly2

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco Nitride1

	

*yellow*

	

*uniformity issues ?*

	

* *

	

* *

	

* *

Thermco bpsg

	

*future*

	

*testing for qual*

	

* *

	

* *

	

* *

TEL Spa

	

*up*

	

* *

	

* *

	

* *

	

* *

Burn Box

	

*up*

	

* *

	

*  *

	

* *

	

* *

Ebeam

	

*up*

	

* *

	

* *

	

* *

	

* *

ZYGO

	

*up*

	

* *

	

* *

	

* *

	

* *

FGA2

	

*up*

	

* *

	

* *

	

* *

	

* *

SiH4 for furnaces

	

* *

	

*A on line 199 psi*

	

* changeover working well *

	

* *

	

* *

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From rseymour at stanford.edu  Wed Mar  3 07:23:12 2010
From: rseymour at stanford.edu (Ray Seymour)
Date: Wed, 03 Mar 2010 07:23:12 -0800
Subject: Diffusion Morning Report
Message-ID: <4B8E7EE0.6090007@stanford.edu>

Good Morning All,
Looking good this morning. Ted is out this morning.  TEL has cooling 
issues. Tylan1 had H2 temp interlock alarm yesterday during March quals.


	

*
*

	

* *

	

* *

	

* *

	

* *

 

	

Date:

	

*3/3/10*

	

*THICKNESS-Change at*

	

* *

	

* *

Tube Name/Number

	

Status

	

* *

	

* *

	

* *

	

* *

Tylan 1

	

*problem
*

	

* H2 temp alarm*

	

* *

	

* *

	

* *

Tylan 2

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 3

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 4

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 5-BBr3

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 6-POCl3

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 7-TEOS2

	

*up*

	

* *

	

*1.316/30*

	

* *

	

* *

Tylan 8-SiGe

	

*up
*

	
	

*8.74/30*

	

* *

	

* *

Tylan 9-Poly

	

*up*

	

* *

	

*13.98/30*

	

* *

	

* *

Tylan 10-Nitride

	

*up*

	

* *

	

*3.8/30*

	

* *

	

* *

Tylan 11-LTO

	

*yellow*

	

*
*

	

*24.36/30*

	

* *

	

* *

Tylan 12-FGA

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco 1

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco 2

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco 3

	

*future*

	

* *

	

* *

	

* *

	

* *

Thermco4

	

*future*

	

* *

	

* *

	

* *

	

* *

Thermco Poly1

	

*down
*

	

* *

	

* *

	

* *

	

* *

Thermco Poly2

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco Nitride1

	

*yellow*

	

*uniformity issues ?*

	

* *

	

* *

	

* *

Thermco bpsg

	

*future*

	

*testing for qual*

	

* *

	

* *

	

* *

TEL Spa

	

*up*

	

* *

	

* *

	

* *

	

* *

Burn Box

	

*up*

	

* *

	

*  *

	

* *

	

* *

Ebeam

	

*up*

	

* *

	

* *

	

* *

	

* *

ZYGO

	

*up*

	

* *

	

* *

	

* *

	

* *

FGA2

	

*up*

	

* *

	

* *

	

* *

	

* *

SiH4 for furnaces

	

* *

	

*A on line 199 psi*

	

* changeover working well *

	

* *

	

* *

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From rseymour at stanford.edu  Thu Mar  4 07:22:54 2010
From: rseymour at stanford.edu (Ray Seymour)
Date: Thu, 04 Mar 2010 07:22:54 -0800
Subject: Diffusion Morning Report
Message-ID: <4B8FD04E.2090704@stanford.edu>

Good Morning All,
Looking good this morning. Ted is out this morning.  TEL has cooling 
issues. Tylan1 had H2 temp interlock alarm during March quals.Tylan 5 
getting high resistivity readings.


	

*
*

	

* *

	

* *

	

* *

	

* *

 

	

Date:

	

*3/4/10*

	

*THICKNESS-Change at*

	

* *

	

* *

Tube Name/Number

	

Status

	

* *

	

* *

	

* *

	

* *

Tylan 1

	

*problem
*

	

* H2 temp alarm*

	

* *

	

* *

	

* *

Tylan 2

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 3

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 4

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 5-BBr3

	

*problem
*

	

* doping  problems*

	

* *

	

* *

	

* *

Tylan 6-POCl3

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 7-TEOS2

	

*up*

	

* *

	

*1.316/30*

	

* *

	

* *

Tylan 8-SiGe

	

*up
*

	
	

*8.74/30*

	

* *

	

* *

Tylan 9-Poly

	

*up*

	

* *

	

*13.98/30*

	

* *

	

* *

Tylan 10-Nitride

	

*up*

	

* *

	

*3.8/30*

	

* *

	

* *

Tylan 11-LTO

	

*yellow*

	

*
*

	

*24.36/30*

	

* *

	

* *

Tylan 12-FGA

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco 1

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco 2

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco 3

	

*future*

	

* *

	

* *

	

* *

	

* *

Thermco4

	

*future*

	

* *

	

* *

	

* *

	

* *

Thermco Poly1

	

*down
*

	

* *

	

* *

	

* *

	

* *

Thermco Poly2

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco Nitride1

	

*yellow*

	

*uniformity issues ?*

	

* *

	

* *

	

* *

Thermco bpsg

	

*future*

	

*testing for qual*

	

* *

	

* *

	

* *

TEL Spa

	

*up*

	

* *

	

* *

	

* *

	

* *

Burn Box

	

*up*

	

* *

	

*  *

	

* *

	

* *

Ebeam

	

*up*

	

* *

	

* *

	

* *

	

* *

ZYGO

	

*up*

	

* *

	

* *

	

* *

	

* *

FGA2

	

*up*

	

* *

	

* *

	

* *

	

* *

SiH4 for furnaces

	

* *

	

*A on line 160 psi*

	

* changeover working well *

	

* *

	

* *

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From rseymour at stanford.edu  Fri Mar  5 07:09:08 2010
From: rseymour at stanford.edu (Ray Seymour)
Date: Fri, 05 Mar 2010 07:09:08 -0800
Subject: Diffusion Morning Report
Message-ID: <4B911E94.8050408@stanford.edu>

Good Morning All,
Looking good this morning. Ted is out this morning. TEL has cooling 
issues. LTO going down for a pull and clean on Tuesday

	

*
*

	

* *

	

* *

	

* *

	

* *

 

	

Date:

	

*3/5/10*

	

*THICKNESS-Change at*

	

* *

	

* *

Tube Name/Number

	

Status

	

* *

	

* *

	

* *

	

* *

Tylan 1

	

*up
*

	

*
*

	

* *

	

* *

	

* *

Tylan 2

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 3

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 4

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 5-BBr3

	

*up
*

	

*
*

	

* *

	

* *

	

* *

Tylan 6-POCl3

	

*up*

	

* *

	

* *

	

* *

	

* *

Tylan 7-TEOS2

	

*up*

	

* *

	

*1.316/30*

	

* *

	

* *

Tylan 8-SiGe

	

*up
*

	
	

*8.74/30*

	

* *

	

* *

Tylan 9-Poly

	

*up*

	

* *

	

*13.98/30*

	

* *

	

* *

Tylan 10-Nitride

	

*up*

	

* *

	

*3.8/30*

	

* *

	

* *

Tylan 11-LTO

	

*yellow*

	

*
*

	

*28.0/30*

	

* *

	

* *

Tylan 12-FGA

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco 1

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco 2

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco 3

	

*future*

	

* *

	

* *

	

* *

	

* *

Thermco4

	

*future*

	

* *

	

* *

	

* *

	

* *

Thermco Poly1

	

*up
*

	

* *

	

* *

	

* *

	

* *

Thermco Poly2

	

*up*

	

* *

	

* *

	

* *

	

* *

Thermco Nitride1

	

*yellow*

	

*uniformity issues ?*

	

* *

	

* *

	

* *

Thermco bpsg

	

*future*

	

*testing for qual*

	

* *

	

* *

	

* *

TEL Spa

	

*up*

	

* *

	

* *

	

* *

	

* *

Burn Box

	

*up*

	

* *

	

*  *

	

* *

	

* *

Ebeam

	

*up*

	

* *

	

* *

	

* *

	

* *

ZYGO

	

*up*

	

* *

	

* *

	

* *

	

* *

FGA2

	

*up*

	

* *

	

* *

	

* *

	

* *

SiH4 for furnaces

	

* *

	

*A on line 160 psi*

	

* changeover working well *

	

* *

	

* *

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From rseymour at stanford.edu  Tue Mar 23 07:22:37 2010
From: rseymour at stanford.edu (Ray Seymour)
Date: Tue, 23 Mar 2010 07:22:37 -0700
Subject: Diffusion Morning Report
Message-ID: <4BA8CEAD.6080504@stanford.edu>

Morning All, Ted is out today. Sige has a pumping problem and Tube 5 has 
loader alignment issues. All else is ok.

  	  	  	  	  	 
  	Date: 	3/23/10 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*up* 	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*down* 	*Loader issues
* 	* * 	* * 	* *
Tylan 6-POCl3 	*up* 	* * 	* * 	* * 	* *
Tylan 7-TEOS2 	*up* 	* * 	*1.428/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* Pumping issues
* 	*9.69/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*14.63/30* 	* * 	* *
Tylan 10-Nitride 	*up* 	* * 	*6.62/30* 	* * 	* *
Tylan 11-LTO 	*up* 	* * 	*1.16/30* 	* * 	* *
Tylan 12-FGA 	*up* 	* * 	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*yellow* 	*bad PH3 mfc-no phos deps* 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*future* 	*testing for qual* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	*  * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*B on line 50 psi* 	* changeover working 
well * 	* * 	* *

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From rseymour at stanford.edu  Wed Mar 24 08:05:31 2010
From: rseymour at stanford.edu (Ray Seymour)
Date: Wed, 24 Mar 2010 08:05:31 -0700
Subject: Diffusion Morning Report
Message-ID: <4BAA2A3B.1060607@stanford.edu>

Good Morning All,
  Ted is out today. Looking good this morning. Tylan 5 need a test after 
loader alignment. Thermco Poly1 waiting for PH3 mfc. No other issues at 
this time.

  	  	  	  	  	 
  	Date: 	3/24/10 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*up* 	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*down* 	*needs test after loader repair* 	* * 	* * 	* *
Tylan 6-POCl3 	*up* 	* * 	* * 	* * 	* *
Tylan 7-TEOS2 	*up* 	* * 	*1.428/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*10.74/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*14.63/30* 	* * 	* *
Tylan 10-Nitride 	*up* 	* * 	*6.89/30* 	* * 	* *
Tylan 11-LTO 	*up* 	* * 	*1.59/30* 	* * 	* *
Tylan 12-FGA 	*up* 	* * 	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*yellow* 	*bad PH3 mfc-no phos deps* 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*future* 	*testing for qual* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	*  * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*A on line 674 psi* 	* changeover working 
well * 	* * 	* *

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From rseymour at stanford.edu  Thu Mar 25 07:25:15 2010
From: rseymour at stanford.edu (Ray Seymour)
Date: Thu, 25 Mar 2010 07:25:15 -0700
Subject: Diffusion Morning Report
Message-ID: <4BAB724B.5080501@stanford.edu>

Good Morning All,
Ted is out today. Looking good this morning. Tylan 5 need a test after 
loader alignment. Thermco Poly2 waiting for PH3 mfc. No other issues at 
this time.

  	  	  	  	  	 
  	Date: 	3/25/10 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*up* 	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*yellow*
	*needs test after loader repair* 	* * 	* * 	* *
Tylan 6-POCl3 	*up* 	* * 	* * 	* * 	* *
Tylan 7-TEOS2 	*up* 	* * 	*1.428/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*10.15/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*14.99/30* 	* * 	* *
Tylan 10-Nitride 	*up* 	* * 	*6.89/30* 	* * 	* *
Tylan 11-LTO 	*up* 	* * 	*3.55/30* 	* * 	* *
Tylan 12-FGA 	*up* 	* * 	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*yellow* 	*bad PH3 mfc-no phos deps* 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*future* 	*testing for qual* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	*  * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*A on line 674 psi* 	* changeover working 
well * 	* * 	* *

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From rseymour at stanford.edu  Fri Mar 26 07:38:30 2010
From: rseymour at stanford.edu (Ray Seymour)
Date: Fri, 26 Mar 2010 07:38:30 -0700
Subject: Diffusion Morning Report
Message-ID: <4BACC6E6.2040501@stanford.edu>

Good Morning All,
Ted is out today. Looking good this morning.  Thermco Poly2 waiting for 
PH3 mfc. No other issues at this time.

  	  	  	  	  	 
  	Date: 	3/26/10 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*up* 	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*up*
	
	* * 	* * 	* *
Tylan 6-POCl3 	*up* 	
	* * 	* * 	* *
Tylan 7-TEOS2 	*up* 	* * 	*1.428/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*10.15/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*14.99/30* 	* * 	* *
Tylan 10-Nitride 	*up* 	* * 	*6.89/30* 	* * 	* *
Tylan 11-LTO 	*up* 	* * 	*3.56/30* 	* * 	* *
Tylan 12-FGA 	*up* 	* * 	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*yellow* 	*bad PH3 mfc-no phos deps* 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*future* 	*testing for qual* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* Cleaned this morning
* 	*  * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*A on line 674 psi* 	* changeover working 
well * 	* * 	* *

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