From mtang at stanford.edu  Fri Sep 10 09:38:21 2010
From: mtang at stanford.edu (Mary Tang)
Date: Fri, 10 Sep 2010 09:38:21 -0700
Subject: [Fwd: Diffusion Morning Report]
Message-ID: <4C8A5EFD.6050201@stanford.edu>



-------- Original Message --------
Subject: 	Diffusion Morning Report
Date: 	Fri, 10 Sep 2010 06:13:22 -0700
From: 	Ted Berg <tberg at stanford.edu>
To: 	tberg at stanford.edu, mtang at snf.stanford.edu, Maurice Stevens 
<maurice at snf.stanford.edu>, latta at snf.stanford.edu, John Shott 
<shott at snf.stanford.edu>, Ray Seymour <seymour at snf.stanford.edu>, 
mdickey at snf.stanford.edu, emyers at snf.stanford.edu



Good Morning All,
    Looking good this morning. BBr3 needs test and POCl3 is testing. 
Tylan nitride under observation and LTO has intermittent O2 mFS alarms. 
Thermco Lto testing and running. No other problems at this time.

  	  	  	  	  	 
  	Date: 	9/10/10 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*up* 	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*yellow* 	*needs test-possible flow issues* 	* * 	* * 	* *
Tylan 6-POCl3 	*down* 	*pull and clean* 	* * 	* * 	* *
Tylan 7-TEOS2 	*up* 	* * 	*11.8/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*20.1/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*8.38/30* 	* * 	* *
Tylan 10-Nitride 	*yellow* 	*observation* 	*9.51/30* 	* * 	* *
Tylan 11-LTO 	*yellow* 	*intermittent mfs alarms* 	*18.50/30* 	* * 	* *
Tylan 12-FGA 	*up* 	*
* 	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*up* 	* * 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*yellow* 	*testing* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	*  * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*A on line 78 PSI* 	* changeover working 
well * 	* * 	* *



-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu


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From tberg at stanford.edu  Mon Sep 13 06:45:29 2010
From: tberg at stanford.edu (Ted Berg)
Date: Mon, 13 Sep 2010 06:45:29 -0700
Subject: Diffusion Morning Report 09/13/10
Message-ID: <4C8E2AF9.6070409@stanford.edu>

  Good Morning All,
     Looking good this morning. Tylan LTO having intermittent MFS 
alarms. BBr3 still needs test. POCl3 testing at 850 and 1000 
degrees.Tylan 4  broken drive cable replaced. no other issues at this time.

					
	Date: 	9/13/10 	THICKNESS-Change at 		
Tube Name/Number 	Status 				
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*up* 	*broken drive cable replaced* 	* * 	* * 	* *
Tylan 5-BBr3 	*yellow* 	*needs test-possible flow issues* 	* * 	* * 	* *
Tylan 6-POCl3 	*down* 	*pull and clean* 	* * 	* * 	* *
Tylan 7-TEOS2 	*up* 	* * 	*11.8/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*20.1/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*8.38/30* 	* * 	* *
Tylan 10-Nitride 	*up* 	* * 	*10.01/30* 	* * 	* *
Tylan 11-LTO 	*yellow* 	*intermittent mfs alarms* 	*19.15/30* 	* * 	* *
Tylan 12-FGA 	*up* 	*
* 	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*up* 	* * 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*yellow* 	*testing* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	* * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*B on line 686 PSI* 	* changeover working well 
* 	* * 	* *


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From tberg at stanford.edu  Tue Sep 14 06:46:10 2010
From: tberg at stanford.edu (Ted Berg)
Date: Tue, 14 Sep 2010 06:46:10 -0700
Subject: Diffusion Morning Report 09/14/10
Message-ID: <4C8F7CA2.7010500@stanford.edu>

  Good Morning All,
     Looking good this morning. BBr3 needs a test, POCl3 testing. Tylan 
LTO has intermittent MFS alarms. TEOS has rising pressure. Thermco LTO 
testing and running. No other issues at this time.

					
	Date: 	9/14/10 	THICKNESS-Change at 		
Tube Name/Number 	Status 				
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*up* 	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*yellow* 	*needs test-possible flow issues* 	* * 	* * 	* *
Tylan 6-POCl3 	*down* 	*pull and clean completed-testing* 	* * 	* * 	* *
Tylan 7-TEOS2 	*yellow* 	*High pressure* 	*11.8/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*20.1/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*8.79/30* 	* * 	* *
Tylan 10-Nitride 	*up* 	* * 	*10.21/30* 	* * 	* *
Tylan 11-LTO 	*yellow* 	*intermittent mfs alarms* 	*19.15/30* 	* * 	* *
Tylan 12-FGA 	*up* 	*
* 	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*up* 	* * 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*yellow* 	*testing* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	* * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*B on line 686 PSI* 	* changeover working well 
* 	* * 	* *


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From tberg at stanford.edu  Wed Sep 15 06:20:54 2010
From: tberg at stanford.edu (Ted Berg)
Date: Wed, 15 Sep 2010 06:20:54 -0700
Subject: Diffusion Morning Report 09/15/10
Message-ID: <4C90C836.8040306@stanford.edu>

  Good Morning All,
     Looking good this morning. Still watching Tylan LTO for 
intermittent MFS alarms. BBr3 needs a test. POCl3 testing . Observing 
TEOS pressure. No other issues at this time.

					
	Date: 	9/15/10 	THICKNESS-Change at 		
Tube Name/Number 	Status 				
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*up* 	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*yellow* 	*needs test-possible flow issues* 	* * 	* * 	* *
Tylan 6-POCl3 	*down* 	*pull and clean completed-testing* 	* * 	* * 	* *
Tylan 7-TEOS2 	*yellow* 	*High pressure?* 	*13,1/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*20.1/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*8.89/30* 	* * 	* *
Tylan 10-Nitride 	*up* 	* * 	*10.21/30* 	* * 	* *
Tylan 11-LTO 	*yellow* 	*intermittent mfs alarms* 	*23.23/30* 	* * 	* *
Tylan 12-FGA 	*up* 	*
* 	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*up* 	* * 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*yellow* 	*testing* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	* * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*B on line 686 PSI* 	* changeover working well 
* 	* * 	* *


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From tberg at stanford.edu  Thu Sep 16 07:53:27 2010
From: tberg at stanford.edu (Ted Berg)
Date: Thu, 16 Sep 2010 07:53:27 -0700
Subject: Diffusion Morning Report 09/16/10
Message-ID: <4C922F67.50405@stanford.edu>

  Good Morning All,
     Looking good this morning. TEOS trap cleaned. Tylan LTO still has 
intermittent MFS alarms.BBr3 needs a test, POCl3 testing. No other 
issues at this time.

					
	Date: 	9/16/10 	THICKNESS-Change at 		
Tube Name/Number 	Status 				
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*up* 	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*yellow* 	*needs test-possible flow issues* 	* * 	* * 	* *
Tylan 6-POCl3 	*down* 	*pull and clean completed-testing* 	* * 	* * 	* *
Tylan 7-TEOS2 	*yellow* 	*cleaned trap this morning* 	*13,1/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*20.1/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*8.89/30* 	* * 	* *
Tylan 10-Nitride 	*up* 	* * 	*10.21/30* 	* * 	* *
Tylan 11-LTO 	*yellow* 	*intermittent mfs alarms* 	*25.23/30* 	* * 	* *
Tylan 12-FGA 	*up* 	*
* 	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*up* 	* * 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*yellow* 	*testing* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	* * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*B on line 686 PSI* 	* changeover working well 
* 	* * 	* *


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From tberg at stanford.edu  Fri Sep 17 06:10:33 2010
From: tberg at stanford.edu (Ted Berg)
Date: Fri, 17 Sep 2010 06:10:33 -0700
Subject: Diffusion Morning Report 09/17/10
Message-ID: <4C9368C9.7040507@stanford.edu>

  Good Morning All,
     Looking good this morning. TEOS is down for a leak. BBr3 needs a 
test. POCl3 testing. Tylan LTO  has intermittent MFS alarms. No other 
issues at this time.

					
	Date: 	9/17/10 	THICKNESS-Change at 		
Tube Name/Number 	Status 				
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*up* 	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*yellow* 	*needs test-possible flow issues* 	* * 	* * 	* *
Tylan 6-POCl3 	*down* 	*pull and clean completed-testing* 	* * 	* * 	* *
Tylan 7-TEOS2 	*down* 	*leak* 	*13,1/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*20.1/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*9.79/30* 	* * 	* *
Tylan 10-Nitride 	*up* 	* * 	*10.21/30* 	* * 	* *
Tylan 11-LTO 	*yellow* 	*intermittent mfs alarms* 	*25.76/30* 	* * 	* *
Tylan 12-FGA 	*up* 	*
* 	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*up* 	* * 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*yellow* 	*testing* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	* * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*B on line 686 PSI* 	* changeover working well 
* 	* * 	* *


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From rseymour at stanford.edu  Mon Sep 20 07:59:11 2010
From: rseymour at stanford.edu (Ray Seymour)
Date: Mon, 20 Sep 2010 07:59:11 -0700
Subject: Diffusion Morning report
Message-ID: <4C9776BF.9050904@stanford.edu>

  Good Morning All,
TEOS needs testing.  BBr3 needs a test. POCl3 testing. Tylan LTO  has 
intermittent MFS alarms. No other issues at this time.

					
	Date: 	9/20/10 	THICKNESS-Change at 		
Tube Name/Number 	Status 				
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*up* 	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*yellow* 	*needs test-possible flow issues* 	* * 	* * 	* *
Tylan 6-POCl3 	*down* 	*pull and clean completed-testing* 	* * 	* * 	* *
Tylan 7-TEOS2 	*yellow*
	*failed leak test but good now*
	*13,1/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*20.1/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*9.96/30* 	* * 	* *
Tylan 10-Nitride 	*up* 	* * 	*10.21/30* 	* * 	* *
Tylan 11-LTO 	*yellow* 	*intermittent mfs alarms* 	*27.9/30* 	* * 	* *
Tylan 12-FGA 	*up* 	*
* 	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*up* 	* * 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*yellow* 	*testing* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	* * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*B on line 686 PSI* 	* changeover working well 
* 	* * 	* *

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From rseymour at stanford.edu  Tue Sep 21 06:55:02 2010
From: rseymour at stanford.edu (Ray Seymour)
Date: Tue, 21 Sep 2010 06:55:02 -0700
Subject: Diffusion Morning Report
Message-ID: <4C98B936.30109@stanford.edu>

  Good Morning All,
  Looking good this morning.  BBr3 needs a test. POCl3 testing. Tylan 
LTO  has intermittent MFS alarms. No other issues at this time.

					
	Date: 	9/21/10 	THICKNESS-Change at 		
Tube Name/Number 	Status 				
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*up* 	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*yellow* 	*needs test-possible flow issues* 	* * 	* * 	* *
Tylan 6-POCl3 	*down* 	testing today
	* * 	* * 	* *
Tylan 7-TEOS2 	*down* 	
	*13,1/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*20.1/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*9.96/30* 	* * 	* *
Tylan 10-Nitride 	*up* 	* * 	*10.21/30* 	* * 	* *
Tylan 11-LTO 	*yellow* 	*intermittent mfs alarms* 	*27.95/30* 	* * 	* *
Tylan 12-FGA 	*up* 	*
* 	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*up* 	* * 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*yellow* 	*testing* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	* * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*B on line 635 PSI* 	* changeover working well 
* 	* * 	* *

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From rseymour at stanford.edu  Wed Sep 22 07:13:34 2010
From: rseymour at stanford.edu (Ray Seymour)
Date: Wed, 22 Sep 2010 07:13:34 -0700
Subject: Diffusion Morning Report
Message-ID: <4C9A0F0E.20102@stanford.edu>

  Good Morning All,
  Not so good this morning.  BBr3 needs a test. Tylan LTO  has 
intermittent MFS alarms. Tylannitride pump failure. POCL3 tube not 
sealing. No other issues at this time.

					
	Date: 	9/22/10 	THICKNESS-Change at 		
Tube Name/Number 	Status 				
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*up* 	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*yellow* 	*needs test-possible flow issues* 	* * 	* * 	* *
Tylan 6-POCl3 	*down* 	door seal leaking
	* * 	* * 	* *
Tylan 7-TEOS2 	*down* 	
	*13,1/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*20.1/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*9.96/30* 	* * 	* *
Tylan 10-Nitride 	*Down *
	* pump failed
* 	*10.21/30* 	* * 	* *
Tylan 11-LTO 	*yellow* 	*intermittent mfs alarms* 	*30.6/30* 	* * 	* *
Tylan 12-FGA 	*up* 	*
* 	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*up* 	* * 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*yellow* 	*testing* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	* * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*B on line 635 PSI* 	* changeover working well 
* 	* *

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From rseymour at stanford.edu  Mon Sep 27 07:20:59 2010
From: rseymour at stanford.edu (Ray Seymour)
Date: Mon, 27 Sep 2010 07:20:59 -0700
Subject: Diffusion Morning Report
Message-ID: <4CA0A84B.5010207@stanford.edu>

  Good Morning All,
  Ted is out all week. Not so good this morning.  BBr3 needs a test. 
Tylan LTO down for pull and clean. Tylannitride pump failure. POCL3 tube 
not sealing. Tube4 has low oxide thickness.


					
	Date: 	9/27/10 	THICKNESS-Change at 		
Tube Name/Number 	Status 				
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*yellow*
	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*yellow* 	*needs test-possible flow issues* 	* * 	* * 	* *
Tylan 6-POCl3 	*down* 	door seal leaking
	* * 	* * 	* *
Tylan 7-TEOS2 	*down* 	
	*13,1/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*20.1/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*9.96/30* 	* * 	* *
Tylan 10-Nitride 	*Down *
	* pump failed
* 	*10.21/30* 	* * 	* *
Tylan 11-LTO 	*yellow* 	pull and clean
	*0/30* 	* * 	* *
Tylan 12-FGA 	*up* 	
	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*up* 	* * 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*yellow* 	*testing* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	* * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*B on line 625 PSI* 	* changeover working well 
* 	* *

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From rseymour at stanford.edu  Mon Sep 27 07:32:29 2010
From: rseymour at stanford.edu (Ray Seymour)
Date: Mon, 27 Sep 2010 07:32:29 -0700
Subject: Diffusion Morning Report
Message-ID: <4CA0AAFD.5080202@stanford.edu>

  Good Morning All,
  Ted is out all week. Not so good this morning.  BBr3 needs a test. 
Tylan LTO down for pull and clean. Tylannitride pump failure. POCL3 tube 
not sealing. Tube4 has low oxide thickness. TEOS2 door interlock not 
responding to door open/close.


					
	Date: 	9/27/10 	THICKNESS-Change at 		
Tube Name/Number 	Status 				
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*yellow*
	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*yellow* 	*needs test-possible flow issues* 	* * 	* * 	* *
Tylan 6-POCl3 	*down* 	door seal leaking
	* * 	* * 	* *
Tylan 7-TEOS2 	*down* 	
	*13,1/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*20.1/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*9.96/30* 	* * 	* *
Tylan 10-Nitride 	*Down *
	* pump failed
* 	*10.21/30* 	* * 	* *
Tylan 11-LTO 	*yellow* 	pull and clean
	*0/30* 	* * 	* *
Tylan 12-FGA 	*up* 	
	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*up* 	* * 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*yellow* 	*testing* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	* * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*B on line 625 PSI* 	* changeover working well 
* 	* *

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From rseymour at stanford.edu  Wed Sep 29 08:14:44 2010
From: rseymour at stanford.edu (Ray Seymour)
Date: Wed, 29 Sep 2010 08:14:44 -0700
Subject: Diffusion Morning Report
Message-ID: <4CA357E4.3070402@stanford.edu>

  Good Morning All,
  Ted is out all week.  BBr3 needs a test. Tylan LTO pull and clean 
complete, running coat. Tylannitride pump failure. POCL3 tube not 
sealing. Tube4 has low oxide thickness. TEOS2 door interlock not 
responding to door open/close.


					
	Date: 	9/29/10 	THICKNESS-Change at 		
Tube Name/Number 	Status 				
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*yellow*
	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*yellow* 	*needs test-possible flow issues* 	* * 	* * 	* *
Tylan 6-POCl3 	*down* 	door seal leaking
	* * 	* * 	* *
Tylan 7-TEOS2 	*down* 	
	*13,1/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*20.1/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*9.96/30* 	* * 	* *
Tylan 10-Nitride 	*Down *
	* pump failed
* 	*10.21/30* 	* * 	* *
Tylan 11-LTO 	*yellow* 	
	*0/30* 	* * 	* *
Tylan 12-FGA 	*up* 	
	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*up* 	* * 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*yellow* 	*testing* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	* * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*B on line 624 PSI* 	* changeover working well 
* 	* *

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From rseymour at stanford.edu  Thu Sep 30 07:19:35 2010
From: rseymour at stanford.edu (Ray Seymour)
Date: Thu, 30 Sep 2010 07:19:35 -0700
Subject: Diffusion Morning Report
Message-ID: <4CA49C77.1080907@stanford.edu>

  Good Morning All,
  Ted is out all week.  BBr3 needs a test. Tylan LTO is up. Tylannitride 
is up. POCL3 loader door adjusted, ready for testing. Tube4 has low 
oxide thickness. TEOS2 door interlock not responding to door open/close. 
No other issues .


					
	Date: 	9/30/10 	THICKNESS-Change at 		
Tube Name/Number 	Status 				
Tylan 1 	*up* 	* * 	* * 	* * 	* *
Tylan 2 	*up* 	* * 	* * 	* * 	* *
Tylan 3 	*up* 	* * 	* * 	* * 	* *
Tylan 4 	*yellow*
	* * 	* * 	* * 	* *
Tylan 5-BBr3 	*yellow* 	*needs test-possible flow issues* 	* * 	* * 	* *
Tylan 6-POCl3 	*down* 	door seal leaking
	* * 	* * 	* *
Tylan 7-TEOS2 	*down* 	
	*13,1/30* 	* * 	* *
Tylan 8-SiGe 	*up* 	* * 	*20.1/30* 	* * 	* *
Tylan 9-Poly 	*up* 	* * 	*9.96/30* 	* * 	* *
Tylan 10-Nitride 	*up*
	*
* 	*10.33/30* 	* * 	* *
Tylan 11-LTO 	*yellow* 	
	*2.91/30* 	* * 	* *
Tylan 12-FGA 	*up* 	
	* * 	* * 	* *
Thermco 1 	*up* 	* * 	* * 	* * 	* *
Thermco 2 	*up* 	* * 	* * 	* * 	* *
Thermco 3 	*future* 	* * 	* * 	* * 	* *
Thermco4 	*future* 	* * 	* * 	* * 	* *
Thermco Poly1 	*up* 	* * 	* * 	* * 	* *
Thermco Poly2 	*up* 	* * 	* * 	* * 	* *
Thermco Nitride1 	*up* 	* * 	* * 	* * 	* *
Thermco bpsg 	*yellow* 	*testing* 	* * 	* * 	* *
TEL Spa 	*up* 	* * 	* * 	* * 	* *
Burn Box 	*up* 	* * 	* * 	* * 	* *
Ebeam 	*up* 	* * 	* * 	* * 	* *
ZYGO 	*up* 	* * 	* * 	* * 	* *
FGA2 	*up* 	* * 	* * 	* * 	* *
SiH4 for furnaces 	* * 	*B on line 587 PSI* 	* changeover working well 
* 	* *

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