Diffusion Morning Report 11/02/10

Ted Berg tberg at stanford.edu
Tue Nov 2 06:16:09 PDT 2010


Good Morning All,
     Looking OK this morning.  Epi Scrubber is down again-looking into 
it. POCl3 loader is back after rebuild. Ebeam computer still has issues. 
Zygo has scanner problems.Tylan 1 low dep. No other major issues.

					
	Date: 	11/2/10 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*yellow* 	*tube replaced needs test* 	** 	** 	*3*
Tylan 2 	*yellow* 	*OT led on* 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*yellow* 	*door close issues* 	** 	** 	*2*
Tylan 7-TEOS2 	*up* 	** 	*.25/30* 	** 	**
Tylan 8-SiGe 	*up* 	** 	*20.1/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*12.1/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*13.98/30* 	** 	**
Tylan 11-LTO 	*yellow* 	*O2 MFS alarms* 	*27.03/30* 	** 	*4*
Tylan 12-FGA 	*up* 	*
* 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	** 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*yellow* 	*testing* 	** 	** 	**
AMAT Epi 	*yellow* 	*scrubber errors* 	** 	** 	*1*
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*computer issues* 	** 	** 	*5*
ZYGO 	*yellow* 	*intermittent hardware issues* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*A on line 702 PSI* 	*changeover working 
well* 	** 	**


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