From rseymour at stanford.edu Fri Oct 1 07:51:32 2010 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 01 Oct 2010 07:51:32 -0700 Subject: Diffusion Morning Report Message-ID: <4CA5F574.5030104@stanford.edu> Good Morning All, Ted is out all week. BBr3 needs a test. POCL3 tube needs testing. Tube4 has low oxide thickness. TEOS2 door interlock not responding to door open/close. No other issues. Date: 10/1/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 *up* * * * * * * * * Tylan 2 *up* * * * * * * * * Tylan 3 *up* * * * * * * * * Tylan 4 *yellow* * * * * * * * * Tylan 5-BBr3 *yellow* *needs test-possible flow issues* * * * * * * Tylan 6-POCl3 *down* needs testing door seal adjusted * * * * * * Tylan 7-TEOS2 *down* *13,1/30* * * * * Tylan 8-SiGe *up* * * *20.1/30* * * * * Tylan 9-Poly *up* * * *9.96/30* * * * * Tylan 10-Nitride *up* * * *10.33/30* * * * * Tylan 11-LTO *yellow* *03.4630* * * * * Tylan 12-FGA *up* * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *up* * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *up* * * * * * * * * Thermco bpsg *yellow* *testing* * * * * * * TEL Spa *up* * * * * * * * * Burn Box *up* * cleaned this morning * * * * * * * Ebeam *up* * * * * * * * * ZYGO *up* * * * * * * * * FGA2 *up* * * * * * * * * SiH4 for furnaces * * *B on line 624 PSI* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Mon Oct 4 06:58:18 2010 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 04 Oct 2010 06:58:18 -0700 Subject: Diffusion Morning Report Message-ID: <4CA9DD7A.9050103@stanford.edu> Good Morning All, Ted is today. BBr3 test results needed. POCL3 loader door flag needs adjusting. TEOS2 door interlock not responding to door open/close. No other issues . Date: 10/4/10 THICKNESS-Change at Tube Name/Number Status Tylan 1 *up* * * * * * * * * Tylan 2 *up* * * * * * * * * Tylan 3 *up* * * * * * * * * Tylan 4 *yellow* * * * * * * * * Tylan 5-BBr3 *yellow* waitin*g* for results of test * * * * * * Tylan 6-POCl3 *yellow* door flag need adjusting * * * * * * Tylan 7-TEOS2 *down* *13,1/30* * * * * Tylan 8-SiGe *up* * * *20.1/30* * * * * Tylan 9-Poly *up* * * *10.3/30* * * * * Tylan 10-Nitride *up* * * *10.47/30* * * * * Tylan 11-LTO *yellow* *6.35/30* * * * * Tylan 12-FGA *up* * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *up* * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *up* * * * * * * * * Thermco bpsg *yellow* *testing* * * * * * * TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *up* * * * * * * * * ZYGO *up* * * * * * * * * FGA2 *up* * * * * * * * * SiH4 for furnaces * * *B on line 474 PSI* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 6 06:12:43 2010 From: tberg at stanford.edu (Ted Berg) Date: Wed, 06 Oct 2010 06:12:43 -0700 Subject: Diffusion Morning Report 10/06/10 Message-ID: <4CAC75CB.8080908@stanford.edu> Good Morning All, Hello everyone you should notice a new column on the report, this shows our current priorities for the day. These may change as the day progresses, they are intended to give users a snapshot of our current priorities. Looking OK this morning. Nitride is back together and under leak test. POCl3 needs a final test before release. TEOS has door close issues and MFS problems. BBR3 waiting results. Tylan LTO has intermittent MFS alarms. No other major issues at this time. > > Date: 10/6/10 THICKNESS-Change at Priority > Tube Name/Number Status > Tylan 1 *up* * * * * * * * * > Tylan 2 *up* * * * * * * * * > Tylan 3 *up* * * * * * * * * > Tylan 4 *up* * * * * * * * * > Tylan 5-BBr3 *yellow* *tested waiting results* * * * * *4* > Tylan 6-POCl3 *down* *pull and clean completed-testing* * * * * *3* > Tylan 7-TEOS2 *down* *door close issue* *13,1/30* * * *2* > Tylan 8-SiGe *up* * * *20.1/30* * * * * > Tylan 9-Poly *up* * * *10.85/30* * * * * > Tylan 10-Nitride *down* *pumping issues* *10.44/30* * * *1* > Tylan 11-LTO *yellow* *intermittent mfs alarms* *10.11/30* * * *5* > Tylan 12-FGA *up* * > * * * * * * * > Thermco 1 *up* * * * * * * * * > Thermco 2 *up* * * * * * * * * > Thermco 3 *future* * * * * * * * * > Thermco4 *future* * * * * * * * * > Thermco Poly1 *up* * * * * * * * * > Thermco Poly2 *up* * * * * * * * * > Thermco Nitride1 *up* * * * * * * * * > Thermco bpsg *yellow* *testing* * * * * * * > TEL Spa *up* * * * * * * * * > Burn Box *up* * * * * * * * * > Ebeam *up* * * * * * * * * > ZYGO *up* * * * * * * * * > FGA2 *up* * * * * * * * * > SiH4 for furnaces * * *B on line 424 PSI* * changeover working > well * * * * * > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 7 07:24:30 2010 From: tberg at stanford.edu (Ted Berg) Date: Thu, 07 Oct 2010 07:24:30 -0700 Subject: Diffusion Morning Report 10/07/10 Message-ID: <4CADD81E.40504@stanford.edu> Good morning All, Looking Ok this morning. Nitride door needs slight adjustment. TEOS is not pumping. Epi not reaching base. BBr3 is back up and POCL3 is back up for running when staff is here. No other major issues at this time. Date: 10/7/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* * * * * * * * * Tylan 2 *up* * * * * * * * * Tylan 3 *up* * * * * * * * * Tylan 4 *up* * * * * * * * * Tylan 5-BBr3 *up* * * * * * * * * Tylan 6-POCl3 *yellow* * supervised running* * * * * * * Tylan 7-TEOS2 *down* *not pumping* *13,1/30* * * *3* Tylan 8-SiGe *up* * * *20.1/30* * * * * Tylan 9-Poly *up* * * *11.01/30* * * * * Tylan 10-Nitride *down* *leak fail* *10.47/30* * * *1* Tylan 11-LTO *yellow* *intermittent mfs alarms* *10.6/30* * * *4* Tylan 12-FGA *up* * * * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *up* * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *up* * * * * * * * * Thermco bpsg *yellow* *testing* * * * * * * AMAT Epi *down* *not reaching base* * * * * *2* TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *up* * * * * * * * * ZYGO *up* * * * * * * * * FGA2 *up* * * * * * * * * SiH4 for furnaces * * *B on line 424 PSI* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 8 06:11:10 2010 From: tberg at stanford.edu (Ted Berg) Date: Fri, 08 Oct 2010 06:11:10 -0700 Subject: Diffusion Morning Report 10/08/10 Message-ID: <4CAF186E.804@stanford.edu> Good Morning All, Looking good this morning. Nitride tube is being rebuilt as is TEOS. POCl3 under supervised running. LTO has intermittent MFS alarms. No other issues at this time. Date: 10/8/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* * * * * * * * * Tylan 2 *up* * * * * * * * * Tylan 3 *up* * * * * * * * * Tylan 4 *up* * * * * * * * * Tylan 5-BBr3 *up* * * * * * * * * Tylan 6-POCl3 *yellow* * supervised running* * * * * * * Tylan 7-TEOS2 *down* *not pumping* *13,1/30* * * *2* Tylan 8-SiGe *up* * * *20.1/30* * * * * Tylan 9-Poly *up* * * *11.41/30* * * * * Tylan 10-Nitride *down* *leak fail* *10.47/30* * * *1* Tylan 11-LTO *yellow* *intermittent mfs alarms* *11.91/30* * * *3* Tylan 12-FGA *up* * * * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *up* * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *up* * * * * * * * * Thermco bpsg *yellow* *testing* * * * * * * AMAT Epi *up* * * * * * * * * TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *up* * * * * * * * * ZYGO *up* * * * * * * * * FGA2 *up* * * * * * * * * SiH4 for furnaces * * *B on line 399 PSI* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 11 06:23:58 2010 From: tberg at stanford.edu (Ted Berg) Date: Mon, 11 Oct 2010 06:23:58 -0700 Subject: Diffusion Morning Report 10/11/10 Message-ID: <4CB30FEE.10607@stanford.edu> Good Morning All, Looking good this morning. Tylan Nitride still has a leak and TEOS has high base pressure. Tylan LTO has intermittent MFS alarms. No other problems at this time. > > Date: 10/11/10 THICKNESS-Change at Priority > Tube Name/Number Status > Tylan 1 *up* * * * * * * * * > Tylan 2 *up* * * * * * * * * > Tylan 3 *up* * * * * * * * * > Tylan 4 *up* * * * * * * * * > Tylan 5-BBr3 *up* * * * * * * * * > Tylan 6-POCl3 *yellow* * supervised running* * * * * * * > Tylan 7-TEOS2 *down* *not pumping* *13,1/30* * * *2* > Tylan 8-SiGe *up* * * *20.1/30* * * * * > Tylan 9-Poly *up* * * *11.41/30* * * * * > Tylan 10-Nitride *down* *leak fail* *10.47/30* * * *1* > Tylan 11-LTO *yellow* *intermittent mfs alarms* *14.22/30* * * *3* > Tylan 12-FGA *up* * > * * * * * * * > Thermco 1 *up* * * * * * * * * > Thermco 2 *up* * * * * * * * * > Thermco 3 *future* * * * * * * * * > Thermco4 *future* * * * * * * * * > Thermco Poly1 *up* * * * * * * * * > Thermco Poly2 *up* * * * * * * * * > Thermco Nitride1 *up* * * * * * * * * > Thermco bpsg *yellow* *testing* * * * * * * > AMAT Epi *up* * * * * * * * * > TEL Spa *up* * * * * * * * * > Burn Box *up* * * * * * * * * > Ebeam *up* * * * * * * * * > ZYGO *up* * * * * * * * * > FGA2 *up* * * * * * * * * > SiH4 for furnaces * * *B on line 354 PSI* * changeover working > well * * * * * > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 12 06:17:23 2010 From: tberg at stanford.edu (Ted Berg) Date: Tue, 12 Oct 2010 06:17:23 -0700 Subject: Diffusion Morning rteport 10/12/10 Message-ID: <4CB45FE3.5030507@stanford.edu> Good Morning All, Looking good this morning. Nitride needs a test, TEOS is being re-assembled after tube change. LTO has intermittent MFS alarms and Epi had a couple of over pressure alarms. No other issues at this time. Date: 10/12/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* * * * * * * * * Tylan 2 *up* * * * * * * * * Tylan 3 *up* * * * * * * * * Tylan 4 *up* * * * * * * * * Tylan 5-BBr3 *up* * * * * * * * * Tylan 6-POCl3 *yellow* * supervised running* * * * * * * Tylan 7-TEOS2 *down* *re assembly after tube chang* *0/30* * * *2* Tylan 8-SiGe *up* * * *20.1/30* * * * * Tylan 9-Poly *up* * * *11.41/30* * * * * Tylan 10-Nitride *down* *needs test after repair* *10.47/30* * * *1* Tylan 11-LTO *yellow* *intermittent mfs alarms* *15.31/30* * * *3* Tylan 12-FGA *up* * * * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *up* * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *up* * * * * * * * * Thermco bpsg *yellow* *testing* * * * * * * AMAT Epi *yellow* *intermittent over pressure Alarms* * * * * * 4 * TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *up* * * * * * * * * ZYGO *up* * * * * * * * * FGA2 *up* * * * * * * * * SiH4 for furnaces * * *B on line 344 PSI* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 13 06:19:02 2010 From: tberg at stanford.edu (Ted Berg) Date: Wed, 13 Oct 2010 06:19:02 -0700 Subject: Diffusion Morning Report 10/13/10 Message-ID: <4CB5B1C6.4030806@stanford.edu> Good Morning All, Looking good this morning. Nitride reported to have leak fail. Epi reported to have over pressure but it was run after that. TEOS needs a test after repair. Tylan LTO has intermittent MFS alarms. No other issues at this time. Date: 10/13/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* * * * * * * * * Tylan 2 *up* * * * * * * * * Tylan 3 *up* * * * * * * * * Tylan 4 *up* * * * * * * * * Tylan 5-BBr3 *up* * * * * * * * * Tylan 6-POCl3 *yellow* * supervised running* * * * * * * Tylan 7-TEOS2 *down* *needs test after repair* *0/30* * * *3* Tylan 8-SiGe *up* * * *20.1/30* * * * * Tylan 9-Poly *up* * * *11.41/30* * * * * Tylan 10-Nitride *yellow* *leak fail??* *11.15/30* * * *2* Tylan 11-LTO *yellow* *intermittent mfs alarms* *19.15/30* * * *4* Tylan 12-FGA *up* * * * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *up* * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *up* * * * * * * * * Thermco bpsg *yellow* *testing* * * * * * * AMAT Epi *yellow* *intermittent over pressure Alarms* * * * * *1* TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *up* * * * * * * * * ZYGO *up* * * * * * * * * FGA2 *up* * * * * * * * * SiH4 for furnaces * * *B on line 344 PSI* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 14 06:41:19 2010 From: tberg at stanford.edu (Ted Berg) Date: Thu, 14 Oct 2010 06:41:19 -0700 Subject: Diffusion Morning Report 10/14/10 Message-ID: <4CB7087F.2060002@stanford.edu> Good Morning All, Looking good this morning. Nitride is back together and needs a test. Epi had intermittent overpressure but Maurice tested it several times and it was fine. FGA tube going back together after replacement. Tylan LTO had intermittent mfs alarms. No other issues at this time. From tberg at stanford.edu Thu Oct 14 06:42:08 2010 From: tberg at stanford.edu (Ted Berg) Date: Thu, 14 Oct 2010 06:42:08 -0700 Subject: Fwd: Diffusion Morning Report 10/14/10 Message-ID: <4CB708B0.3060607@stanford.edu> -------- Original Message -------- Subject: Diffusion Morning Report 10/14/10 Date: Thu, 14 Oct 2010 06:41:19 -0700 From: Ted Berg To: tberg at stanford.edu, mtang at snf.stanford.edu, Maurice Stevens , Nancy Latta , John Shott , Ray Seymour , mdickey at snf.stanford.edu, Ed Myers , diffusion at snf.stanford.edu Good Morning All, Looking good this morning. Nitride is back together and needs a test. Epi had intermittent overpressure but Maurice tested it several times and it was fine. FGA tube going back together after replacement. Tylan LTO had intermittent mfs alarms. No other issues at this time. Date: 10/14/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* * * * * * * * * Tylan 2 *up* * * * * * * * * Tylan 3 *up* * * * * * * * * Tylan 4 *up* * * * * * * * * Tylan 5-BBr3 *up* * * * * * * * * Tylan 6-POCl3 *yellow* * supervised running* * * * * * * Tylan 7-TEOS2 *up* * * *0/30* * * * * Tylan 8-SiGe *up* * * *20.1/30* * * * * Tylan 9-Poly *up* * * *11.41/30* * * * * Tylan 10-Nitride *yellow* *needs test* *11.15/30* * * *1* Tylan 11-LTO *yellow* *intermittent mfs alarms* *19.15/30* * * *3* Tylan 12-FGA *up* * * * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *up* * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *up* * * * * * * * * Thermco bpsg *yellow* *testing* * * * * * * AMAT Epi *yellow* *intermittent over pressure Alarms* * * * * *2* TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *up* * * * * * * * * ZYGO *up* * * * * * * * * FGA2 *down* *tube replacement* * * * * *4* SiH4 for furnaces * * *B on line 344 PSI* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 15 06:12:17 2010 From: tberg at stanford.edu (Ted Berg) Date: Fri, 15 Oct 2010 06:12:17 -0700 Subject: Diffusion Morning Report 10/15/10 Message-ID: <4CB85331.6080304@stanford.edu> Good Morning All, Looking good this morning. Burn box clean this morning. POCl3 under supervised running had some door issues .Epi had water flow error. Nitride dep is a bit low. Tylan LTO had intermittent MFS alarms. No other issues at this time. Date: 10/15/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* * * * * * * * * Tylan 2 *up* * * * * * * * * Tylan 3 *up* * * * * * * * * Tylan 4 *up* * * * * * * * * Tylan 5-BBr3 *up* * * * * * * * * Tylan 6-POCl3 *yellow* * supervised running* * * * * * * Tylan 7-TEOS2 *up* * * *.25/30* * * * * Tylan 8-SiGe *up* * * *20.1/30* * * * * Tylan 9-Poly *up* * * *11.41/30* * * * * Tylan 10-Nitride *up* *dep rate slightly low* *11.38/30* * * * * Tylan 11-LTO *yellow* *intermittent mfs alarms* *17.55/30* * * *2* Tylan 12-FGA *up* * * * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *up* * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *up* * * * * * * * * Thermco bpsg *yellow* *testing* * * * * * * AMAT Epi *yellow* *intermittent over pressure Alarms* * * * * *1* TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *up* * * * * * * * * ZYGO *up* * * * * * * * * FGA2 *up* * * * * * * * * SiH4 for furnaces * * *B on line 344 PSI* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 18 06:19:27 2010 From: tberg at stanford.edu (Ted Berg) Date: Mon, 18 Oct 2010 06:19:27 -0700 Subject: Diffusion Morning Report 10/18/10 Message-ID: <4CBC495F.7090800@stanford.edu> Good Morning All, Looking OK this morning. LTO has broken sheaths. POCl3 doing temp Cal.Epi has intermittent pressure alarms. Zygo has intermittent hardware issues. No other problems at this time. Date: 10/18/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* * * * * * * * * Tylan 2 *up* * * * * * * * * Tylan 3 *up* * * * * * * * * Tylan 4 *up* * * * * * * * * Tylan 5-BBr3 *up* * * * * * * * * Tylan 6-POCl3 *down* *temp cal* * * * * *2* Tylan 7-TEOS2 *up* * * *.25/30* * * * * Tylan 8-SiGe *up* * * *20.1/30* * * * * Tylan 9-Poly *up* * * *11.41/30* * * * * Tylan 10-Nitride *up* *dep rate slightly low* *11.81/30* * * * * Tylan 11-LTO *down* *broken sheaths* *17.97/30* * * *1* Tylan 12-FGA *up* * * * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *up* * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *up* * * * * * * * * Thermco bpsg *yellow* *testing* * * * * * * AMAT Epi *yellow* *intermittent over pressure Alarms* * * * * *3* TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *up* * * * * * * * * ZYGO *yellow* *intermittent hardware issues* * * * * * * FGA2 *up* * * * * * * * * SiH4 for furnaces * * *B on line 244 PSI* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 19 06:41:51 2010 From: tberg at stanford.edu (Ted Berg) Date: Tue, 19 Oct 2010 06:41:51 -0700 Subject: Diffusion Morning Report 10/19/10 Message-ID: <4CBDA01F.6000101@stanford.edu> Good Morning All, Looking OK this morning . LTO is down for Silane flow errors. POCl3 is down for temp cal. Epi had pressure issues but has been run continuously. Tylan 2 has the OT light on but seems to be running OK. Called Zygo fs to look at the system and see if they see any issues. No other major issues at this time. Date: 10/19/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* * * * * * * * * Tylan 2 *yellow* *OT light is on* * * * * * * Tylan 3 *up* * * * * * * * * Tylan 4 *up* * * * * * * * * Tylan 5-BBr3 *up* * * * * * * * * Tylan 6-POCl3 *down* *temp cal* * * * * *2* Tylan 7-TEOS2 *up* * * *.25/30* * * * * Tylan 8-SiGe *up* * * *20.1/30* * * * * Tylan 9-Poly *up* * * *11.41/30* * * * * Tylan 10-Nitride *up* *dep rate slightly low* *11.94/30* * * * * Tylan 11-LTO *down* *sih4 alarns* *17.97/30* * * *1* Tylan 12-FGA *up* * * * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *up* * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *up* * * * * * * * * Thermco bpsg *yellow* *testing* * * * * * * AMAT Epi *yellow* *intermittent over pressure Alarms* * * * * *3* TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *up* * * * * * * * * ZYGO *yellow* *intermittent hardware issues* * * * * * * FGA2 *up* * * * * * * * * SiH4 for furnaces * * *B on line 244 PSI* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 20 06:22:16 2010 From: tberg at stanford.edu (Ted Berg) Date: Wed, 20 Oct 2010 06:22:16 -0700 Subject: Diffusion Morning Report 10/20/10 Message-ID: <4CBEED08.3060308@stanford.edu> Good Morning All, looking good this morning. Tylan 1 has intermittent O2 alarms . Ebeam computer is down. Epi had over pressure issues, but is running. No other major issues. Date: 10/20/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down * *intermittent O2 alarms* * * * * *1* Tylan 2 *yellow* * * * * * * * * Tylan 3 *up* * * * * * * * * Tylan 4 *up* * * * * * * * * Tylan 5-BBr3 *up* * * * * * * * * Tylan 6-POCl3 *up* * * * * * * * * Tylan 7-TEOS2 *up* * * *.25/30* * * * * Tylan 8-SiGe *up* * * *20.1/30* * * * * Tylan 9-Poly *up* * * *11.72/30* * * * * Tylan 10-Nitride *up* *dep rate slightly low* *11.98/30* * * * * Tylan 11-LTO *up* * * *19.28/30* * * * * Tylan 12-FGA *up* * * * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *up* * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *up* * * * * * * * * Thermco bpsg *yellow* *testing* * * * * * * AMAT Epi *yellow* *intermittent over pressure Alarms* * * * * *2* TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *down * *computer issues* * * * * *3* ZYGO *yellow* *intermittent hardware issues* * * * * * * FGA2 *up* * * * * * * * * SiH4 for furnaces * * *B on line 244 PSI* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 21 06:13:16 2010 From: tberg at stanford.edu (Ted Berg) Date: Thu, 21 Oct 2010 06:13:16 -0700 Subject: Diffusion Morning Report 10/21/10 Message-ID: <4CC03C6C.5080301@stanford.edu> Good Morning All, Looking good this morning . Tylan 2 had intermittent OT indication but no temp problem. Epi has been running well for several days-no over pressure. E beam has a bad Video board. No other issues at this time. Date: 10/21/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* * * * * * * * * Tylan 2 *yellow* * * * * * * *1* Tylan 3 *up* * * * * * * * * Tylan 4 *up* * * * * * * * * Tylan 5-BBr3 *up* * * * * * * * * Tylan 6-POCl3 *up* * * * * * * * * Tylan 7-TEOS2 *up* * * *.25/30* * * * * Tylan 8-SiGe *up* * * *20.1/30* * * * * Tylan 9-Poly *up* * * *11.87/30* * * * * Tylan 10-Nitride *up* *dep rate slightly low* *11.98/30* * * * * Tylan 11-LTO *up* * * *19.63/30* * * * * Tylan 12-FGA *up* * * * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *up* * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *up* * * * * * * * * Thermco bpsg *yellow* *testing* * * * * * * AMAT Epi *yellow* *intermittent over pressure Alarms* * * * * *2* TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *down * *computer issues* * * * * *3* ZYGO *yellow* *intermittent hardware issues* * * * * * * FGA2 *up* * * * * * * * * SiH4 for furnaces * * *B on line 244 PSI* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Oct 22 06:37:43 2010 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 22 Oct 2010 06:37:43 -0700 Subject: Diffusion Morning Report Message-ID: <4CC193A7.7020506@stanford.edu> Good Morning All, Ted is out today. Looking good this morning . Tylan 2 had intermittent OT indication but no temp problem. Epi has been running well for several days-no over pressure. E beam has a bad Video board. No other issues at this time. Date: 10/22+/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* * * * * * * * * Tylan 2 *yellow* * * * * * * *1* Tylan 3 *up* * * * * * * * * Tylan 4 *up* * * * * * * * * Tylan 5-BBr3 *up* * * * * * * * * Tylan 6-POCl3 *up* * * * * * * * * Tylan 7-TEOS2 *up* * * *17.8/30* * * * * Tylan 8-SiGe *up* * * *20.1/30* * * * * Tylan 9-Poly *up* * * *11.87/30* * * * * Tylan 10-Nitride *up* *dep rate slightly low* *12.93/30* * * * * Tylan 11-LTO *up* * * *19.63/30* * * * * Tylan 12-FGA *up* * * * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *up* * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *up* * * * * * * * * Thermco bpsg *yellow* *testing* * * * * * * AMAT Epi *yellow* *intermittent over pressure Alarms* * * * * *2* TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *down * *computer issues* * * * * *3* ZYGO *yellow* *intermittent hardware issues* * * * * * * FGA2 *up* * * * * * * * * SiH4 for furnaces * * *B on line 244 PSI* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 25 06:25:59 2010 From: tberg at stanford.edu (Ted Berg) Date: Mon, 25 Oct 2010 06:25:59 -0700 Subject: Diffusion Morning Report 10/25/10 Message-ID: <4CC58567.6000509@stanford.edu> Good Morning All, Looking OK this morning. Epi having pressure control issues. TEOS had MFS alarm. 4160 has control issues. Ebeam computer is down. No other issues at this time. Date: 10/25/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* * * * * * * * * Tylan 2 *yellow* * * * * * * * * Tylan 3 *up* * * * * * * * * Tylan 4 *up* * * * * * * * * Tylan 5-BBr3 *up* * * * * * * * * Tylan 6-POCl3 *up* * * * * * * * * Tylan 7-TEOS2 *yellow* *mfs alarm* *.25/30* * * *2* Tylan 8-SiGe *up* * * *20.1/30* * * * * Tylan 9-Poly *up* * * *11.87/30* * * * * Tylan 10-Nitride *up* * * *13.33/30* * * * * Tylan 11-LTO *up* * * *22.42/30* * * * * Tylan 12-FGA *up* * * * * * * * * Thermco 1 *up* * * * * * * * * Thermco 2 *up* * * * * * * * * Thermco 3 *future* * * * * * * * * Thermco4 *future* * * * * * * * * Thermco Poly1 *up* * * * * * * * * Thermco Poly2 *up* * * * * * * * * Thermco Nitride1 *up* * * * * * * * * Thermco bpsg *yellow* *testing* * * * * * * AMAT Epi *yellow* *intermittent over pressure Alarms* * * * * *1* TEL Spa *up* * * * * * * * * Burn Box *up* * * * * * * * * Ebeam *down * *computer issues* * * * * *3* ZYGO *yellow* *intermittent hardware issues* * * * * *4* FGA2 *up* * * * * * * * * SiH4 for furnaces * * *B on line 105 PSI* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 26 06:31:51 2010 From: tberg at stanford.edu (Ted Berg) Date: Tue, 26 Oct 2010 06:31:51 -0700 Subject: Diffusion Morning Report 10/26/10 Message-ID: <4CC6D847.80608@stanford.edu> Good Morning All, Looking good this morning. Tylan 1 had broken air lines. TEOS had Mfs alarm. Epi had intermittent pressure issues. Ebeam computer has intermittent lockup issues. No other problems at this time. Date: 10/26/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *down* *Broken air lines* ** ** *1* Tylan 2 *yellow* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *mfs alarm* *.25/30* ** *2* Tylan 8-SiGe *up* ** *20.1/30* ** ** Tylan 9-Poly *up* ** *11.87/30* ** ** Tylan 10-Nitride *up* ** *13.38/30* ** ** Tylan 11-LTO *up* ** *23.52/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *testing* ** ** ** AMAT Epi *yellow* *intermittent over pressure Alarms* ** ** *3* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *yellow* *computer issues* ** ** *4* ZYGO *yellow* *intermittent hardware issues* ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 105 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 27 06:16:17 2010 From: tberg at stanford.edu (Ted Berg) Date: Wed, 27 Oct 2010 06:16:17 -0700 Subject: Diffusion Morning Report 10/27/10 Message-ID: <4CC82621.9060807@stanford.edu> Good Morning All, Looking good this morning. Nitride had issues staying in pump program. Tylan 1 needs a test after air line repair. Epi had an over pressure error. Ebeam computer is locking up. No other issues at this time. Date: 10/27/10 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *yellow* *needs test* ** ** *3* Tylan 2 *yellow* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *mfs alarm* *.25/30* ** ** Tylan 8-SiGe *up* ** *20.1/30* ** ** Tylan 9-Poly *up* ** *11.87/30* ** ** Tylan 10-Nitride *yellow* *pump issues* *13.38/30* ** *1* Tylan 11-LTO *up* ** *23.52/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *testing* ** ** ** AMAT Epi *yellow* *intermittent over pressure Alarms* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *yellow* *computer issues* ** ** *4* ZYGO *yellow* *intermittent hardware issues* ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 70 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 28 06:06:49 2010 From: tberg at stanford.edu (Ted Berg) Date: Thu, 28 Oct 2010 06:06:49 -0700 Subject: Diffusion Morning report 10/28/10 Message-ID: <4CC97569.5070202@stanford.edu> Good Morning All, Looking OK this morning. Epi has intermittent lift errors. Tylan 1 looks like no steam. Ebeam computer having issues. Zygo rep coming in today to look at our system. No other major issues at this time. Date: 10/28/10 THICKNESS-Change at Priority Tube Name/Number *Status* ** ** ** ** Tylan 1 *yellow* *low dep* ** ** *2* Tylan 2 *yellow* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *up* ** *20.1/30* ** ** Tylan 9-Poly *up* ** *12.02/30* ** ** Tylan 10-Nitride *yellow* *running pump ok* *13.38/30* ** *3* Tylan 11-LTO *up* ** *23.72/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *testing* ** ** ** AMAT Epi *yellow* *intermittent lift errors* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *computer issues* ** ** *4* ZYGO *yellow* *intermittent hardware issues* ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 70 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 29 06:46:12 2010 From: tberg at stanford.edu (Ted Berg) Date: Fri, 29 Oct 2010 06:46:12 -0700 Subject: Diffusion Morning Report 10/29/30 Message-ID: <4CCAD024.9090107@stanford.edu> Good Morning All, Looking good this morning. Tylan 1 is down for tube change. Epi had a scrubber fault-reset-no user around. Ebeam has computer issues. Zygo has serious issues. no other problems at this time. Date: 10/29/10 THICKNESS-Change at Priority Tube Name/Number *Status* ** ** ** ** Tylan 1 *yellow* *low dep* ** ** *1* Tylan 2 *yellow* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *up* ** *20.1/30* ** ** Tylan 9-Poly *up* ** *12.02/30* ** ** Tylan 10-Nitride *up* ** *13.38/30* ** ** Tylan 11-LTO *up* ** *24.6/30* ** ** Tylan 12-FGA *up* * * ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *up* ** ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *testing* ** ** ** AMAT Epi *yellow* *intermittent lift errors* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *computer issues* ** ** *3* ZYGO *yellow* *intermittent hardware issues* ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *B on line 70 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: