From tberg at stanford.edu Fri Apr 1 06:16:01 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 01 Apr 2011 06:16:01 -0700 Subject: Diffusion Morning Report 04/01/11 Message-ID: <4D95D011.8060803@stanford.edu> Good Morning All, Looking good this morning(no fooling). TEOS is ready for a test. Tylan Poly down for pull and clean. Thermco BPSG needs a test. Thermco 2 No TLC flow. PO for SEM PM is in purchasing. No otherissues at this time. Date: 4/1/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *needs test after repairs* *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *down* *pull and clean* *0/30* ** *1* Tylan 10-Nitride *up* ** *9.85/30* ** ** Tylan 11-LTO *yellow* ** *4.58/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *needs test after repair* ** ** ** AMAT Epi *yellow* *running* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 600 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Mon Apr 4 06:54:06 2011 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 04 Apr 2011 06:54:06 -0700 Subject: Diffusion Morning Report Message-ID: <4D99CD7E.1070002@stanford.edu> Good Morning All, Ted is out today. TEOS has a door issue,not pumping. Tylan Poly needs a test. Thermco BPSG needs a test. Thermco 2 No TLC flow. PO for SEM PM is in purchasing. FGA2 has a cracked cover. BPSG door not opening. Date: 4/4/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *yellow* *door not sealing * *18.2/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *yellow * *needs testing * *0/30* ** *1* Tylan 10-Nitride *up* ** *9.85/30* ** ** Tylan 11-LTO *yellow* * door not opening * *8.38/30 * * * Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *yellow* *needs test after repair* ** ** ** AMAT Epi *yellow* *running* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 633 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Apr 5 06:23:58 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 05 Apr 2011 06:23:58 -0700 Subject: Diffusion Morning Report 04/05/11 Message-ID: <4D9B17EE.4050604@stanford.edu> Good Morning All, Looking good this morning. FGA2 has a broken end cap. Tylan LTO needs a test. Thermco 2 no TLC flow. Ebaem compressor is dead. PO for SEM PM is in purchasing. No other major issues at this time. Date: 4/5/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *.12/30* ** ** Tylan 10-Nitride *up* ** *9.85/30* ** ** Tylan 11-LTO *yellow* *needs test* *8.38/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** TEL Spa *up* ** ** ** Burn Box *up* ** ** ** Ebeam *down* cryo compresssor dead ** ** ** ZYGO *up* * * ** ** FGA2 *down* *broken end cap* ** SiH4 for furnaces ** *A on line 600 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Apr 6 06:05:47 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 06 Apr 2011 06:05:47 -0700 Subject: Diffusion Morning Report 04/06/11 Message-ID: <4D9C652B.2040506@stanford.edu> Good Morning All, Looking good this Morning. Epi is having lift issues. FGA2 is has a broken end cap out for repair.Thermco 2 no TLC flow. Ebeam compressor is dead. SEM PM scheduled for start on Thursday if PO goes through. No other issues at this time. Date: 4/6/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *.12/30* ** ** Tylan 10-Nitride *up* ** *9.85/30* ** ** Tylan 11-LTO *yellow* *needs test* *8.38/30* ** *2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *lift issues* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *down* *broken end cap* ** ** ** SiH4 for furnaces ** *A on line 600 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Apr 7 06:29:04 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 07 Apr 2011 06:29:04 -0700 Subject: Diffusion Morning Report 04/07/11 Message-ID: <4D9DBC20.4020000@stanford.edu> Good Morning All, Looking good this morning. Epi had some SiH4 flow and Mapping issues. Tylan LTO had O2 flow issues. It looks like we will be starting the PM on 4160 this morning if FS shows up. Thermco 2 no TLC flow. Ebeam compressor is dead. no other issues at this time. Date: 4/7/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *.12/30* ** ** Tylan 10-Nitride *up* ** *9.92/30* ** ** Tylan 11-LTO *yellow* *O2 flow issues* *8.38/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *mapping and SiH4 flow issues* ** ** *2* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 479 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Apr 8 07:20:23 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 08 Apr 2011 07:20:23 -0700 Subject: Diffusion Morning Report 04/08/11 Message-ID: <4D9F19A7.20709@stanford.edu> Good Morning All, Lo0oking good this morning LTO has door issues. Epi had some mapping issues. SEM 4160 PM is to begin today.Thermco 2 has no Tlc flow.No other issues at this time. Date: 4/8/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .25/30 Tylan 8-SiGe up .88/30 Tylan 9-Poly up .12/30 Tylan 10-Nitride up 9.92/30 Tylan 11-LTO yellow Door close-O2 flow issues 8.38/30 1 Tylan 12-FGA up Thermco 1 up Thermco 2 yellow no tlc flow Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg up AMAT Epi yellow mapping and SiH4 flow issues 2 TEL Spa up Burn Box up Ebeam down cryo compresssor dead ZYGO up FGA2 up SiH4 for furnaces A on line 469 PSI changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Apr 11 09:37:10 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 11 Apr 2011 09:37:10 -0700 Subject: Diffusion Morning Report 04/11/11 Message-ID: <4DA32E36.5060908@stanford.edu> Good Morning All, Looking good this morning. Epi is down for HCl chaNGE. LTO has intermittent O2 flow issues. 4160 PM in progress.No TLC flow on Thermco 2 No other issues at this time. Date: 4/11/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *.12/30* ** ** Tylan 10-Nitride *up* ** *11.03/30* ** ** Tylan 11-LTO *yellow* *O2 flow issues* *9.32/30* ** *2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *yellow* *loader issues* ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *Hcl change* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 469 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Apr 12 06:21:26 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 12 Apr 2011 06:21:26 -0700 Subject: Diffusion Morning Report 04/12/11 Message-ID: <4DA451D6.5000807@stanford.edu> Good Morning All, Looking OK this morning. Epi and Nitride are down for DCS issues . 4160 PM is in progress and will hopefully wrap up today. Tylan LTO has intermittent O2 flow issues. Thermco 2 has no TLC flow. No other major issues at this time. Date: 4/12/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *5.25/30* ** ** Tylan 8-SiGe *up* ** *.88/30* ** ** Tylan 9-Poly *up* ** *.12/30* ** ** Tylan 10-Nitride *down* *no DCS* *11.03/30* ** *2* Tylan 11-LTO *yellow* *O2 flow issues* *9.34/30* ** *3* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *no DCS* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 469 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Apr 13 06:15:41 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 13 Apr 2011 06:15:41 -0700 Subject: Diffusion Morning Report 04/13/11 Message-ID: <4DA5A1FD.4050106@stanford.edu> Good Morning All, Looking OK this morning DCS for Epi and Nitride is down. working on Venturi burn box. SEM PM should wrap up today.Tylan LTO had O 2 flow issues-monitoring.Thermco 2 had no tlc flow. No other major issues at this time. Date: 4/13/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *5.25/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *.34/30* ** ** Tylan 10-Nitride *down* *no DCS* *11.03/30* ** *2* Tylan 11-LTO *yellow* *O2 flow issues* *9.67/30* ** *3* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *No DCS * ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *no DCS* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 449 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Apr 14 06:27:52 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 14 Apr 2011 06:27:52 -0700 Subject: Diffusion Morning Report 04/14/11 Message-ID: <4DA6F658.5010709@stanford.edu> Good Morning all, Looking good this morning. PH3 for Epi is empty. Trying to expedite. Tylan Nitride and Thermco Nitride need tests after DCS restored. Monitoring Tylan LTO O2 flow. Thermco 2 no TLC flow. 4160m PM completed.No other issues at this time. Date: 4/14/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *5.25/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *.34/30* ** ** Tylan 10-Nitride *yellow* *needs test after DCS restored* *11.03/30* ** *2* Tylan 11-LTO *yellow* *O2 flow issues* *9.67/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *down* *needs test after DCS restored* ** ** *1* Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *no PH3* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 449 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Apr 15 06:12:02 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 15 Apr 2011 06:12:02 -0700 Subject: Diffusion Morning Report 04/15/11 Message-ID: <4DA84422.7030500@stanford.edu> Good Morning All, Looking good this morning. Remember*tax day* is Monday. Waiting for PH3 for Epi. Tylan LTO had O2 flow issues-monitoring. No TLC flow on Thermco 2. No other major issues at this time. Date: 4/15/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *5.25/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *.34/30* ** ** Tylan 10-Nitride *up* ** *11.23/30* ** ** Tylan 11-LTO *yellow* *O2 flow issues* *10.74/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** *2* Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* ** ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *no PH3* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 446 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Apr 18 06:28:53 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 18 Apr 2011 06:28:53 -0700 Subject: diffusion Morning Report 04/18/11 Message-ID: <4DAC3C95.1050809@stanford.edu> Good Morning All, Looking Fair this morning. Thermco LPs are down for burn box element change. TEOS is down for High pressure and leak check fail. Tylan 4 had MFS alarms. Reminder Epi has no PH3. No other major issues. Date: 4/18/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *mfs alarms* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *high pressure* *5.25/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *.34/30* ** ** Tylan 10-Nitride *up* ** *11.23/30* ** ** Tylan 11-LTO *yellow* *O2 flow issues* *12.7/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** *2* Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *down* *burnbox repair* ** ** ** Thermco Poly2 *down* *burnbox repair* ** ** ** Thermco Nitride1 *down* *burnbox repair* ** ** ** Thermco bpsg *down* *burnbox repair* ** ** ** AMAT Epi *yellow* *no PH3* ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 446 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Apr 19 06:30:48 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 19 Apr 2011 06:30:48 -0700 Subject: Diffusion Morning Report 04/19/11 Message-ID: <4DAD8E88.3060006@stanford.edu> Good Morning All, Looking good this morning. TEOS has high pressure after dep starts. TEL FS will be here today to install noise filter. Field service will be here today to check out SEM4160 after PM. Epi has no PH3. LTO had O2 flow issues. Thermco 2 no TLC flow. No other issues at this time. > > Date: 4/19/11 THICKNESS-Change at Priority > Tube Name/Number Status > Tylan 1 *up* ** ** ** ** > Tylan 2 *up* ** ** ** ** > Tylan 3 *up* ** ** ** ** > Tylan 4 *up* ** ** ** ** > Tylan 5-BBr3 *up* ** ** ** ** > Tylan 6-POCl3 *up* ** ** ** ** > Tylan 7-TEOS2 *down* *high pressure* *5.25/30* ** *1* > Tylan 8-SiGe *up* ** *1.94/30* ** ** > Tylan 9-Poly *up* ** *.48/30* ** ** > Tylan 10-Nitride *up* ** *11.23/30* ** ** > Tylan 11-LTO *yellow* *O2 flow issues* *16.02/30* ** *2* > Tylan 12-FGA *up* ** ** ** ** > Thermco 1 *up* ** ** ** ** > Thermco 2 *yellow* *no tlc flow* ** ** ** > Thermco 3 *future* ** ** ** ** > Thermco4 *future* ** ** ** ** > Thermco Poly1 *up* * > * ** ** ** > Thermco Poly2 *up* ** ** ** ** > Thermco Nitride1 *up* ** ** ** ** > Thermco bpsg *up* ** ** ** ** > AMAT Epi *yellow* *no PH3* ** ** ** > TEL Spa *down* *installing filter* ** ** ** > Burn Box *up* ** ** ** ** > Ebeam *down* *cryo compresssor dead* ** ** ** > ZYGO *up* * > * ** ** ** > FGA2 *up* ** ** ** ** > SiH4 for furnaces ** *A on line 446 PSI* *changeover working > well* ** ** > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Apr 20 06:11:56 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 20 Apr 2011 06:11:56 -0700 Subject: Diffusion Morning Report 04/20/11 Message-ID: <4DAEDB9C.50009@stanford.edu> Good morning All, Looking good this morning. B2H6 and Germane cylinders for Epi changed yesterday- will be on today. Noise filter installed on TEL.Feild service in yesterday to tweek 4160- need inputs from users. Tylan LTO had O2 flow issues. Thermco 2 had no TLC flow. No other issues at this time. Date: 4/20/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *5.25/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *.62/30* ** ** Tylan 10-Nitride *up* ** *11.23/30* ** ** Tylan 11-LTO *yellow* *O2 flow issues* *16.9/30* ** *2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *no PH3 -B2H6 and GeH4 cylinders changed* ** ** *1* TEL Spa *up* *noise filter installed* ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 446 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Apr 21 06:55:20 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 21 Apr 2011 06:55:20 -0700 Subject: Diffusion Morning Report 04/21/11 Message-ID: <4DB03748.7030800@stanford.edu> Good Morning All, Looking good this morning. No major issues at this time. Ray is out today. Date: 4/21/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *5.25/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *.62/30* ** ** Tylan 10-Nitride *up* ** *11.23/30* ** ** Tylan 11-LTO *yellow* *O2 flow issues* *17.06/30* ** *2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *no PH3* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 446 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Apr 22 06:35:36 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 22 Apr 2011 06:35:36 -0700 Subject: Diffusion Morning Report 04/22/11 Message-ID: <4DB18428.3060802@stanford.edu> Good Morning all, Looking good this morning. No major issues at this time. Burn box clean this morning. Date: 4/22/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *5.25/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *.62/30* ** ** Tylan 10-Nitride *up* ** *11.48/30* ** ** Tylan 11-LTO *yellow* *O2 flow issues* *17.06/30* ** *2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *no PH3* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 446 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Apr 25 06:12:41 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 25 Apr 2011 06:12:41 -0700 Subject: Diffusion Morning Report 04/25/11 Message-ID: <4DB57349.6020901@stanford.edu> Good Morning All, Looking good this morning. PH3 for Epi passed leak check and will be turned on this morning. Tylan LTO had O2 mfs alarms. Thermco 2 had no TLC flow. No other major issues at this time. Date: 4/25/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *5.25/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *.62/30* ** ** Tylan 10-Nitride *up* ** *11.62/30* ** ** Tylan 11-LTO *yellow* *O2 flow issues* *17.06/30* ** *2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *PH3 back on today* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 429 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Apr 26 06:46:19 2011 From: tberg at stanford.edu (Ted Berg) Date: Tue, 26 Apr 2011 06:46:19 -0700 Subject: Diffusion Morning Report 04/26/11 Message-ID: <4DB6CCAB.1060408@stanford.edu> Good Morning All, Looking good this morning. Epi HCL is empty-changing cylinder. TEOS has a leak. 4160 SEM will be down Thursday - Monday for tip change. Thermco 2 no tlc flow. Tylan BPgs had O2 MFS alarms. no other issues at this time. Date: 4/26/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *leak* *5.25/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *.77/30* ** ** Tylan 10-Nitride *up* ** *11.62/30* ** ** Tylan 11-LTO *yellow* *O2 flow issues* *17.06/30* ** *2* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *HCl empty* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 429 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Apr 27 06:12:37 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 27 Apr 2011 06:12:37 -0700 Subject: Diffusion Morning Report 04/27/11 Message-ID: <4DB81645.6060708@stanford.edu> Good Morning All, Looking good this morning . TEOS is going back together after pull. Tylan LTO has low dep rate. 4160 Tip change tomorrow through Monday.Thermco 2 no TLC flow. No other major problems at this time. Date: 4/27/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *up* ** ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *down* *leak-tube pull* *0/30* ** *2* Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *.77/30* ** ** Tylan 10-Nitride *up* ** *11.62/30* ** ** Tylan 11-LTO *yellow* *low dep* *17.41/30* ** *1* Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *up* ** ** ** ** TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 401 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Apr 28 07:26:08 2011 From: tberg at stanford.edu (Ted Berg) Date: Thu, 28 Apr 2011 07:26:08 -0700 Subject: Diffusion Morning Report 04/28/11 Message-ID: <4DB97900.8030703@stanford.edu> Good Morning All, Looking good this morning. LTO and TEOS are back up after tube changes. Epi is failing Etch coat. tylan 4 had door/loader issues. SEM 4160 is down for tip change. No other major issues at this time. Date: 4/28/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *door/loader issues* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *0/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *.77/30* ** ** Tylan 10-Nitride *up* ** *11.62/30* ** ** Tylan 11-LTO *yellow* *users have run* *0/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *down* *failed geetch coat* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 401 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Apr 29 07:08:18 2011 From: tberg at stanford.edu (Ted Berg) Date: Fri, 29 Apr 2011 07:08:18 -0700 Subject: Diffusion Morning Report 04/29/11 Message-ID: <4DBAC652.60901@stanford.edu> Good Morning All, Looking good this morning. Epi had some HCl flow issues. Burn box cleaned this morning. Tylan 4v had some door/loader issues. 4160 SEM tip change in progress- backlash looks good now. Thermco 2 no tlc flow. No other major issues at this time. Date: 4/29/11 THICKNESS-Change at Priority Tube Name/Number Status Tylan 1 *up* ** ** ** ** Tylan 2 *up* ** ** ** ** Tylan 3 *up* ** ** ** ** Tylan 4 *yellow* *possible door/loader issues* ** ** ** Tylan 5-BBr3 *up* ** ** ** ** Tylan 6-POCl3 *up* ** ** ** ** Tylan 7-TEOS2 *up* ** *.9/30* ** ** Tylan 8-SiGe *up* ** *1.94/30* ** ** Tylan 9-Poly *up* ** *.77/30* ** ** Tylan 10-Nitride *up* ** *11.77/30* ** ** Tylan 11-LTO *up* ** *2.09/30* ** ** Tylan 12-FGA *up* ** ** ** ** Thermco 1 *up* ** ** ** ** Thermco 2 *yellow* *no tlc flow* ** ** ** Thermco 3 *future* ** ** ** ** Thermco4 *future* ** ** ** ** Thermco Poly1 *up* * * ** ** ** Thermco Poly2 *up* ** ** ** ** Thermco Nitride1 *up* ** ** ** ** Thermco bpsg *up* ** ** ** ** AMAT Epi *yellow* *HCL flow issues* ** ** *1* TEL Spa *up* ** ** ** ** Burn Box *up* ** ** ** ** Ebeam *down* *cryo compresssor dead* ** ** ** ZYGO *up* * * ** ** ** FGA2 *up* ** ** ** ** SiH4 for furnaces ** *A on line 401 PSI* *changeover working well* ** ** -------------- next part -------------- An HTML attachment was scrubbed... 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