Diffusion Morning Report 11/01/10

Ted Berg tberg at stanford.edu
Mon Nov 1 06:30:00 PDT 2010


Good Morning All,
     Looking good this morning. Epi  had a scrubber fault. POCl3 had 
door close issues. LTO had MFS alarms again. Ebeam has computer issues. 
Zygo has bad pizeo scanner. No other major issues at this time.

					
	Date: 	11/1/10 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*yellow* 	*tube replaced needs test* 	** 	** 	**
Tylan 2 	*yellow* 	*OT led on* 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*yellow* 	*door close issues* 	** 	** 	*2*
Tylan 7-TEOS2 	*up* 	** 	*.25/30* 	** 	**
Tylan 8-SiGe 	*up* 	** 	*20.1/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*12.1/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*13.98/30* 	** 	**
Tylan 11-LTO 	*yellow* 	*O2 MFS alarms* 	*27.03/30* 	** 	**
Tylan 12-FGA 	*up* 	*
* 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	** 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*yellow* 	*testing* 	** 	** 	**
AMAT Epi 	*yellow* 	*scrubber errors* 	** 	** 	*1*
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*computer issues* 	** 	** 	*3*
ZYGO 	*yellow* 	*intermittent hardware issues* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*B on line 70 PSI* 	*changeover working well* 
** 	**


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