Diffusion Morning Report

Ray Seymour rseymour at stanford.edu
Mon Apr 4 06:54:06 PDT 2011


Good Morning All,
Ted is out today. TEOS has a door issue,not pumping. Tylan Poly needs a 
test. Thermco BPSG needs a test. Thermco 2 No TLC flow. PO for SEM PM is 
in purchasing. FGA2 has a cracked cover. BPSG door not opening.

					
	Date: 	4/4/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*yellow* 	*door not sealing
* 	*18.2/30* 	** 	**
Tylan 8-SiGe 	*up* 	** 	*.88/30* 	** 	**
Tylan 9-Poly 	*yellow
* 	*needs testing
* 	*0/30* 	** 	*1*
Tylan 10-Nitride 	*up* 	** 	*9.85/30* 	** 	**
Tylan 11-LTO 	*yellow* 	* door not opening
* 	*8.38/30
* 	
	*
*
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*yellow* 	*no tlc flow* 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	** 	** 	** 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*yellow* 	*needs test after repair* 	** 	** 	**
AMAT Epi 	*yellow* 	*running* 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
ZYGO 	*up* 	*
* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*A on line 633 PSI* 	*changeover working 
well* 	** 	**

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