Diffusion Morning Report 04/27/11

Ted Berg tberg at stanford.edu
Wed Apr 27 06:12:37 PDT 2011


Good Morning All,
     Looking good this morning . TEOS is going back together after pull. 
Tylan LTO has  low dep rate. 4160 Tip change tomorrow through 
Monday.Thermco 2 no TLC flow. No other major problems at this time.

					
	Date: 	4/27/11 	THICKNESS-Change at 		Priority
Tube Name/Number 	Status 				
Tylan 1 	*up* 	** 	** 	** 	**
Tylan 2 	*up* 	** 	** 	** 	**
Tylan 3 	*up* 	** 	** 	** 	**
Tylan 4 	*up* 	** 	** 	** 	**
Tylan 5-BBr3 	*up* 	** 	** 	** 	**
Tylan 6-POCl3 	*up* 	** 	** 	** 	**
Tylan 7-TEOS2 	*down* 	*leak-tube pull* 	*0/30* 	** 	*2*
Tylan 8-SiGe 	*up* 	** 	*1.94/30* 	** 	**
Tylan 9-Poly 	*up* 	** 	*.77/30* 	** 	**
Tylan 10-Nitride 	*up* 	** 	*11.62/30* 	** 	**
Tylan 11-LTO 	*yellow* 	*low dep* 	*17.41/30* 	** 	*1*
Tylan 12-FGA 	*up* 	** 	** 	** 	**
Thermco 1 	*up* 	** 	** 	** 	**
Thermco 2 	*yellow* 	*no tlc flow* 	** 	** 	**
Thermco 3 	*future* 	** 	** 	** 	**
Thermco4 	*future* 	** 	** 	** 	**
Thermco Poly1 	*up* 	*
* 	** 	** 	**
Thermco Poly2 	*up* 	** 	** 	** 	**
Thermco Nitride1 	*up* 	** 	** 	** 	**
Thermco bpsg 	*up* 	** 	** 	** 	**
AMAT Epi 	*up* 	** 	** 	** 	**
TEL Spa 	*up* 	** 	** 	** 	**
Burn Box 	*up* 	** 	** 	** 	**
Ebeam 	*down* 	*cryo compresssor dead* 	** 	** 	**
ZYGO 	*up* 	*
* 	** 	** 	**
FGA2 	*up* 	** 	** 	** 	**
SiH4 for furnaces 	** 	*A on line 401 PSI* 	*changeover working 
well* 	** 	**


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