Diffusion Morning Report 11/05/10

Ted Berg tberg at stanford.edu
Fri Nov 5 05:58:32 PDT 2010


Good morning All,
     Looking good this morning. SEMHITACHI has a broken x-coupler again. 
Tylan LTO had MFS alarms Ebeam computer is still having issues. No other 
problems at this time.

					
	Date: 	11/5/10 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*up* 	** 	*.25/30* 	** 	**
Tylan 8-SiGe 	*up* 	** 	*20.1/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*12.1/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*14.11/30* 	** 	**
Tylan 11-LTO 	*yellow* 	*O2 MFS alarms* 	*28.36/30* 	** 	*1*
Tylan 12-FGA 	*up* 	*
* 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*up* 	** 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	** 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*yellow* 	*testing* 	** 	** 	**
AMAT Epi 	*yellow* 	*use lla* 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*computer issues* 	** 	** 	*2*
ZYGO 	*up* 	*
* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*A on line 708 PSI* 	*changeover working 
well* 	** 	**


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20101105/ddcd879f/attachment.html>


More information about the diffusion mailing list