diffusion Morning Report 04/18/11

Ted Berg tberg at stanford.edu
Mon Apr 18 06:28:53 PDT 2011


Good Morning All,
     Looking Fair this morning. Thermco LPs are down for burn box 
element change. TEOS is down for High pressure and leak check fail. 
Tylan 4 had MFS alarms. Reminder Epi has no PH3. No other major issues.

					
	Date: 	4/18/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*yellow* 	*mfs alarms* 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*down* 	*high pressure* 	*5.25/30* 	** 	**
Tylan 8-SiGe 	*up* 	** 	*1.94/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*.34/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*11.23/30* 	** 	**
Tylan 11-LTO 	*yellow* 	*O2 flow issues* 	*12.7/30* 	** 	*1*
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*yellow* 	*no tlc flow* 	** 	** 	*2*
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*down* 	*burnbox repair* 	** 	** 	**
Thermco Poly2 	*down* 	*burnbox repair* 	** 	** 	**
Thermco Nitride1 	*down* 	*burnbox repair* 	** 	** 	**
Thermco bpsg 	*down* 	*burnbox repair* 	** 	** 	**
AMAT Epi 	*yellow* 	*no PH3* 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
ZYGO 	*up* 	*
* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*A on line 446 PSI* 	*changeover working 
well* 	** 	**


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